SG11202004295WA - Gold-Coated Silver Bonding Wire And Manufacturing Method Thereof, And Semiconductor Device And Manufacturing Method Thereof - Google Patents
Gold-Coated Silver Bonding Wire And Manufacturing Method Thereof, And Semiconductor Device And Manufacturing Method ThereofInfo
- Publication number
- SG11202004295WA SG11202004295WA SG11202004295WA SG11202004295WA SG11202004295WA SG 11202004295W A SG11202004295W A SG 11202004295WA SG 11202004295W A SG11202004295W A SG 11202004295WA SG 11202004295W A SG11202004295W A SG 11202004295WA SG 11202004295W A SG11202004295W A SG 11202004295WA
- Authority
- SG
- Singapore
- Prior art keywords
- manufacturing
- gold
- semiconductor device
- bonding wire
- coated silver
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 2
- 239000004065 semiconductor Substances 0.000 title 1
- 229910052709 silver Inorganic materials 0.000 title 1
- 239000004332 silver Substances 0.000 title 1
Classifications
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- H01L2225/06568—Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking the devices decreasing in size, e.g. pyramidical stack
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019076471A JP6807426B2 (en) | 2019-04-12 | 2019-04-12 | Gold-coated silver bonding wire and its manufacturing method, and semiconductor device and its manufacturing method |
PCT/JP2019/030377 WO2020208839A1 (en) | 2019-04-12 | 2019-08-01 | Gold-coated silver bonding wire, method for producing same, semiconductor apparatus, and method for producing same |
Publications (1)
Publication Number | Publication Date |
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SG11202004295WA true SG11202004295WA (en) | 2020-11-27 |
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SG11202004295WA SG11202004295WA (en) | 2019-04-12 | 2019-08-01 | Gold-Coated Silver Bonding Wire And Manufacturing Method Thereof, And Semiconductor Device And Manufacturing Method Thereof |
Country Status (7)
Country | Link |
---|---|
US (1) | US11289442B2 (en) |
JP (1) | JP6807426B2 (en) |
KR (1) | KR102288721B1 (en) |
CN (1) | CN112088425A (en) |
SG (1) | SG11202004295WA (en) |
TW (1) | TWI739139B (en) |
WO (1) | WO2020208839A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG10201607523RA (en) * | 2016-09-09 | 2018-04-27 | Heraeus Materials Singapore Pte Ltd | Coated wire |
JP7293142B2 (en) * | 2020-01-07 | 2023-06-19 | 東芝デバイス&ストレージ株式会社 | semiconductor equipment |
KR20230069202A (en) * | 2020-10-20 | 2023-05-18 | 닛데쓰마이크로메탈가부시키가이샤 | Ag alloy bonding wire for semiconductor devices |
CN115803856B (en) | 2021-06-25 | 2023-08-18 | 日铁新材料股份有限公司 | Bonding wire for semiconductor device |
WO2022270050A1 (en) * | 2021-06-25 | 2022-12-29 | 日鉄マイクロメタル株式会社 | Bonding wire for semiconductor devices |
DE112022001995T5 (en) | 2021-06-25 | 2024-01-25 | Nippon Micrometal Corporation | Bonding wire for semiconductor devices |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001196411A (en) * | 2000-01-11 | 2001-07-19 | Noge Denki Kogyo:Kk | Gold-plated silver bonding wire |
US9740442B2 (en) | 2010-12-21 | 2017-08-22 | Sato Holdings Kabushiki Kaisha | Virtual input/output device for printers |
WO2013129253A1 (en) | 2012-02-27 | 2013-09-06 | 日鉄住金マイクロメタル株式会社 | Power semiconductor device, method for manufacturing same, and bonding wire |
CN103474408B (en) | 2013-09-26 | 2016-04-20 | 辽宁凯立尔电子科技有限公司 | A kind of surface electrum bonding wire having Gold plated Layer and preparation method thereof |
JP6516465B2 (en) | 2014-12-17 | 2019-05-22 | 日鉄ケミカル&マテリアル株式会社 | Bonding wire for semiconductor device |
WO2017221434A1 (en) * | 2016-06-20 | 2017-12-28 | 日鉄住金マイクロメタル株式会社 | Bonding wire for semiconductor device |
US10658326B2 (en) * | 2016-07-20 | 2020-05-19 | Samsung Electronics Co., Ltd. | Bonding wire having a silver alloy core, wire bonding method using the bonding wire, and electrical connection part of semiconductor device using the bonding wire |
-
2019
- 2019-04-12 JP JP2019076471A patent/JP6807426B2/en active Active
- 2019-08-01 CN CN201980001958.3A patent/CN112088425A/en active Pending
- 2019-08-01 KR KR1020197030247A patent/KR102288721B1/en active IP Right Grant
- 2019-08-01 WO PCT/JP2019/030377 patent/WO2020208839A1/en active Application Filing
- 2019-08-01 SG SG11202004295WA patent/SG11202004295WA/en unknown
- 2019-08-01 TW TW108127421A patent/TWI739139B/en active
-
2020
- 2020-05-08 US US16/869,694 patent/US11289442B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US11289442B2 (en) | 2022-03-29 |
KR102288721B1 (en) | 2021-08-13 |
WO2020208839A1 (en) | 2020-10-15 |
KR20200120862A (en) | 2020-10-22 |
JP6807426B2 (en) | 2021-01-06 |
US20200350273A1 (en) | 2020-11-05 |
CN112088425A (en) | 2020-12-15 |
TW202038256A (en) | 2020-10-16 |
JP2020174161A (en) | 2020-10-22 |
TWI739139B (en) | 2021-09-11 |
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