SG116510A1 - - Google Patents
Info
- Publication number
- SG116510A1 SG116510A1 SG200306758A SG200306758A SG116510A1 SG 116510 A1 SG116510 A1 SG 116510A1 SG 200306758 A SG200306758 A SG 200306758A SG 200306758 A SG200306758 A SG 200306758A SG 116510 A1 SG116510 A1 SG 116510A1
- Authority
- SG
- Singapore
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/705—Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70125—Use of illumination settings tailored to particular mask patterns
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Lenses (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US42530902P | 2002-11-12 | 2002-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG116510A1 true SG116510A1 (https=) | 2005-11-28 |
Family
ID=32176754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG200306758A SG116510A1 (https=) | 2002-11-12 | 2003-11-11 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7034919B2 (https=) |
| EP (1) | EP1420301A3 (https=) |
| JP (2) | JP4606732B2 (https=) |
| KR (1) | KR100592575B1 (https=) |
| CN (1) | CN1510520A (https=) |
| SG (1) | SG116510A1 (https=) |
| TW (1) | TWI277767B (https=) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7245356B2 (en) * | 2003-02-11 | 2007-07-17 | Asml Netherlands B.V. | Lithographic apparatus and method for optimizing illumination using a photolithographic simulation |
| US7471375B2 (en) * | 2003-02-11 | 2008-12-30 | Asml Netherlands B.V. | Correction of optical proximity effects by intensity modulation of an illumination arrangement |
| EP1696273B1 (en) * | 2005-02-23 | 2008-08-06 | ASML MaskTools B.V. | Method and apparatus for optimising illumination for full-chip layer |
| US7379170B2 (en) * | 2005-05-02 | 2008-05-27 | Invarium, Inc. | Apparatus and method for characterizing an image system in lithography projection tool |
| WO2007018464A2 (en) * | 2005-08-08 | 2007-02-15 | Micronic Laser Systems Ab | Method and apparatus for projection printing |
| US7934172B2 (en) * | 2005-08-08 | 2011-04-26 | Micronic Laser Systems Ab | SLM lithography: printing to below K1=.30 without previous OPC processing |
| US20080278698A1 (en) * | 2007-05-08 | 2008-11-13 | Asml Netherlands B.V. | Lithographic apparatus and method |
| US8237913B2 (en) * | 2007-05-08 | 2012-08-07 | Asml Netherlands B.V. | Lithographic apparatus and method |
| JP5225463B2 (ja) | 2008-06-03 | 2013-07-03 | エーエスエムエル ネザーランズ ビー．ブイ． | レンズ加熱補償方法 |
| CN102224459B (zh) * | 2008-11-21 | 2013-06-19 | Asml荷兰有限公司 | 用于优化光刻过程的方法及设备 |
| EP2207064A1 (en) | 2009-01-09 | 2010-07-14 | Takumi Technology Corporation | Method of selecting a set of illumination conditions of a lithographic apparatus for optimizing an integrated circuit physical layout |
| NL2007577A (en) | 2010-11-10 | 2012-05-14 | Asml Netherlands Bv | Optimization of source, mask and projection optics. |
| DE102011076145B4 (de) * | 2011-05-19 | 2013-04-11 | Carl Zeiss Smt Gmbh | Verfahren zum Zuordnen einer Pupillenfacette eines Pupillenfacettenspiegels einer Beleuchtungsoptik einer Projektionsbelichtungsanlage zu einer Feldfacette eines Feldfacettenspiegels der Beleuchtungsoptik |
| JP5835968B2 (ja) * | 2011-07-05 | 2015-12-24 | キヤノン株式会社 | 決定方法、プログラム及び露光方法 |
| US9529268B2 (en) * | 2014-04-03 | 2016-12-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Systems and methods for improving pattern transfer |
| US10785394B2 (en) | 2015-08-28 | 2020-09-22 | Kla Corporation | Imaging performance optimization methods for semiconductor wafer inspection |
| CN105487248B (zh) * | 2015-12-16 | 2018-11-23 | 宁波舜宇光电信息有限公司 | 通过调整镜片实现光学系统成像质量的补偿方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07111239A (ja) * | 1993-10-12 | 1995-04-25 | Canon Inc | 露光装置 |
| US20020036758A1 (en) * | 2000-06-14 | 2002-03-28 | Asml Netherlands Bv | Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured thereby |
| EP1217448A2 (en) * | 2000-12-20 | 2002-06-26 | Hitachi, Ltd. | Exposure method and system |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5300786A (en) | 1992-10-28 | 1994-04-05 | International Business Machines Corporation | Optical focus phase shift test pattern, monitoring system and process |
| JPH0729813A (ja) * | 1993-07-07 | 1995-01-31 | Nippon Telegr & Teleph Corp <Ntt> | 投影露光の最適化方法 |
| US5680588A (en) | 1995-06-06 | 1997-10-21 | International Business Machines Corporation | Method and system for optimizing illumination in an optical photolithography projection imaging system |
| WO1997033205A1 (en) | 1996-03-06 | 1997-09-12 | Philips Electronics N.V. | Differential interferometer system and lithographic step-and-scan apparatus provided with such a system |
| US5805290A (en) | 1996-05-02 | 1998-09-08 | International Business Machines Corporation | Method of optical metrology of unresolved pattern arrays |
| WO1998028665A1 (en) | 1996-12-24 | 1998-07-02 | Koninklijke Philips Electronics N.V. | Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device |
| US5822066A (en) * | 1997-02-26 | 1998-10-13 | Ultratech Stepper, Inc. | Point diffraction interferometer and pin mirror for use therewith |
| DE69829614T2 (de) | 1997-03-10 | 2006-03-09 | Asml Netherlands B.V. | Lithographiegerät mit einer positioniervorrichtung mit zwei objekthaltern |
| US5965309A (en) | 1997-08-28 | 1999-10-12 | International Business Machines Corporation | Focus or exposure dose parameter control system using tone reversing patterns |
| US6033814A (en) | 1998-02-26 | 2000-03-07 | Micron Technology, Inc. | Method for multiple process parameter matching |
| US6128067A (en) | 1998-04-28 | 2000-10-03 | Kabushiki Kaisha Toshiba | Correcting method and correcting system for mask pattern |
| US6466304B1 (en) | 1998-10-22 | 2002-10-15 | Asm Lithography B.V. | Illumination device for projection system and method for fabricating |
| JP2000232057A (ja) | 1999-02-10 | 2000-08-22 | Hitachi Ltd | レジストパターンのシミュレーション方法およびパターン形成方法 |
| US6563566B2 (en) * | 2001-01-29 | 2003-05-13 | International Business Machines Corporation | System and method for printing semiconductor patterns using an optimized illumination and reticle |
| TWI285295B (en) | 2001-02-23 | 2007-08-11 | Asml Netherlands Bv | Illumination optimization in lithography |
| US6525302B2 (en) * | 2001-06-06 | 2003-02-25 | The Regents Of The University Of Colorado | Wavefront coding phase contrast imaging systems |
-
2003
- 2003-11-11 SG SG200306758A patent/SG116510A1/en unknown
- 2003-11-12 US US10/705,234 patent/US7034919B2/en not_active Expired - Lifetime
- 2003-11-12 EP EP03257129A patent/EP1420301A3/en not_active Withdrawn
- 2003-11-12 TW TW092131671A patent/TWI277767B/zh not_active IP Right Cessation
- 2003-11-12 KR KR1020030079923A patent/KR100592575B1/ko not_active Expired - Lifetime
- 2003-11-12 CN CNA2003101237459A patent/CN1510520A/zh active Pending
- 2003-11-12 JP JP2003417290A patent/JP4606732B2/ja not_active Expired - Lifetime
-
2008
- 2008-06-20 JP JP2008161240A patent/JP4974972B2/ja not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07111239A (ja) * | 1993-10-12 | 1995-04-25 | Canon Inc | 露光装置 |
| US20020036758A1 (en) * | 2000-06-14 | 2002-03-28 | Asml Netherlands Bv | Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured thereby |
| EP1217448A2 (en) * | 2000-12-20 | 2002-06-26 | Hitachi, Ltd. | Exposure method and system |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1420301A2 (en) | 2004-05-19 |
| JP4974972B2 (ja) | 2012-07-11 |
| US7034919B2 (en) | 2006-04-25 |
| EP1420301A3 (en) | 2005-11-23 |
| JP2004289129A (ja) | 2004-10-14 |
| TWI277767B (en) | 2007-04-01 |
| CN1510520A (zh) | 2004-07-07 |
| TW200416414A (en) | 2004-09-01 |
| KR20040044340A (ko) | 2004-05-28 |
| KR100592575B1 (ko) | 2006-06-26 |
| US20040184030A1 (en) | 2004-09-23 |
| JP2008294456A (ja) | 2008-12-04 |
| JP4606732B2 (ja) | 2011-01-05 |