SG11201909467PA - Method for manufacturing bonded wafer - Google Patents
Method for manufacturing bonded waferInfo
- Publication number
- SG11201909467PA SG11201909467PA SG11201909467PA SG11201909467PA SG 11201909467P A SG11201909467P A SG 11201909467PA SG 11201909467P A SG11201909467P A SG 11201909467PA SG 11201909467P A SG11201909467P A SG 11201909467PA
- Authority
- SG
- Singapore
- Prior art keywords
- bonded wafer
- manufacturing bonded
- manufacturing
- wafer
- bonded
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
- H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/185—Joining of semiconductor bodies for junction formation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/185—Joining of semiconductor bodies for junction formation
- H01L21/187—Joining of semiconductor bodies for junction formation by direct bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26586—Bombardment with radiation with high-energy radiation producing ion implantation characterised by the angle between the ion beam and the crystal planes or the main crystal surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/05—Arrangements for energy or mass analysis
- H01J2237/055—Arrangements for energy or mass analysis magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/201—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated for mounting multiple objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/304—Controlling tubes
- H01J2237/30472—Controlling the beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/31701—Ion implantation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
- Element Separation (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017086381A JP6686962B2 (en) | 2017-04-25 | 2017-04-25 | Method for manufacturing bonded wafer |
PCT/JP2018/007254 WO2018198521A1 (en) | 2017-04-25 | 2018-02-27 | Method for manufacturing laminated wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201909467PA true SG11201909467PA (en) | 2019-11-28 |
Family
ID=63918926
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201909467P SG11201909467PA (en) | 2017-04-25 | 2018-02-27 | Method for manufacturing bonded wafer |
Country Status (8)
Country | Link |
---|---|
US (1) | US10886163B2 (en) |
EP (1) | EP3618098B1 (en) |
JP (1) | JP6686962B2 (en) |
KR (1) | KR102420831B1 (en) |
CN (1) | CN110574141B (en) |
SG (1) | SG11201909467PA (en) |
TW (1) | TWI735752B (en) |
WO (1) | WO2018198521A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20230287561A1 (en) * | 2022-03-14 | 2023-09-14 | Applied Materials, Inc. | Variable Rotation Rate Batch Implanter |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02123656A (en) | 1988-10-31 | 1990-05-11 | Shimadzu Corp | Ion implantation device |
FR2681472B1 (en) * | 1991-09-18 | 1993-10-29 | Commissariat Energie Atomique | PROCESS FOR PRODUCING THIN FILMS OF SEMICONDUCTOR MATERIAL. |
KR100234533B1 (en) * | 1996-10-08 | 1999-12-15 | 윤종용 | Ion implant system of manufacturing semiconductor device |
JPWO2003049189A1 (en) * | 2001-12-04 | 2005-04-21 | 信越半導体株式会社 | Bonded wafer and method for manufacturing bonded wafer |
CN102034665B (en) * | 2002-06-26 | 2014-06-25 | 山米奎普公司 | An ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions |
JP4239676B2 (en) * | 2003-05-15 | 2009-03-18 | 信越半導体株式会社 | SOI wafer and manufacturing method thereof |
JP2005166730A (en) | 2003-11-28 | 2005-06-23 | Seiko Epson Corp | Semiconductor device and its manufacturing method |
JP2006324051A (en) * | 2005-05-17 | 2006-11-30 | Nissin Ion Equipment Co Ltd | Charge particle beam irradiation method and device |
JP4625775B2 (en) * | 2006-02-17 | 2011-02-02 | 株式会社アルバック | Ion implanter |
TWI435378B (en) | 2006-04-26 | 2014-04-21 | Axcelis Tech Inc | Dose uniformity correction technique |
JP5252867B2 (en) | 2007-09-21 | 2013-07-31 | 株式会社半導体エネルギー研究所 | Manufacturing method of semiconductor substrate |
JP2009289948A (en) * | 2008-05-29 | 2009-12-10 | Sumco Corp | Laminated wafer manufacturing method |
JP2010015774A (en) | 2008-07-02 | 2010-01-21 | Sumco Corp | Ion implantation apparatus |
JP5440360B2 (en) | 2010-04-26 | 2014-03-12 | 信越半導体株式会社 | Ion implantation status confirmation method and semiconductor wafer manufacturing method |
JP5802436B2 (en) * | 2011-05-30 | 2015-10-28 | 信越半導体株式会社 | Manufacturing method of bonded wafer |
DE102011113775B9 (en) * | 2011-09-19 | 2021-10-21 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Process for the production of an optoelectronic component |
JP5927894B2 (en) * | 2011-12-15 | 2016-06-01 | 信越半導体株式会社 | Manufacturing method of SOI wafer |
FR2988516B1 (en) * | 2012-03-23 | 2014-03-07 | Soitec Silicon On Insulator | IMPROVING IMPROVING METHOD FOR ENHANCED SUBSTRATES |
JP5664592B2 (en) * | 2012-04-26 | 2015-02-04 | 信越半導体株式会社 | Manufacturing method of bonded wafer |
JP5910352B2 (en) * | 2012-06-28 | 2016-04-27 | 信越半導体株式会社 | Manufacturing method of bonded wafer |
JP5888286B2 (en) * | 2013-06-26 | 2016-03-16 | 信越半導体株式会社 | Manufacturing method of bonded wafer |
JP6213046B2 (en) * | 2013-08-21 | 2017-10-18 | 信越半導体株式会社 | Manufacturing method of bonded wafer |
JP6107709B2 (en) * | 2014-03-10 | 2017-04-05 | 信越半導体株式会社 | Manufacturing method of bonded SOI wafer |
JP6036732B2 (en) * | 2014-03-18 | 2016-11-30 | 信越半導体株式会社 | Manufacturing method of bonded wafer |
DE102016102865B4 (en) * | 2016-02-18 | 2024-04-25 | Infineon Technologies Ag | A method for implanting ions into a semiconductor substrate |
JP6814081B2 (en) * | 2017-03-29 | 2021-01-13 | 住友重機械イオンテクノロジー株式会社 | Ion implantation device and ion implantation method |
JP7132828B2 (en) * | 2018-11-13 | 2022-09-07 | 住友重機械イオンテクノロジー株式会社 | Ion implanter and beam parker |
-
2017
- 2017-04-25 JP JP2017086381A patent/JP6686962B2/en active Active
-
2018
- 2018-02-27 SG SG11201909467P patent/SG11201909467PA/en unknown
- 2018-02-27 CN CN201880027263.8A patent/CN110574141B/en active Active
- 2018-02-27 EP EP18791043.5A patent/EP3618098B1/en active Active
- 2018-02-27 US US16/603,622 patent/US10886163B2/en active Active
- 2018-02-27 WO PCT/JP2018/007254 patent/WO2018198521A1/en unknown
- 2018-02-27 KR KR1020197031391A patent/KR102420831B1/en active IP Right Grant
- 2018-03-05 TW TW107107192A patent/TWI735752B/en active
Also Published As
Publication number | Publication date |
---|---|
TW201839800A (en) | 2018-11-01 |
TWI735752B (en) | 2021-08-11 |
US10886163B2 (en) | 2021-01-05 |
KR102420831B1 (en) | 2022-07-14 |
US20200203217A1 (en) | 2020-06-25 |
EP3618098A4 (en) | 2021-02-17 |
JP6686962B2 (en) | 2020-04-22 |
WO2018198521A1 (en) | 2018-11-01 |
CN110574141A (en) | 2019-12-13 |
KR20190142341A (en) | 2019-12-26 |
EP3618098A1 (en) | 2020-03-04 |
CN110574141B (en) | 2022-11-01 |
EP3618098B1 (en) | 2022-04-27 |
JP2018186164A (en) | 2018-11-22 |
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