SG11201900544PA - Detachment apparatus - Google Patents

Detachment apparatus

Info

Publication number
SG11201900544PA
SG11201900544PA SG11201900544PA SG11201900544PA SG11201900544PA SG 11201900544P A SG11201900544P A SG 11201900544PA SG 11201900544P A SG11201900544P A SG 11201900544PA SG 11201900544P A SG11201900544P A SG 11201900544PA SG 11201900544P A SG11201900544P A SG 11201900544PA
Authority
SG
Singapore
Prior art keywords
detachment apparatus
detachment
Prior art date
Application number
SG11201900544PA
Other languages
English (en)
Inventor
Hiromi Shibahara
Tomonori Nakamura
Kohei Seyama
Original Assignee
Shinkawa Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Kk filed Critical Shinkawa Kk
Publication of SG11201900544PA publication Critical patent/SG11201900544PA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H29/00Delivering or advancing articles from machines; Advancing articles to or into piles
    • B65H29/54Article strippers, e.g. for stripping from advancing elements
    • B65H29/56Article strippers, e.g. for stripping from advancing elements for stripping from elements or machines
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67132Apparatus for placing on an insulating substrate, e.g. tape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H29/00Delivering or advancing articles from machines; Advancing articles to or into piles
    • B65H29/24Delivering or advancing articles from machines; Advancing articles to or into piles by air blast or suction apparatus
    • B65H29/241Suction devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H41/00Machines for separating superposed webs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/52Mounting semiconductor bodies in containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67092Apparatus for mechanical treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B43/00Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/006Delaminating

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Die Bonding (AREA)
SG11201900544PA 2016-03-23 2017-03-23 Detachment apparatus SG11201900544PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016058221 2016-03-23
PCT/JP2017/011674 WO2017164294A1 (ja) 2016-03-23 2017-03-23 剥離装置

Publications (1)

Publication Number Publication Date
SG11201900544PA true SG11201900544PA (en) 2019-05-30

Family

ID=59899514

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201900544PA SG11201900544PA (en) 2016-03-23 2017-03-23 Detachment apparatus

Country Status (7)

Country Link
US (1) US20210197543A1 (zh)
JP (1) JP6542464B2 (zh)
KR (1) KR102106379B1 (zh)
CN (1) CN109155274B (zh)
SG (1) SG11201900544PA (zh)
TW (1) TWI659846B (zh)
WO (1) WO2017164294A1 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110641131B (zh) * 2018-06-26 2023-10-03 紫石能源有限公司 膜片分离设备及膜片分离方法
JP7382265B2 (ja) 2020-03-27 2023-11-16 株式会社ジャパンディスプレイ 一時保持用部材、及び表示装置の製造方法
CN114084453A (zh) * 2021-11-26 2022-02-25 深圳市深科达智能装备股份有限公司 搬运撕膜机构及胶带贴附设备
CN114678640B (zh) * 2022-05-09 2023-11-24 苏州威达智科技股份有限公司 一种壳体粘贴密封装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1027836A (ja) * 1996-07-11 1998-01-27 Sony Corp 半導体装置の製造方法および半導体製造装置
JP2001199624A (ja) 2000-01-20 2001-07-24 Dainippon Printing Co Ltd 保護フィルム剥離装置およびその方法
KR100383265B1 (ko) * 2001-01-17 2003-05-09 삼성전자주식회사 웨이퍼 보호 테이프 제거용 반도체 제조장치
EP1302966A1 (en) * 2001-10-09 2003-04-16 Matsushita Electric Industrial Co., Ltd. Method and apparatus for removing film and method for manufacturing display panel
JP4490345B2 (ja) * 2005-08-04 2010-06-23 共同印刷株式会社 保護シート剥離装置
JP4524241B2 (ja) * 2005-10-12 2010-08-11 日本メクトロン株式会社 薄板状フィルムの貼付装置および貼付方法
JP2008096530A (ja) 2006-10-06 2008-04-24 Hitachi High-Technologies Corp 光学フィルム貼付け方法、光学フィルム貼付け装置、及び表示用パネルの製造方法
WO2008129989A1 (ja) * 2007-04-19 2008-10-30 Ulvac, Inc. 基板保持機構およびこれを備えた基板組立装置
JP5147425B2 (ja) * 2007-08-14 2013-02-20 株式会社東京精密 ウェーハ用テーブル、表面保護フィルム剥離装置および表面保護フィルム剥離方法
JP2010067782A (ja) * 2008-09-10 2010-03-25 Tokyo Seimitsu Co Ltd 表面保護フィルム剥離装置
JP4883538B2 (ja) * 2009-06-26 2012-02-22 Jpテック株式会社 剥離装置
JP5572353B2 (ja) * 2009-09-29 2014-08-13 日東電工株式会社 保護テープ剥離方法およびその装置
JP5375586B2 (ja) * 2009-12-22 2013-12-25 株式会社スリーボンド 剥離装置及び剥離方法
JP6047439B2 (ja) * 2013-03-26 2016-12-21 株式会社Screenホールディングス 剥離装置および剥離方法
KR20150035234A (ko) * 2013-09-27 2015-04-06 엘아이지에이디피 주식회사 보호필름 박리장치 및 이를 이용하는 유기발광표시장치 제조방법
KR102064405B1 (ko) * 2014-02-04 2020-01-10 삼성디스플레이 주식회사 기판 박리 장치 및 그것을 이용한 기판 박리 방법

Also Published As

Publication number Publication date
JP6542464B2 (ja) 2019-07-10
JPWO2017164294A1 (ja) 2019-01-17
CN109155274A (zh) 2019-01-04
US20210197543A1 (en) 2021-07-01
KR102106379B1 (ko) 2020-05-04
TWI659846B (zh) 2019-05-21
KR20180124962A (ko) 2018-11-21
TW201739625A (zh) 2017-11-16
CN109155274B (zh) 2023-02-17
WO2017164294A1 (ja) 2017-09-28

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