SG184003A1 - Writing repeating patterns of features to a substrate - Google Patents
Writing repeating patterns of features to a substrate Download PDFInfo
- Publication number
- SG184003A1 SG184003A1 SG2012067195A SG2012067195A SG184003A1 SG 184003 A1 SG184003 A1 SG 184003A1 SG 2012067195 A SG2012067195 A SG 2012067195A SG 2012067195 A SG2012067195 A SG 2012067195A SG 184003 A1 SG184003 A1 SG 184003A1
- Authority
- SG
- Singapore
- Prior art keywords
- features
- write
- region
- compensation values
- substrate
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 claims abstract description 17
- 230000015654 memory Effects 0.000 claims description 15
- 238000003860 storage Methods 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000013500 data storage Methods 0.000 abstract description 8
- 238000013459 approach Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 230000001788 irregular Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012552 review Methods 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000010076 replication Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B5/596—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for track following on disks
- G11B5/59633—Servo formatting
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B5/596—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for track following on disks
- G11B5/59633—Servo formatting
- G11B5/59638—Servo formatting apparatuses, e.g. servo-writers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B5/596—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for track following on disks
- G11B5/59688—Servo signal format patterns or signal processing thereof, e.g. dual, tri, quad, burst signal patterns
Landscapes
- Engineering & Computer Science (AREA)
- Signal Processing (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Optical Recording Or Reproduction (AREA)
- Signal Processing For Digital Recording And Reproducing (AREA)
- Electron Beam Exposure (AREA)
- Moving Of The Head To Find And Align With The Track (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US31159710P | 2010-03-08 | 2010-03-08 | |
| PCT/US2011/027590 WO2011112610A1 (en) | 2010-03-08 | 2011-03-08 | Writing repeating patterns of features to a substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG184003A1 true SG184003A1 (en) | 2012-10-30 |
Family
ID=44531142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG2012067195A SG184003A1 (en) | 2010-03-08 | 2011-03-08 | Writing repeating patterns of features to a substrate |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8300505B2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP5615386B2 (cg-RX-API-DMAC7.html) |
| CN (1) | CN102859594A (cg-RX-API-DMAC7.html) |
| SG (1) | SG184003A1 (cg-RX-API-DMAC7.html) |
| WO (1) | WO2011112610A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20090118745A (ko) * | 2008-05-14 | 2009-11-18 | 삼성전자주식회사 | 서보 패턴 오버헤드 최적화 방법 및 이를 이용한 디스크드라이브 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5450383A (en) * | 1994-05-26 | 1995-09-12 | International Business Machines Corporation | Monitoring and adjusting laser write power in an optical disk recorder using pulse-width modulated power level checking signals |
| JP3469422B2 (ja) * | 1996-02-23 | 2003-11-25 | 株式会社東芝 | 荷電ビーム描画方法及び描画装置 |
| JP3729920B2 (ja) * | 1996-03-18 | 2005-12-21 | パイオニア株式会社 | 情報記録媒体並びにその記録装置及び再生装置 |
| US20010028620A1 (en) * | 1997-12-24 | 2001-10-11 | Guerra John M. | Information storage systems utilizing media with optically-differentiated data sites |
| US6014200A (en) * | 1998-02-24 | 2000-01-11 | Nikon Corporation | High throughput electron beam lithography system |
| US6313476B1 (en) * | 1998-12-14 | 2001-11-06 | Kabushiki Kaisha Toshiba | Charged beam lithography system |
| JP3783909B2 (ja) * | 1999-05-20 | 2006-06-07 | パイオニア株式会社 | カッティング装置、情報記録媒体、情報記録装置及び情報記録方法並びに、カッティング方法 |
| US6639177B2 (en) * | 2001-03-29 | 2003-10-28 | Gsi Lumonics Corporation | Method and system for processing one or more microstructures of a multi-material device |
| US6738396B2 (en) * | 2001-07-24 | 2004-05-18 | Gsi Lumonics Ltd. | Laser based material processing methods and scalable architecture for material processing |
| TW497138B (en) * | 2001-08-28 | 2002-08-01 | Winbond Electronics Corp | Method for improving consistency of critical dimension |
| US6977791B2 (en) * | 2002-03-23 | 2005-12-20 | Kla-Tencor Technologies Corporation | Media servowriting system |
| JP2004177783A (ja) * | 2002-11-28 | 2004-06-24 | Fuji Photo Film Co Ltd | 電子ビーム描画方法 |
| US7149043B2 (en) * | 2002-12-27 | 2006-12-12 | Matsushita Electric Industrial Co., Ltd. | Methods for self-servowriting using write-current variation |
| JP2006512758A (ja) * | 2002-12-30 | 2006-04-13 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | プロセス窓を最適化するリソグラフィ・パラメータの決定方法 |
| JP2005004906A (ja) * | 2003-06-13 | 2005-01-06 | Ricoh Co Ltd | 情報記録方法及び情報記録装置 |
| US6995940B2 (en) * | 2003-07-22 | 2006-02-07 | Matsushita Electric Industrial Co., Ltd. | Systems for WORF improvement in conditional servowriting |
| US7526357B2 (en) * | 2004-12-13 | 2009-04-28 | The Aerospace Corporation | Pulse modulation laser writing system |
| US20070177433A1 (en) * | 2005-09-07 | 2007-08-02 | Jean-Francois Poirier | Method and system for data security of recording media |
| JP4476975B2 (ja) * | 2005-10-25 | 2010-06-09 | 株式会社ニューフレアテクノロジー | 荷電粒子ビーム照射量演算方法、荷電粒子ビーム描画方法、プログラム及び荷電粒子ビーム描画装置 |
| JP4843425B2 (ja) * | 2006-09-06 | 2011-12-21 | エルピーダメモリ株式会社 | 可変成形型電子ビーム描画装置 |
| JP5133087B2 (ja) * | 2007-02-23 | 2013-01-30 | 株式会社ニューフレアテクノロジー | 半導体装置の製造方法 |
| JP2009237001A (ja) * | 2008-03-26 | 2009-10-15 | Fujifilm Corp | 電子ビーム描画方法、微細パターン描画システム、凹凸パターン担持体の製造方法および磁気ディスク媒体の製造方法 |
| JP2009245534A (ja) * | 2008-03-31 | 2009-10-22 | Fujifilm Corp | インプリント用モールド構造体、並びに磁気記録媒体及びその製造方法 |
| US8320690B2 (en) * | 2010-06-10 | 2012-11-27 | Ceva D.S.P. Ltd. | System, data structure, and method for simultaneously retrieving multi-dimensional data with zero contention |
-
2011
- 2011-03-08 JP JP2012557176A patent/JP5615386B2/ja not_active Expired - Fee Related
- 2011-03-08 SG SG2012067195A patent/SG184003A1/en unknown
- 2011-03-08 WO PCT/US2011/027590 patent/WO2011112610A1/en not_active Ceased
- 2011-03-08 CN CN2011800202031A patent/CN102859594A/zh active Pending
- 2011-03-08 US US13/043,291 patent/US8300505B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| WO2011112610A1 (en) | 2011-09-15 |
| JP2013522806A (ja) | 2013-06-13 |
| JP5615386B2 (ja) | 2014-10-29 |
| US8300505B2 (en) | 2012-10-30 |
| CN102859594A (zh) | 2013-01-02 |
| US20110216433A1 (en) | 2011-09-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8049190B2 (en) | Electron beam writing method, fine pattern writing system, method for manufacturing uneven pattern carrying substrate, and method for manufacturing magnetic disk medium | |
| CN101046967A (zh) | 磁记录装置、磁记录媒体及伺服信息记录方法 | |
| US8824079B2 (en) | Servo patterns for bit patterned media with multiple dots per servo period | |
| CN1460994A (zh) | 在磁盘驱动器上完成自伺服写的方法和装置 | |
| DE102014014160A1 (de) | Plattenlaufwerk mit unterschiedlichen in Datensektorenintegrierten Präambeln in angrenzenden Datenspuren | |
| US8300505B2 (en) | Writing repeating patterns of features to a substrate | |
| CN101197176A (zh) | 测试磁盘驱动器的磁盘介质上的伺服数据的方法和装置 | |
| US7046476B1 (en) | Method apparatus and system for accessing discontinuous media tracks | |
| US7229743B2 (en) | Electron beam lithography method, patterned master carrier for magnetic transfer, lithography method for patterned master carrier for magnetic transfer, and method for producing performatted magnetic recording media | |
| US7564637B2 (en) | Storage media having areas for storing data for correcting servo information errors | |
| US7126780B2 (en) | Method, system, and article of manufacture for self-servowriting a disk | |
| US7973297B2 (en) | Electron beam writing method, fine pattern writing system, method for manufacturing uneven pattern carrying substrate, and method for manufacturing magnetic disk medium | |
| US20160049169A1 (en) | Servo parameterization for multi-sensor reader | |
| US20110149437A1 (en) | Method and apparatus for read and write data in a disk drive with discrete track disk | |
| KR20090065476A (ko) | 기억 매체 재생 장치 및 기억 매체 재생 방법 | |
| US7330321B2 (en) | Reference magnetic signal recording device and method of manufacturing the same | |
| JP4909828B2 (ja) | 磁気ディスク装置、および磁気ディスク記録制御方法 | |
| US7554896B2 (en) | Electron beam recording apparatus | |
| DE19803252C2 (de) | Kopfpositionserkennungsverfahren eines Festplattenlaufwerks | |
| JP2013522806A5 (cg-RX-API-DMAC7.html) | ||
| US20100039727A1 (en) | E-beam write for high-precision dot placement | |
| JP2011192354A (ja) | 電子ビーム描画方法、電子ビーム描画装置、モールドの製造方法および磁気ディスク媒体の製造方法 | |
| CN1835089A (zh) | 磁记录再生装置及其控制方法 | |
| KR100814588B1 (ko) | 기록 매체 및 정보 기억 장치 | |
| KR20120021257A (ko) | 매체 마스터 상에 서보 패턴을 형성하기 위한 시스템 및 방법 |