SG49697A1 - Novolak resin mixtures - Google Patents

Novolak resin mixtures

Info

Publication number
SG49697A1
SG49697A1 SG1996004193A SG1996004193A SG49697A1 SG 49697 A1 SG49697 A1 SG 49697A1 SG 1996004193 A SG1996004193 A SG 1996004193A SG 1996004193 A SG1996004193 A SG 1996004193A SG 49697 A1 SG49697 A1 SG 49697A1
Authority
SG
Singapore
Prior art keywords
novolak resin
resin mixtures
mixtures
novolak
resin
Prior art date
Application number
SG1996004193A
Other languages
English (en)
Inventor
Ping-Hung Lu
Anthony Canize
Dinesh N Khanna
Dalil M Rahman
Original Assignee
Hoechst Celanese Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoechst Celanese Corp filed Critical Hoechst Celanese Corp
Publication of SG49697A1 publication Critical patent/SG49697A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L61/00—Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
    • C08L61/04—Condensation polymers of aldehydes or ketones with phenols only
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
SG1996004193A 1992-09-28 1993-09-24 Novolak resin mixtures SG49697A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/953,031 US5371169A (en) 1992-09-28 1992-09-28 Novolak resin mixtures

Publications (1)

Publication Number Publication Date
SG49697A1 true SG49697A1 (en) 1998-06-15

Family

ID=25493484

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996004193A SG49697A1 (en) 1992-09-28 1993-09-24 Novolak resin mixtures

Country Status (9)

Country Link
US (1) US5371169A (xx)
EP (1) EP0662990B1 (xx)
JP (1) JP3549882B2 (xx)
KR (1) KR100280598B1 (xx)
DE (1) DE69314965T2 (xx)
HK (1) HK1002332A1 (xx)
SG (1) SG49697A1 (xx)
TW (1) TW343225B (xx)
WO (1) WO1994007955A1 (xx)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6297352B1 (en) * 1998-11-12 2001-10-02 Clariant Finance (Bvi) Limited Method of reducing metal ion content of film-forming resins using a liquid/liquid centrifuge
US6121412A (en) * 1998-11-12 2000-09-19 Clariant Finance (Bvi) Limited Preparation of fractionated novolak resins by a novel extraction technique
KR100846085B1 (ko) * 2001-10-31 2008-07-14 주식회사 동진쎄미켐 액정표시장치 회로용 포토레지스트 조성물
JP4283773B2 (ja) * 2002-08-30 2009-06-24 旭有機材工業株式会社 ノボラック型フェノール樹脂の製造方法
US7691556B2 (en) * 2004-09-15 2010-04-06 Az Electronic Materials Usa Corp. Antireflective compositions for photoresists
US20060057501A1 (en) * 2004-09-15 2006-03-16 Hengpeng Wu Antireflective compositions for photoresists
US7553905B2 (en) * 2005-10-31 2009-06-30 Az Electronic Materials Usa Corp. Anti-reflective coatings
US20090042133A1 (en) * 2007-08-10 2009-02-12 Zhong Xiang Antireflective Coating Composition
FR2959226B1 (fr) * 2010-04-21 2012-05-25 Saint Gobain Technical Fabrics Structure de fils de verre destinee a renforcer des articles abrasifs agglomeres.
TWI485520B (zh) * 2013-06-11 2015-05-21 Chi Mei Corp 負型感光性樹脂組成物及其應用

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3666473A (en) * 1970-10-06 1972-05-30 Ibm Positive photoresists for projection exposure
JPS5271224A (en) * 1975-12-11 1977-06-14 Toshiba Corp Positive type light sensitive composition
US4551409A (en) * 1983-11-07 1985-11-05 Shipley Company Inc. Photoresist composition of cocondensed naphthol and phenol with formaldehyde in admixture with positive o-quinone diazide or negative azide
JPS616647A (ja) * 1984-06-20 1986-01-13 Konishiroku Photo Ind Co Ltd ポジ型感光性平版印刷版用感光性組成物
JPS61106297A (ja) * 1984-10-30 1986-05-24 Konishiroku Photo Ind Co Ltd 感光性平版印刷版
JPH0654384B2 (ja) * 1985-08-09 1994-07-20 東京応化工業株式会社 ポジ型ホトレジスト組成物
JP2693472B2 (ja) * 1987-11-26 1997-12-24 株式会社東芝 レジスト
JP2623778B2 (ja) * 1988-10-18 1997-06-25 日本合成ゴム株式会社 感放射線性樹脂組成物

Also Published As

Publication number Publication date
EP0662990B1 (en) 1997-10-29
KR950703611A (ko) 1995-09-20
US5371169A (en) 1994-12-06
WO1994007955A1 (en) 1994-04-14
TW343225B (en) 1998-10-21
JPH08502091A (ja) 1996-03-05
DE69314965D1 (de) 1997-12-04
EP0662990A1 (en) 1995-07-19
JP3549882B2 (ja) 2004-08-04
KR100280598B1 (ko) 2001-02-01
HK1002332A1 (en) 1998-08-14
DE69314965T2 (de) 1998-02-26

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