SG11201900544PA - Detachment apparatus - Google Patents

Detachment apparatus

Info

Publication number
SG11201900544PA
SG11201900544PA SG11201900544PA SG11201900544PA SG11201900544PA SG 11201900544P A SG11201900544P A SG 11201900544PA SG 11201900544P A SG11201900544P A SG 11201900544PA SG 11201900544P A SG11201900544P A SG 11201900544PA SG 11201900544P A SG11201900544P A SG 11201900544PA
Authority
SG
Singapore
Prior art keywords
detachment apparatus
detachment
Prior art date
Application number
SG11201900544PA
Inventor
Hiromi Shibahara
Tomonori Nakamura
Kohei Seyama
Original Assignee
Shinkawa Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Kk filed Critical Shinkawa Kk
Publication of SG11201900544PA publication Critical patent/SG11201900544PA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H29/00Delivering or advancing articles from machines; Advancing articles to or into piles
    • B65H29/54Article strippers, e.g. for stripping from advancing elements
    • B65H29/56Article strippers, e.g. for stripping from advancing elements for stripping from elements or machines
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67132Apparatus for placing on an insulating substrate, e.g. tape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H29/00Delivering or advancing articles from machines; Advancing articles to or into piles
    • B65H29/24Delivering or advancing articles from machines; Advancing articles to or into piles by air blast or suction apparatus
    • B65H29/241Suction devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H41/00Machines for separating superposed webs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/52Mounting semiconductor bodies in containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67092Apparatus for mechanical treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B43/00Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/006Delaminating

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Die Bonding (AREA)
SG11201900544PA 2016-03-23 2017-03-23 Detachment apparatus SG11201900544PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016058221 2016-03-23
PCT/JP2017/011674 WO2017164294A1 (en) 2016-03-23 2017-03-23 Detachment device

Publications (1)

Publication Number Publication Date
SG11201900544PA true SG11201900544PA (en) 2019-05-30

Family

ID=59899514

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201900544PA SG11201900544PA (en) 2016-03-23 2017-03-23 Detachment apparatus

Country Status (7)

Country Link
US (1) US20210197543A1 (en)
JP (1) JP6542464B2 (en)
KR (1) KR102106379B1 (en)
CN (1) CN109155274B (en)
SG (1) SG11201900544PA (en)
TW (1) TWI659846B (en)
WO (1) WO2017164294A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110641131B (en) * 2018-06-26 2023-10-03 紫石能源有限公司 Membrane separation device and membrane separation method
JP7382265B2 (en) 2020-03-27 2023-11-16 株式会社ジャパンディスプレイ Temporary holding member and display device manufacturing method
CN114084453A (en) * 2021-11-26 2022-02-25 深圳市深科达智能装备股份有限公司 Carrying and film tearing mechanism and adhesive tape attaching equipment
CN114678640B (en) * 2022-05-09 2023-11-24 苏州威达智科技股份有限公司 Sealing device is pasted to casing

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1027836A (en) * 1996-07-11 1998-01-27 Sony Corp Manufacture of semiconductor device and semiconductor manufacturing device
JP2001199624A (en) 2000-01-20 2001-07-24 Dainippon Printing Co Ltd Protective film peeling device and its method
KR100383265B1 (en) * 2001-01-17 2003-05-09 삼성전자주식회사 Semiconductor processing apparatus to remove wafer protection tape
EP1302966A1 (en) * 2001-10-09 2003-04-16 Matsushita Electric Industrial Co., Ltd. Method and apparatus for removing film and method for manufacturing display panel
JP4490345B2 (en) * 2005-08-04 2010-06-23 共同印刷株式会社 Protective sheet peeling device
JP4524241B2 (en) * 2005-10-12 2010-08-11 日本メクトロン株式会社 Thin plate film sticking apparatus and sticking method
JP2008096530A (en) 2006-10-06 2008-04-24 Hitachi High-Technologies Corp Method of sticking optical film, device of sticking optical film and method of manufacturing display panel
JP5024971B2 (en) * 2007-04-19 2012-09-12 株式会社アルバック Substrate holding mechanism and substrate assembling apparatus having the same
JP5147425B2 (en) 2007-08-14 2013-02-20 株式会社東京精密 Wafer table, surface protective film peeling apparatus and surface protective film peeling method
JP2010067782A (en) 2008-09-10 2010-03-25 Tokyo Seimitsu Co Ltd Device for exfoliating surface protection film
JP4883538B2 (en) * 2009-06-26 2012-02-22 Jpテック株式会社 Peeling device
JP5572353B2 (en) * 2009-09-29 2014-08-13 日東電工株式会社 Protective tape peeling method and apparatus
JP5375586B2 (en) * 2009-12-22 2013-12-25 株式会社スリーボンド Peeling apparatus and peeling method
JP6047439B2 (en) * 2013-03-26 2016-12-21 株式会社Screenホールディングス Peeling apparatus and peeling method
KR20150035234A (en) * 2013-09-27 2015-04-06 엘아이지에이디피 주식회사 Protection film peeling apparatus and oled display manufacturing method using the same
KR102064405B1 (en) * 2014-02-04 2020-01-10 삼성디스플레이 주식회사 Substrate peeling apparatus and substrate peeling method using the same

Also Published As

Publication number Publication date
WO2017164294A1 (en) 2017-09-28
JPWO2017164294A1 (en) 2019-01-17
JP6542464B2 (en) 2019-07-10
CN109155274B (en) 2023-02-17
KR20180124962A (en) 2018-11-21
US20210197543A1 (en) 2021-07-01
KR102106379B1 (en) 2020-05-04
TW201739625A (en) 2017-11-16
TWI659846B (en) 2019-05-21
CN109155274A (en) 2019-01-04

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