SG11201806199YA - Gyroscope devices and methods for fabricating gyroscope devices - Google Patents
Gyroscope devices and methods for fabricating gyroscope devicesInfo
- Publication number
- SG11201806199YA SG11201806199YA SG11201806199YA SG11201806199YA SG11201806199YA SG 11201806199Y A SG11201806199Y A SG 11201806199YA SG 11201806199Y A SG11201806199Y A SG 11201806199YA SG 11201806199Y A SG11201806199Y A SG 11201806199YA SG 11201806199Y A SG11201806199Y A SG 11201806199YA
- Authority
- SG
- Singapore
- Prior art keywords
- international
- singapore
- microelectronics
- tower
- industry development
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
- G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Peptides Or Proteins (AREA)
Abstract
NM; 413 452 400C 405 __d= 45 452 406 302 4 10 FIG. 4C W O 20 17 / 135 89 1 Al (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (10) International Publication Number (43) International Publication Date WO 2017/135891 Al 10 August 2017 (10.08.2017) WIPO I PCT 1111111111111101110111111111110101111101111111101111111111011111 011111111111110111111 (51) International Patent Classification: GO1C 1 9 / 5 733 (2012.01) GO1C 19/56 (2012.01) (21) International Application Number: PCT/SG2017/050036 (22) International Filing Date: 24 January 2017 (24.01.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 10201600758W 1 February 2016 (01.02.2016) SG (71) Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH [SG/SG]; 1 Fusionopolis Way, #20-10 Connexis, Singapore 138632 (SG). (72) Inventors: WU, Guoqiang; c/o Industry Development, In- stitute of Microelectronics, 2 Fusionopolis Way, #08-02 Innovis Tower, Singapore 138634 (SG). FERNANDO, Sanchitha Nirodha; c/o Industry Development, Institute of Microelectronics, 2 Fusionopolis Way, #08-02 Innovis Tower, Singapore 138634 (SG). GU, Alex Yuandong; c/o Industry Development, Institute of Microelectronics, 2 Fu- sionopolis Way, #08-02 Innovis Tower, Singapore 138634 (SG). CHUA, Geng Li; c/o Industry Development, Insti- tute of Microelectronics, 2 Fusionopolis Way, #08-02 In- novis Tower, Singapore 138634 (SG). (74) Agent: VIERING, JENTSCHURA & PARTNER LLP; P.O. Box 1088, Rochor Post Office, Rochor Road, Singa- pore 911833 (SG). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, [Continued on next page] (54) Title: GYROSCOPE DEVICES AND METHODS FOR FABRICATING GYROSCOPE DEVICES (57) : According to various embodiments, there is provided a gyroscope device including: an outer frame; and four cells arranged within the outer frame, each cell of the four cells including: a proof mass arranged at least substan- tially in a centre region of the cell; and four electrode frames, 450 each electrode frame of the four electrode frames arranged at a corner region of the cell and coupled to a respective side of 412 the proof mass. WO 2017/135891 Al MIDEDIMOMOIDEIR0101301110MMEIHNOVOIMIE GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG10201600758W | 2016-02-01 | ||
PCT/SG2017/050036 WO2017135891A1 (en) | 2016-02-01 | 2017-01-24 | Gyroscope devices and methods for fabricating gyroscope devices |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201806199YA true SG11201806199YA (en) | 2018-08-30 |
Family
ID=59499993
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201806199YA SG11201806199YA (en) | 2016-02-01 | 2017-01-24 | Gyroscope devices and methods for fabricating gyroscope devices |
Country Status (3)
Country | Link |
---|---|
US (1) | US20190033075A1 (en) |
SG (1) | SG11201806199YA (en) |
WO (1) | WO2017135891A1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019032179A1 (en) * | 2017-08-11 | 2019-02-14 | Hrl Laboratories, Llc | A silicon multi-mode coriolis vibratory gyroscopes having high order rotationally symmetric mechanical structure and 32 electrodes |
US10794702B2 (en) * | 2017-12-13 | 2020-10-06 | Invensense, Inc. | On-chip gap measurement |
IT201900009582A1 (en) * | 2019-06-20 | 2020-12-20 | St Microelectronics Srl | MEMS GYRO WITH REAL-TIME SCALE FACTOR CALIBRATION AND RELATED CALIBRATION METHOD |
EP4162281A1 (en) | 2020-06-08 | 2023-04-12 | Analog Devices, Inc. | Stress-relief mems gyroscope |
EP4162282A1 (en) | 2020-06-08 | 2023-04-12 | Analog Devices, Inc. | Drive and sense stress relief apparatus |
US11698257B2 (en) | 2020-08-24 | 2023-07-11 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
WO2022046799A1 (en) * | 2020-08-24 | 2022-03-03 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
CN114195089A (en) * | 2021-12-13 | 2022-03-18 | 泉州市云箭测控与感知技术创新研究院 | Six-mass-block MEMS (micro-electromechanical system) double-shaft gyroscope for inhibiting common-mode interference signals |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09196682A (en) * | 1996-01-19 | 1997-07-31 | Matsushita Electric Ind Co Ltd | Angular velocity sensor and acceleration sensor |
DE102009001248B4 (en) * | 2009-02-27 | 2020-12-17 | Hanking Electronics, Ltd. | MEMS gyroscope for determining rotational movements around an x, y or z axis |
US8322213B2 (en) * | 2009-06-12 | 2012-12-04 | The Regents Of The University Of California | Micromachined tuning fork gyroscopes with ultra-high sensitivity and shock rejection |
CN104501792B (en) * | 2014-12-18 | 2016-06-22 | 东南大学 | A kind of split type difference silicon micro-resonance type accelerometer of twin shaft |
-
2017
- 2017-01-24 US US16/073,165 patent/US20190033075A1/en not_active Abandoned
- 2017-01-24 SG SG11201806199YA patent/SG11201806199YA/en unknown
- 2017-01-24 WO PCT/SG2017/050036 patent/WO2017135891A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
US20190033075A1 (en) | 2019-01-31 |
WO2017135891A1 (en) | 2017-08-10 |
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