SG11201808283RA - Substrate processing apparatus, device management controller and recording medium - Google Patents

Substrate processing apparatus, device management controller and recording medium

Info

Publication number
SG11201808283RA
SG11201808283RA SG11201808283RA SG11201808283RA SG11201808283RA SG 11201808283R A SG11201808283R A SG 11201808283RA SG 11201808283R A SG11201808283R A SG 11201808283RA SG 11201808283R A SG11201808283R A SG 11201808283RA SG 11201808283R A SG11201808283R A SG 11201808283RA
Authority
SG
Singapore
Prior art keywords
information
device data
recording medium
processing apparatus
substrate processing
Prior art date
Application number
SG11201808283RA
Other languages
English (en)
Inventor
Kazuhide Asai
Hidemoto Hayashihara
Kazuyoshi Yamamoto
Takayuki Kawagishi
Kayoko Yashiki
Hiroyuki Iwakura
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Publication of SG11201808283RA publication Critical patent/SG11201808283RA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G05B23/0227—Qualitative history assessment, whereby the type of data acted upon, e.g. waveforms, images or patterns, is not relevant, e.g. rule based assessment; if-then decisions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32184—Compare time, quality, state of operators with threshold value
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32191—Real time statistical process monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • General Factory Administration (AREA)
SG11201808283RA 2016-03-31 2016-03-31 Substrate processing apparatus, device management controller and recording medium SG11201808283RA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2016/060653 WO2017168676A1 (ja) 2016-03-31 2016-03-31 基板処理装置、装置管理コントローラ及び記録媒体

Publications (1)

Publication Number Publication Date
SG11201808283RA true SG11201808283RA (en) 2018-10-30

Family

ID=59963707

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201808283RA SG11201808283RA (en) 2016-03-31 2016-03-31 Substrate processing apparatus, device management controller and recording medium

Country Status (6)

Country Link
US (1) US10937676B2 (ja)
JP (1) JP6768058B2 (ja)
KR (1) KR102192094B1 (ja)
CN (1) CN108885970B (ja)
SG (1) SG11201808283RA (ja)
WO (1) WO2017168676A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111326445A (zh) * 2018-12-13 2020-06-23 东京毅力科创株式会社 基片处理方法和基片处理装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6745673B2 (ja) * 2016-08-05 2020-08-26 東京エレクトロン株式会社 半導体システム
CN111727499A (zh) * 2018-01-15 2020-09-29 应用材料公司 先进温度监测系统和用于半导体制造生产力的方法
KR102512456B1 (ko) 2018-09-18 2023-03-20 가부시키가이샤 코쿠사이 엘렉트릭 기판 처리 장치, 반도체 장치의 제조 방법 및 프로그램
JP7082630B2 (ja) 2020-03-19 2022-06-08 株式会社Kokusai Electric 基板処理装置、半導体装置の表示方法、半導体装置の製造方法、及びプログラム
US11860607B2 (en) * 2020-08-18 2024-01-02 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor manufacturing system, behavior recognition device and semiconductor manufacturing method

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH586052A5 (ja) 1975-10-07 1977-03-31 Schwarz Guenter
JPS5855841B2 (ja) 1978-06-19 1983-12-12 チエルヤビンスキ− ポリテクニチエスキ− インスチテユ−ト イメニ レニンスコゴ コムソモラ 金属棒圧延方法とそのための圧延ロ−ル
WO2000014790A1 (fr) * 1998-09-03 2000-03-16 Hitachi, Ltd. Systeme d'inspection et procede de production d'un dispositif electronique l'utilisant
JP4207915B2 (ja) * 2005-01-24 2009-01-14 オムロン株式会社 品質変動表示装置、品質変動表示方法、品質変動表示プログラム及び該プログラムを記録した記録媒体
JP4796888B2 (ja) * 2006-05-08 2011-10-19 東京エレクトロン株式会社 群管理システム、プロセス情報管理装置およびプログラム
JP5567307B2 (ja) * 2009-09-24 2014-08-06 株式会社日立国際電気 基板処理装置の異常検知システム、群管理装置、基板処理装置の異常検知方法及び基板処理システム。
JP5546197B2 (ja) 2009-10-05 2014-07-09 株式会社日立国際電気 基板処理システム、群管理装置および基板処理装置の情報解析方法
JP5774331B2 (ja) * 2011-03-03 2015-09-09 株式会社日立国際電気 基板処理システム、管理装置、データ解析方法、及びデータ解析プログラム
JP5855841B2 (ja) 2011-04-01 2016-02-09 株式会社日立国際電気 管理装置
JP5992706B2 (ja) * 2012-03-26 2016-09-14 東京エレクトロン株式会社 半導体製造装置の障害監視システム及び障害監視方法
US10042357B2 (en) * 2012-10-23 2018-08-07 Applied Materials, Inc. Portable, adaptable equipment health user interface
US10514685B2 (en) * 2014-06-13 2019-12-24 KLA—Tencor Corp. Automatic recipe stability monitoring and reporting

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111326445A (zh) * 2018-12-13 2020-06-23 东京毅力科创株式会社 基片处理方法和基片处理装置

Also Published As

Publication number Publication date
JPWO2017168676A1 (ja) 2019-01-10
KR102192094B1 (ko) 2020-12-16
CN108885970B (zh) 2024-02-02
KR20180121931A (ko) 2018-11-09
WO2017168676A1 (ja) 2017-10-05
US20190035657A1 (en) 2019-01-31
US10937676B2 (en) 2021-03-02
CN108885970A (zh) 2018-11-23
JP6768058B2 (ja) 2020-10-14

Similar Documents

Publication Publication Date Title
SG11201808283RA (en) Substrate processing apparatus, device management controller and recording medium
EP4235413A3 (en) Providing information on an electronic watch
WO2016040378A3 (en) Environmental monitoring devices and methods
WO2019180473A3 (en) Methods and systems for security tracking and generating alerts
CL2017002887A1 (es) Exhibición inteligente de recordatorios.
MX2018004173A (es) Sistemas y metodos para evaluacion de seguridad y riesgos y pruebas de aplicaciones.
EP4287211A3 (en) Systems and methods for distributing continuous glucose data
SG10201807986SA (en) Data records selection
GB2563340A8 (en) Labeling computing objects for improved threat detection
TW201613658A (en) A monitoring system and method
GB2550704A (en) System and method for providing freshness information
MX2015000304A (es) Sistemas y metodos para la evaluacion cuantitativa de una propiedad para renovacion.
MX343495B (es) Métodos y aparatos para correlacionar datos de medición de censo con datos de panel.
WO2018039381A3 (en) INTERFACE TOOL FOR ASSET FAILURE ANALYSIS
WO2010104644A3 (en) Method, computer program product, and apparatus for enabling task aggregation in an enterprise environment
WO2014078030A3 (en) Method for managing notifications in a communication device
PH12016000106B1 (en) Ticket solver system
MX2016004243A (es) Metodo y dispositivo para desplegar un distintivo de un icono.
GB2564329A (en) Displaying messages using multiple body-worn electronic display devices
IN2015CH03327A (ja)
PH12020551136A1 (en) Diagnosis apparatus and diagnosis method
MY181075A (en) Systems and methods for tracing items
EP2634744A4 (en) SEARCH DEVICE, SEARCH DEVICE CONTROL METHOD, PROGRAM, AND INFORMATION STORAGE MEDIUM
SG10201901587VA (en) Application testing
WO2017176066A3 (en) Electronic apparatus and operating method thereof