SG76546A1 - Nozzle-injector for arc plasma deposition apparatus - Google Patents

Nozzle-injector for arc plasma deposition apparatus

Info

Publication number
SG76546A1
SG76546A1 SG1998001462A SG1998001462A SG76546A1 SG 76546 A1 SG76546 A1 SG 76546A1 SG 1998001462 A SG1998001462 A SG 1998001462A SG 1998001462 A SG1998001462 A SG 1998001462A SG 76546 A1 SG76546 A1 SG 76546A1
Authority
SG
Singapore
Prior art keywords
injector
nozzle
deposition apparatus
plasma deposition
arc plasma
Prior art date
Application number
SG1998001462A
Other languages
English (en)
Inventor
Barry Lee-Mean Yang
Original Assignee
Gen Electric
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Electric filed Critical Gen Electric
Publication of SG76546A1 publication Critical patent/SG76546A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
    • B05B7/22—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc
    • B05B7/222—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc using an arc
    • B05B7/226—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc using an arc the material being originally a particulate material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
    • B05B12/12—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to conditions of ambient medium or target, e.g. humidity, temperature position or movement of the target relative to the spray apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
SG1998001462A 1997-06-26 1998-06-18 Nozzle-injector for arc plasma deposition apparatus SG76546A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US5083797P 1997-06-26 1997-06-26
US09/033,862 US6213049B1 (en) 1997-06-26 1998-03-03 Nozzle-injector for arc plasma deposition apparatus

Publications (1)

Publication Number Publication Date
SG76546A1 true SG76546A1 (en) 2000-11-21

Family

ID=26710231

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1998001462A SG76546A1 (en) 1997-06-26 1998-06-18 Nozzle-injector for arc plasma deposition apparatus

Country Status (7)

Country Link
US (1) US6213049B1 (de)
EP (1) EP0887110B1 (de)
JP (1) JPH1180963A (de)
CN (1) CN1117890C (de)
CA (1) CA2238158A1 (de)
DE (1) DE69826183T2 (de)
SG (1) SG76546A1 (de)

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US6641673B2 (en) * 2000-12-20 2003-11-04 General Electric Company Fluid injector for and method of prolonged delivery and distribution of reagents into plasma
US6397776B1 (en) * 2001-06-11 2002-06-04 General Electric Company Apparatus for large area chemical vapor deposition using multiple expanding thermal plasma generators
US6681716B2 (en) 2001-11-27 2004-01-27 General Electric Company Apparatus and method for depositing large area coatings on non-planar surfaces
US6948448B2 (en) * 2001-11-27 2005-09-27 General Electric Company Apparatus and method for depositing large area coatings on planar surfaces
NL1020634C2 (nl) * 2002-05-21 2003-11-24 Otb Group Bv Werkwijze voor het passiveren van een halfgeleider substraat.
US7282244B2 (en) * 2003-09-05 2007-10-16 General Electric Company Replaceable plate expanded thermal plasma apparatus and method
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WO2005098083A2 (en) * 2004-04-07 2005-10-20 Michigan State University Miniature microwave plasma torch application and method of use thereof
US9180423B2 (en) 2005-04-19 2015-11-10 SDCmaterials, Inc. Highly turbulent quench chamber
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CA2658210A1 (en) * 2008-04-04 2009-10-04 Sulzer Metco Ag Method and apparatus for the coating and for the surface treatment of substrates by means of a plasma beam
KR101750841B1 (ko) * 2009-02-05 2017-06-26 오엘리콘 멧코 아게, 볼렌 기재 표면의 코팅 또는 처리를 위한 플라즈마 코팅 시스템 및 그 방법
US9126191B2 (en) 2009-12-15 2015-09-08 SDCmaterials, Inc. Advanced catalysts for automotive applications
US9090475B1 (en) 2009-12-15 2015-07-28 SDCmaterials, Inc. In situ oxide removal, dispersal and drying for silicon SiO2
US8652992B2 (en) 2009-12-15 2014-02-18 SDCmaterials, Inc. Pinning and affixing nano-active material
US9149797B2 (en) 2009-12-15 2015-10-06 SDCmaterials, Inc. Catalyst production method and system
US8803025B2 (en) * 2009-12-15 2014-08-12 SDCmaterials, Inc. Non-plugging D.C. plasma gun
US8557727B2 (en) 2009-12-15 2013-10-15 SDCmaterials, Inc. Method of forming a catalyst with inhibited mobility of nano-active material
US8545652B1 (en) 2009-12-15 2013-10-01 SDCmaterials, Inc. Impact resistant material
US8470112B1 (en) 2009-12-15 2013-06-25 SDCmaterials, Inc. Workflow for novel composite materials
WO2011108671A1 (ja) * 2010-03-04 2011-09-09 イマジニアリング株式会社 被膜形成装置、及び被膜形成物の製造方法
US8669202B2 (en) 2011-02-23 2014-03-11 SDCmaterials, Inc. Wet chemical and plasma methods of forming stable PtPd catalysts
EP2697295B1 (de) 2011-04-14 2018-12-19 Exatec, LLC. Organisches harzlaminat
US8361607B2 (en) 2011-04-14 2013-01-29 Exatec Llc Organic resin laminate
WO2013028575A1 (en) 2011-08-19 2013-02-28 Sdc Materials Inc. Coated substrates for use in catalysis and catalytic converters and methods of coating substrates with washcoat compositions
WO2013032421A1 (en) 2011-08-26 2013-03-07 Exatec Llc Organic resin laminate, methods of making and using the same, and articles comprising the same
US9156025B2 (en) 2012-11-21 2015-10-13 SDCmaterials, Inc. Three-way catalytic converter using nanoparticles
US9511352B2 (en) 2012-11-21 2016-12-06 SDCmaterials, Inc. Three-way catalytic converter using nanoparticles
US9586179B2 (en) 2013-07-25 2017-03-07 SDCmaterials, Inc. Washcoats and coated substrates for catalytic converters and methods of making and using same
RU2541349C1 (ru) * 2013-10-11 2015-02-10 Федеральное государственное бюджетное учреждение науки Институт физического материаловедения Сибирского отделения Российской академии наук (ИФМ СО РАН) Высокоресурсный электродуговой генератор низкотемпературной плазмы с защитным наноструктурированным углеродным покрытием электродов
CA2926133A1 (en) 2013-10-22 2015-04-30 SDCmaterials, Inc. Catalyst design for heavy-duty diesel combustion engines
WO2015061482A1 (en) 2013-10-22 2015-04-30 SDCmaterials, Inc. Compositions of lean nox trap
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WO2015194031A1 (ja) * 2014-06-20 2015-12-23 株式会社ユーテック プラズマｃｖｄ装置及び磁気記録媒体の製造方法
CN104046946A (zh) * 2014-07-04 2014-09-17 苏州普京真空技术有限公司 真空电离镀膜机
WO2016158054A1 (ja) * 2015-03-30 2016-10-06 東京エレクトロン株式会社 処理装置および処理方法、ならびにガスクラスター発生装置および発生方法
JP6545053B2 (ja) * 2015-03-30 2019-07-17 東京エレクトロン株式会社 処理装置および処理方法、ならびにガスクラスター発生装置および発生方法
DE102016104863B4 (de) * 2016-03-16 2023-11-02 Lisa Dräxlmaier GmbH Vorrichtung zum Bedampfen eines Bauteils

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Also Published As

Publication number Publication date
DE69826183T2 (de) 2005-11-17
EP0887110B1 (de) 2004-09-15
CN1210902A (zh) 1999-03-17
CN1117890C (zh) 2003-08-13
JPH1180963A (ja) 1999-03-26
DE69826183D1 (de) 2004-10-21
EP0887110A1 (de) 1998-12-30
US6213049B1 (en) 2001-04-10
CA2238158A1 (en) 1998-12-26

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