SG11201807804PA - Ferromagnetic material sputtering target - Google Patents

Ferromagnetic material sputtering target

Info

Publication number
SG11201807804PA
SG11201807804PA SG11201807804PA SG11201807804PA SG11201807804PA SG 11201807804P A SG11201807804P A SG 11201807804PA SG 11201807804P A SG11201807804P A SG 11201807804PA SG 11201807804P A SG11201807804P A SG 11201807804PA SG 11201807804P A SG11201807804P A SG 11201807804PA
Authority
SG
Singapore
Prior art keywords
mol
sputtering target
ferromagnetic material
less
material sputtering
Prior art date
Application number
SG11201807804PA
Inventor
Yuki Furuya
Original Assignee
Jx Nippon Mining & Metals Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jx Nippon Mining & Metals Corp filed Critical Jx Nippon Mining & Metals Corp
Publication of SG11201807804PA publication Critical patent/SG11201807804PA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C19/00—Alloys based on nickel or cobalt
    • C22C19/07—Alloys based on nickel or cobalt based on cobalt
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0688—Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PCTJ P/011767 FERROMAGNETIC MATERIAL SPUTTERING TARGET 5 Provided is an oxide grain-dispersed ferromagnetic material sputtering target having a fine structure which can effectively reduce abnormal discharge and generation of particles caused by oxide grains. A sintered sputtering target contains, as metal or an alloy, 0 mol% or more and 45 mol% or less of Pt, 55 10 mol% or more and 95 mol% or less of Co, and 0 mol% or more and 40 mol% or less of Cr; and further contains at least two kinds of oxides. The oxides are present in the metal or alloy, and the standard deviation of the number density of oxides is 2.5 or less. 15 Fig. 2 22
SG11201807804PA 2016-03-31 2017-03-23 Ferromagnetic material sputtering target SG11201807804PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016072148 2016-03-31
PCT/JP2017/011767 WO2017170138A1 (en) 2016-03-31 2017-03-23 Ferromagnetic material sputtering target

Publications (1)

Publication Number Publication Date
SG11201807804PA true SG11201807804PA (en) 2018-10-30

Family

ID=59965613

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201807804PA SG11201807804PA (en) 2016-03-31 2017-03-23 Ferromagnetic material sputtering target

Country Status (6)

Country Link
US (1) US10837101B2 (en)
JP (1) JP6545898B2 (en)
CN (1) CN108884557B (en)
MY (1) MY189794A (en)
SG (1) SG11201807804PA (en)
WO (1) WO2017170138A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY191374A (en) * 2016-12-28 2022-06-21 Jx Nippon Mining & Metals Corp Magnetic material sputtering target and method for manufacturing same
EP3404403B1 (en) * 2017-05-18 2019-03-27 Grob-Werke GmbH & Co. KG Method and device for testing the quality of coated surfaces
WO2021010490A1 (en) * 2019-07-18 2021-01-21 田中貴金属工業株式会社 Sputtering target for magnetic recording medium

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61121443A (en) * 1984-11-19 1986-06-09 Matsushita Electric Ind Co Ltd Target porcelain for sputtering
JP4827033B2 (en) 2004-03-01 2011-11-30 Ｊｘ日鉱日石金属株式会社 Sputtering target with less surface defects and surface processing method thereof
WO2007080781A1 (en) * 2006-01-13 2007-07-19 Nippon Mining & Metals Co., Ltd. Nonmagnetic material particle dispersed ferromagnetic material sputtering target
JP4962905B2 (en) 2007-03-12 2012-06-27 三菱マテリアル株式会社 Method for producing Co-based sintered alloy sputtering target for forming magnetic recording film with less generation of particles
WO2009119812A1 (en) 2008-03-28 2009-10-01 日鉱金属株式会社 Sputtering target of nonmagnetic-in-ferromagnetic dispersion type material
WO2010110033A1 (en) 2009-03-27 2010-09-30 日鉱金属株式会社 Ferromagnetic-material sputtering target of nonmagnetic-material particle dispersion type
WO2011016365A1 (en) 2009-08-06 2011-02-10 Jx日鉱日石金属株式会社 Inorganic particle-dispersed sputtering target
MY149640A (en) 2009-12-11 2013-09-13 Jx Nippon Mining & Metals Corp Sputtering target comprising oxide phase dispersed in co or co alloy phase, magnetic thin film made of co or co alloy phase and oxide phase, and magnetic recording medium using the said thin film
US20120273347A1 (en) 2009-12-25 2012-11-01 Jx Nippon Mining & Metals Corporation Sputtering target with reduced particle generation and method of producing said target
JP5375707B2 (en) 2010-03-28 2013-12-25 三菱マテリアル株式会社 Sputtering target for forming a magnetic recording film and method for producing the same
SG185768A1 (en) 2010-07-20 2013-01-30 Jx Nippon Mining & Metals Corp Sputtering target of ferromagnetic material with low generation of particles
WO2012014504A1 (en) 2010-07-29 2012-02-02 Jx日鉱日石金属株式会社 Sputtering target for magnetic recording film and process for producing same
MY156201A (en) 2010-12-15 2016-01-29 Jx Nippon Mining & Metals Corp Ferromagnetic sputtering target and method for manufacturing same
US9605339B2 (en) 2010-12-21 2017-03-28 Jx Nippon Mining & Metals Corporation Sputtering target for magnetic recording film and process for production thereof
CN103270190B (en) 2010-12-22 2016-01-20 吉坤日矿日石金属株式会社 Sinter sputtering target
SG10201500148WA (en) 2011-08-23 2015-03-30 Jx Nippon Mining & Metals Corp Ferromagnetic sputtering target with less particle generation
WO2013108520A1 (en) * 2012-01-18 2013-07-25 Jx日鉱日石金属株式会社 Co-Cr-Pt-BASED SPUTTERING TARGET AND METHOD FOR PRODUCING SAME
US20140311899A1 (en) 2012-01-25 2014-10-23 Jx Nippon Mining & Metals Corporation Ferromagnetic Material Sputtering Target
US9761422B2 (en) 2012-02-22 2017-09-12 Jx Nippon Mining & Metals Corporation Magnetic material sputtering target and manufacturing method for same
US9793099B2 (en) * 2012-03-15 2017-10-17 Jx Nippon Mining & Metals Corporation Magnetic material sputtering target and manufacturing method thereof
MY185389A (en) 2013-02-15 2021-05-17 Jx Nippon Mining & Metals Corp Sputtering target containing co or fe
JP5946974B1 (en) * 2014-09-04 2016-07-06 Ｊｘ金属株式会社 Sputtering target

Also Published As

Publication number Publication date
WO2017170138A1 (en) 2017-10-05
CN108884557A (en) 2018-11-23
US10837101B2 (en) 2020-11-17
JP6545898B2 (en) 2019-07-17
MY189794A (en) 2022-03-08
US20190106783A1 (en) 2019-04-11
JPWO2017170138A1 (en) 2019-01-31
CN108884557B (en) 2020-12-08

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