SG11201810277UA - An anti-stiction flexible mold and a method for fabricating the same - Google Patents

An anti-stiction flexible mold and a method for fabricating the same

Info

Publication number
SG11201810277UA
SG11201810277UA SG11201810277UA SG11201810277UA SG11201810277UA SG 11201810277U A SG11201810277U A SG 11201810277UA SG 11201810277U A SG11201810277U A SG 11201810277UA SG 11201810277U A SG11201810277U A SG 11201810277UA SG 11201810277U A SG11201810277U A SG 11201810277UA
Authority
SG
Singapore
Prior art keywords
stiction
singapore
international
flexible mold
pte
Prior art date
Application number
SG11201810277UA
Inventor
Mark Allen Moxey
Mohamed Sultan Mohiddin Saifullah
Karen Siew Ling Chong
Tian Poh Khoo
Ker Yee Chew
Original Assignee
Agency Science Tech & Res
Wangi Ind Co Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency Science Tech & Res, Wangi Ind Co Pte Ltd filed Critical Agency Science Tech & Res
Publication of SG11201810277UA publication Critical patent/SG11201810277UA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/44—Moulds or cores; Details thereof or accessories therefor with means for, or specially constructed to facilitate, the removal of articles, e.g. of undercut articles
    • B29C33/48—Moulds or cores; Details thereof or accessories therefor with means for, or specially constructed to facilitate, the removal of articles, e.g. of undercut articles with means for collapsing or disassembling
    • B29C33/50—Moulds or cores; Details thereof or accessories therefor with means for, or specially constructed to facilitate, the removal of articles, e.g. of undercut articles with means for collapsing or disassembling elastic or flexible
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B29C33/60—Releasing, lubricating or separating agents
    • B29C33/62—Releasing, lubricating or separating agents based on polymers or oligomers
    • B29C33/64—Silicone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/40—Plastics, e.g. foam or rubber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B29C33/58—Applying the releasing agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B29C33/60—Releasing, lubricating or separating agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B29C33/60—Releasing, lubricating or separating agents
    • B29C33/62—Releasing, lubricating or separating agents based on polymers or oligomers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/06—Interconnection of layers permitting easy separation
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00—Use of inorganic substances as compounding ingredients
    • C08K3/34—Silicon-containing compounds
    • C08K3/36—Silica
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00—Use of organic ingredients
    • C08K5/54—Silicon-containing compounds
    • C08K5/541—Silicon-containing compounds containing oxygen
    • C08K5/5415—Silicon-containing compounds containing oxygen containing at least one Si—O bond
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C2033/0005—Moulds or cores; Details thereof or accessories therefor with transparent parts, e.g. permitting visual inspection of the interior of the cavity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • B29C33/424—Moulding surfaces provided with means for marking or patterning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0025—Applying surface layers, e.g. coatings, decorative layers, printed layers, to articles during shaping, e.g. in-mould printing
    • B29C37/0028—In-mould coating, e.g. by introducing the coating material into the mould after forming the article
    • B29C37/0032—In-mould coating, e.g. by introducing the coating material into the mould after forming the article the coating being applied upon the mould surface before introducing the moulding compound, e.g. applying a gelcoat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2833/00—Use of polymers of unsaturated acids or derivatives thereof as mould material
    • B29K2833/04—Polymers of esters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2863/00—Use of EP, i.e. epoxy resins or derivatives thereof as mould material

Abstract

INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property MD 1101/110 111010101111101011111 0 11111111111111111111111111111111111111111111 Organization International Bureau (10) International Publication Number (43) International Publication Date ......0\" WO 2017/200491 Al 23 November 2017 (23.11.2017) WIPO I PCT (51) International Patent Classification: (74) Agent: SPRUSON & FERGUSON (ASIA) PTE LTD; B29C 33/50 (2006.01) CO8K 3/36 (2006.01) P.O. Box 1531, Robinson Road Post Office, Singapore B29C 33/62 (2006.01) CO8K 5/5415 (2006.01) 903031 (SG). B32B 7/06 (2006.01) G03F 7/00 (2006.01) (81) Designated States (unless otherwise indicated, for every (21) International Application Number: kind of national protection available): AE, AG, AL, AM, PCT/SG2017/050262 AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, (22) International Filing Date: CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, 19 May 2017 (19.05.2017) DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, (25) Filing Language: English KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, (26) Publication Language: English MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, (30) Priority Data: SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, 10201604029Y 19 May 2016 (19.05.2016) SG TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (71) Applicants: AGENCY FOR SCIENCE, TECHNOLO- (84) Designated States (unless otherwise indicated, for every GY AND RESEARCH [SG/SG]; 1 Fusionopolis Way, kind of regional protection available): ARIPO (BW, GH, #20-10 Connexis North Tower, Singapore 138632 (SG). GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, WANGI INDUSTRIAL CO. PTE LTD [SG/SG]; 29 Ubi UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, Road 4, Singapore 408619 (SG). TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, (72) Inventors: MOXEY, Mark Allen; c/o Institute of Ma- MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, terials Research and Engineering, 2 Fusionopolis Way, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, #08-03, Innovis, Singapore 138634 (SG). SAIFULLAH, KM, ML, MR, NE, SN, TD, TG). = Mohamed Sultan Mohiddin; c/o Institute of Materials Re- search and Engineering, 2 Fusionopolis Way, #08-03, limo- Declarations under Rule 4.17: _ vis, Singapore 138634 (SG). CHONG, Karen Siew Ling; — inventorship (Rule 4.17(iv)) c/o Institute of Materials Research and Engineering, 2 Fu- — of = - sionopolis Way, #08-03, Innovis, Singapore 138634 (SG). Published: KHOO, Tian Poh; c/o Wangi Industrial Co. Pte Ltd, 29 — with international search report (Art. 21(3)) = Ubi Road 4, Singapore 408619 (SG). CHEW, Ker Yee; c/ o Wangi Industrial Co. Pte Ltd, 29 Ubi Road 4, Singapore = 408619 (SG). = = = = Title: AN ANTI-STICTION FLEXIBLE MOLD AND A METHOD FOR FABRICATING THE SAME (54) [Fig. 1] = = 110 102 = — = 104 = 106 ,—, c:r ii- ..z. , , :. ...:, 108 © © \" (57) : This application relates to an anti-stiction flexible mold comprising a layer of an anti-stiction silicon dioxide deposited \"I r z onto a flexible substrate. There is also provided a method for fabricating an anti-stiction flexible mold comprising the steps of a) depositing a layer of silicon dioxide on a flexible substrate; and b) interacting the layer of silicon dioxide with an anti-stiction agent to 0 form the anti-stiction flexible mold. The resulting anti-stiction flexible mold may have superior anti-stick properties and may enable \" easy separation of mold and substrates after imprinting. [Fig. 1]
SG11201810277UA 2016-05-19 2017-05-19 An anti-stiction flexible mold and a method for fabricating the same SG11201810277UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG10201604029Y 2016-05-19
PCT/SG2017/050262 WO2017200491A1 (en) 2016-05-19 2017-05-19 An anti-stiction flexible mold and a method for fabricating the same

Publications (1)

Publication Number Publication Date
SG11201810277UA true SG11201810277UA (en) 2018-12-28

Family

ID=60325407

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10202011230UA SG10202011230UA (en) 2016-05-19 2017-05-19 An anti-stiction flexible mold and a method for fabricating the same
SG11201810277UA SG11201810277UA (en) 2016-05-19 2017-05-19 An anti-stiction flexible mold and a method for fabricating the same

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG10202011230UA SG10202011230UA (en) 2016-05-19 2017-05-19 An anti-stiction flexible mold and a method for fabricating the same

Country Status (3)

Country Link
US (1) US20200331172A1 (en)
SG (2) SG10202011230UA (en)
WO (1) WO2017200491A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008115530A2 (en) * 2007-03-20 2008-09-25 Nano Terra Inc. Polymer composition for preparing electronic devices by microcontact printing processes and products prepared by the processes
US8192920B2 (en) * 2008-04-26 2012-06-05 Rolith Inc. Lithography method
CN101477304B (en) * 2008-11-04 2011-08-17 南京大学 Stamping method for copying high-resolution nano-structure on complicated shape surface
SG10201404686YA (en) * 2009-08-07 2014-10-30 Soken Kagaku Kk Resin mold for imprinting and method for producing same
US8480942B2 (en) * 2010-01-27 2013-07-09 The Board Of Trustees Of The University Of Illinois Method of forming a patterned layer of a material on a substrate

Also Published As

Publication number Publication date
SG10202011230UA (en) 2020-12-30
WO2017200491A1 (en) 2017-11-23
US20200331172A1 (en) 2020-10-22

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