SG135030A1 - Silicon wafers having controlled distribution of defects, methods of preparing the same, and czochralski pullers for manufacturing monocrystalline silicon ingots - Google Patents

Silicon wafers having controlled distribution of defects, methods of preparing the same, and czochralski pullers for manufacturing monocrystalline silicon ingots

Info

Publication number
SG135030A1
SG135030A1 SG200402260-4A SG2004022604A SG135030A1 SG 135030 A1 SG135030 A1 SG 135030A1 SG 2004022604 A SG2004022604 A SG 2004022604A SG 135030 A1 SG135030 A1 SG 135030A1
Authority
SG
Singapore
Prior art keywords
defects
preparing
methods
same
controlled distribution
Prior art date
Application number
SG200402260-4A
Inventor
Jea-Gun Park
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR10-2000-0057344A external-priority patent/KR100378184B1/en
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of SG135030A1 publication Critical patent/SG135030A1/en

Links

SG200402260-4A 2000-09-29 2001-05-25 Silicon wafers having controlled distribution of defects, methods of preparing the same, and czochralski pullers for manufacturing monocrystalline silicon ingots SG135030A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2000-0057344A KR100378184B1 (en) 1999-11-13 2000-09-29 Silicon wafer having controlled distribution of defects, process for the preparation of the same and czochralski puller for manufacturing monocrystalline silicon ingot

Publications (1)

Publication Number Publication Date
SG135030A1 true SG135030A1 (en) 2007-09-28

Family

ID=36772732

Family Applications (2)

Application Number Title Priority Date Filing Date
SG200103159A SG108822A1 (en) 2000-09-29 2001-05-25 Silicon wafers having controlled distribution of defects, methods of preparing the same, and czochralski pullers for manufacturing monocrystalline silicon ingots
SG200402260-4A SG135030A1 (en) 2000-09-29 2001-05-25 Silicon wafers having controlled distribution of defects, methods of preparing the same, and czochralski pullers for manufacturing monocrystalline silicon ingots

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG200103159A SG108822A1 (en) 2000-09-29 2001-05-25 Silicon wafers having controlled distribution of defects, methods of preparing the same, and czochralski pullers for manufacturing monocrystalline silicon ingots

Country Status (4)

Country Link
CN (2) CN1289720C (en)
IT (1) ITMI20011120A1 (en)
MY (1) MY131022A (en)
SG (2) SG108822A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4853027B2 (en) * 2006-01-17 2012-01-11 信越半導体株式会社 Method for producing silicon single crystal wafer
TWI580825B (en) * 2012-01-27 2017-05-01 Ｍｅｍｃ新加坡有限公司 Method of preparing cast silicon by directional solidification
JP6100226B2 (en) * 2014-11-26 2017-03-22 信越半導体株式会社 Heat treatment method for silicon single crystal wafer
KR101759876B1 (en) * 2015-07-01 2017-07-31 주식회사 엘지실트론 Wafer and method for analyzing defect of the wafer
JP6254748B1 (en) * 2016-11-14 2017-12-27 信越化学工業株式会社 High photoelectric conversion efficiency solar cell manufacturing method and high photoelectric conversion efficiency solar cell

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63315589A (en) * 1987-06-16 1988-12-23 Osaka Titanium Seizo Kk Single crystal production apparatus
JPH0761889A (en) * 1993-08-26 1995-03-07 Komatsu Electron Metals Co Ltd Semiconductor single crystal pull device and method fir pulling semiconductor single crystal
JPH11240790A (en) * 1998-02-27 1999-09-07 Komatsu Electronic Metals Co Ltd Apparatus for producing single crystal
WO2000050671A1 (en) * 1999-02-26 2000-08-31 Memc Electronic Materials, Inc. Heat shield assembly for crystal puller

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI901414A0 (en) * 1989-03-30 1990-03-21 Nippon Kokan Kk ANORDINATION FOR FRAMING A KISELENKRISTALLER.
WO1991014809A1 (en) * 1990-03-20 1991-10-03 Nkk Corporation Apparatus for making silicon single crystal
US5401669A (en) * 1993-05-13 1995-03-28 Memc Electronic Materials, Spa Process for the preparation of silicon wafers having controlled distribution of oxygen precipitate nucleation centers
JPH1179889A (en) * 1997-07-09 1999-03-23 Shin Etsu Handotai Co Ltd Production of and production unit for silicon single crystal with few crystal defect, and silicon single crystal and silicon wafer produced thereby
JP3992800B2 (en) * 1997-09-22 2007-10-17 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 Single crystal manufacturing apparatus and single crystal manufacturing method
JP3670493B2 (en) * 1998-10-09 2005-07-13 東芝セラミックス株式会社 Single crystal pulling device
JP3709494B2 (en) * 1999-02-26 2005-10-26 株式会社Ｓｕｍｃｏ Heat shielding member of silicon single crystal pulling device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63315589A (en) * 1987-06-16 1988-12-23 Osaka Titanium Seizo Kk Single crystal production apparatus
JPH0761889A (en) * 1993-08-26 1995-03-07 Komatsu Electron Metals Co Ltd Semiconductor single crystal pull device and method fir pulling semiconductor single crystal
JPH11240790A (en) * 1998-02-27 1999-09-07 Komatsu Electronic Metals Co Ltd Apparatus for producing single crystal
WO2000050671A1 (en) * 1999-02-26 2000-08-31 Memc Electronic Materials, Inc. Heat shield assembly for crystal puller

Also Published As

Publication number Publication date
CN100430531C (en) 2008-11-05
CN1345986A (en) 2002-04-24
CN1782140A (en) 2006-06-07
MY131022A (en) 2007-07-31
SG108822A1 (en) 2005-02-28
CN1289720C (en) 2006-12-13
ITMI20011120A1 (en) 2002-11-25
ITMI20011120A0 (en) 2001-05-25

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