SG71925A1 - Article having a durable ceramic coating and apparatus and method for making the article - Google Patents
Article having a durable ceramic coating and apparatus and method for making the articleInfo
- Publication number
- SG71925A1 SG71925A1 SG1999002559A SG1999002559A SG71925A1 SG 71925 A1 SG71925 A1 SG 71925A1 SG 1999002559 A SG1999002559 A SG 1999002559A SG 1999002559 A SG1999002559 A SG 1999002559A SG 71925 A1 SG71925 A1 SG 71925A1
- Authority
- SG
- Singapore
- Prior art keywords
- article
- making
- ceramic coating
- durable ceramic
- durable
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
- C23C28/3215—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer at least one MCrAlX layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
- C23C28/3455—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/36—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including layers graded in composition or physical properties
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
- F01D5/12—Blades
- F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
- F01D5/288—Protective coatings for blades
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T50/00—Aeronautics or air transport
- Y02T50/60—Efficient propulsion technologies, e.g. for aircraft
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Ceramic Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11828598A | 1998-07-17 | 1998-07-17 | |
US09/118,540 US6187453B1 (en) | 1998-07-17 | 1998-07-17 | Article having a durable ceramic coating |
US09/118,289 US6007880A (en) | 1998-07-17 | 1998-07-17 | Method for generating a ceramic coating |
Publications (1)
Publication Number | Publication Date |
---|---|
SG71925A1 true SG71925A1 (en) | 2000-04-18 |
Family
ID=27382137
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG1999002559A SG71925A1 (en) | 1998-07-17 | 1999-05-24 | Article having a durable ceramic coating and apparatus and method for making the article |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP0972853B1 (de) |
JP (2) | JP2000160324A (de) |
KR (1) | KR100626777B1 (de) |
DE (1) | DE69903503T2 (de) |
SG (1) | SG71925A1 (de) |
UA (1) | UA63933C2 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100694265B1 (ko) * | 2000-12-21 | 2007-03-14 | 재단법인 포항산업과학연구원 | 알루미나 내화갑에 지르코니아를 습식코팅하는 방법 |
US6830622B2 (en) | 2001-03-30 | 2004-12-14 | Lam Research Corporation | Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereof |
US6494250B1 (en) | 2001-05-14 | 2002-12-17 | Howmet Research Corporation | Impregnated alumina-based core and method |
US6730413B2 (en) * | 2001-07-31 | 2004-05-04 | General Electric Company | Thermal barrier coating |
KR100443772B1 (ko) * | 2002-01-16 | 2004-08-09 | 삼성전자주식회사 | 코팅 처리된 기재 |
US6720038B2 (en) * | 2002-02-11 | 2004-04-13 | General Electric Company | Method of forming a coating resistant to deposits and coating formed thereby |
DE10332938B4 (de) * | 2003-07-19 | 2016-12-29 | General Electric Technology Gmbh | Thermisch belastetes Bauteil einer Gasturbine |
US6887595B1 (en) | 2003-12-30 | 2005-05-03 | General Electric Company | Thermal barrier coatings having lower layer for improved adherence to bond coat |
US7326470B2 (en) | 2004-04-28 | 2008-02-05 | United Technologies Corporation | Thin 7YSZ, interfacial layer as cyclic durability (spallation) life enhancement for low conductivity TBCs |
JP5164250B2 (ja) * | 2007-06-08 | 2013-03-21 | 株式会社Ihi | 遮熱コーティング部材とその製造方法 |
US20090186237A1 (en) | 2008-01-18 | 2009-07-23 | Rolls-Royce Corp. | CMAS-Resistant Thermal Barrier Coatings |
EP2596068B1 (de) | 2010-07-23 | 2015-09-02 | Rolls-Royce Corporation | Wärmedämmbeschichtungen mit c-mas-resistenten wärmedämmbeschichtungsschichten |
WO2012027442A1 (en) * | 2010-08-27 | 2012-03-01 | Rolls-Royce Corporation | Rare earth silicate environmental barrier coatings |
EP3097219B2 (de) | 2014-01-20 | 2023-10-11 | Raytheon Technologies Corporation | Physikalische dampfabscheidung mit drehzahlauswahl hinsichtlich der abscheidungsgeschwindigkeit |
US20170145557A1 (en) * | 2015-11-23 | 2017-05-25 | United Technologies Corporation | Crucible and feedstock for vapor deposition |
US20170144181A1 (en) | 2015-11-23 | 2017-05-25 | United Technologies Corporation | Tooling for vapor deposition |
US20190017177A1 (en) | 2017-07-17 | 2019-01-17 | Rolls-Royce Corporation | Thermal barrier coatings for components in high-temperature mechanical systems |
US11655543B2 (en) | 2017-08-08 | 2023-05-23 | Rolls-Royce Corporation | CMAS-resistant barrier coatings |
US10851656B2 (en) | 2017-09-27 | 2020-12-01 | Rolls-Royce Corporation | Multilayer environmental barrier coating |
CN108048779B (zh) * | 2017-12-21 | 2019-11-12 | 福州大学 | 具有耐铝液腐蚀复合陶瓷涂层的内加热蒸发篮的制备方法 |
CN114502767B (zh) * | 2019-11-29 | 2023-10-27 | Lg电子株式会社 | 沉积用坩埚 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1032998B (de) * | 1954-04-03 | 1958-06-26 | Standard Elektrik Ag | Vorrichtung zur Herstellung von duennen Schichten aus mehreren Komponenten |
US4299865A (en) * | 1979-09-06 | 1981-11-10 | General Motors Corporation | Abradable ceramic seal and method of making same |
JPS57161061A (en) * | 1981-03-30 | 1982-10-04 | Tdk Corp | Crucible for evaporation |
DE3316554C1 (de) * | 1983-05-06 | 1984-07-12 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Verdampfervorrichtung mit Strahlheizung zum Aufdampfen mehrerer Materialien |
US5334462A (en) * | 1989-09-08 | 1994-08-02 | United Technologies Corporation | Ceramic material and insulating coating made thereof |
US5087477A (en) * | 1990-02-05 | 1992-02-11 | United Technologies Corporation | Eb-pvd method for applying ceramic coatings |
US5716720A (en) * | 1995-03-21 | 1998-02-10 | Howmet Corporation | Thermal barrier coating system with intermediate phase bondcoat |
JP3943139B2 (ja) * | 1996-12-10 | 2007-07-11 | シーメンス アクチエンゲゼルシヤフト | 高温ガスに曝される製品ならびにその製造方法 |
JPH11152561A (ja) * | 1997-11-20 | 1999-06-08 | Toray Ind Inc | 電子ビーム蒸着装置およびこれを用いた薄膜の製造方法 |
-
1999
- 1999-05-24 SG SG1999002559A patent/SG71925A1/en unknown
- 1999-07-07 JP JP11192502A patent/JP2000160324A/ja active Pending
- 1999-07-14 DE DE69903503T patent/DE69903503T2/de not_active Expired - Lifetime
- 1999-07-14 EP EP99305594A patent/EP0972853B1/de not_active Expired - Lifetime
- 1999-07-14 KR KR1019990028349A patent/KR100626777B1/ko not_active IP Right Cessation
- 1999-07-16 UA UA99074108A patent/UA63933C2/uk unknown
- 1999-07-19 JP JP11204006A patent/JP2000144388A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0972853B1 (de) | 2002-10-16 |
EP0972853A1 (de) | 2000-01-19 |
JP2000144388A (ja) | 2000-05-26 |
JP2000160324A (ja) | 2000-06-13 |
KR20000011701A (ko) | 2000-02-25 |
DE69903503D1 (de) | 2002-11-21 |
DE69903503T2 (de) | 2003-06-05 |
UA63933C2 (uk) | 2004-02-16 |
KR100626777B1 (ko) | 2006-09-22 |
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