SG11201806199YA - Gyroscope devices and methods for fabricating gyroscope devices - Google Patents

Gyroscope devices and methods for fabricating gyroscope devices

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Publication number
SG11201806199YA
SG11201806199YA SG11201806199YA SG11201806199YA SG11201806199YA SG 11201806199Y A SG11201806199Y A SG 11201806199YA SG 11201806199Y A SG11201806199Y A SG 11201806199YA SG 11201806199Y A SG11201806199Y A SG 11201806199YA SG 11201806199Y A SG11201806199Y A SG 11201806199YA
Authority
SG
Singapore
Prior art keywords
international
singapore
microelectronics
tower
industry development
Prior art date
Application number
SG11201806199YA
Inventor
Guoqiang Wu
Sanchitha Nirodha Fernando
Alex Yuandong Gu
Geng Li Chua
Original Assignee
Agency Science Tech & Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency Science Tech & Res filed Critical Agency Science Tech & Res
Publication of SG11201806199YA publication Critical patent/SG11201806199YA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames

Abstract

NM; 413 452 400C 405 __d= 45 452 406 302 4 10 FIG. 4C W O 20 17 / 135 89 1 Al (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (10) International Publication Number (43) International Publication Date WO 2017/135891 Al 10 August 2017 (10.08.2017) WIPO I PCT 1111111111111101110111111111110101111101111111101111111111011111 011111111111110111111 (51) International Patent Classification: GO1C 1 9 / 5 733 (2012.01) GO1C 19/56 (2012.01) (21) International Application Number: PCT/SG2017/050036 (22) International Filing Date: 24 January 2017 (24.01.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 10201600758W 1 February 2016 (01.02.2016) SG (71) Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH [SG/SG]; 1 Fusionopolis Way, #20-10 Connexis, Singapore 138632 (SG). (72) Inventors: WU, Guoqiang; c/o Industry Development, In- stitute of Microelectronics, 2 Fusionopolis Way, #08-02 Innovis Tower, Singapore 138634 (SG). FERNANDO, Sanchitha Nirodha; c/o Industry Development, Institute of Microelectronics, 2 Fusionopolis Way, #08-02 Innovis Tower, Singapore 138634 (SG). GU, Alex Yuandong; c/o Industry Development, Institute of Microelectronics, 2 Fu- sionopolis Way, #08-02 Innovis Tower, Singapore 138634 (SG). CHUA, Geng Li; c/o Industry Development, Insti- tute of Microelectronics, 2 Fusionopolis Way, #08-02 In- novis Tower, Singapore 138634 (SG). (74) Agent: VIERING, JENTSCHURA & PARTNER LLP; P.O. Box 1088, Rochor Post Office, Rochor Road, Singa- pore 911833 (SG). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, [Continued on next page] (54) Title: GYROSCOPE DEVICES AND METHODS FOR FABRICATING GYROSCOPE DEVICES (57) : According to various embodiments, there is provided a gyroscope device including: an outer frame; and four cells arranged within the outer frame, each cell of the four cells including: a proof mass arranged at least substan- tially in a centre region of the cell; and four electrode frames, 450 each electrode frame of the four electrode frames arranged at a corner region of the cell and coupled to a respective side of 412 the proof mass. WO 2017/135891 Al MIDEDIMOMOIDEIR0101301110MMEIHNOVOIMIE GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))
SG11201806199YA 2016-02-01 2017-01-24 Gyroscope devices and methods for fabricating gyroscope devices SG11201806199YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG10201600758W 2016-02-01
PCT/SG2017/050036 WO2017135891A1 (en) 2016-02-01 2017-01-24 Gyroscope devices and methods for fabricating gyroscope devices

Publications (1)

Publication Number Publication Date
SG11201806199YA true SG11201806199YA (en) 2018-08-30

Family

ID=59499993

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201806199YA SG11201806199YA (en) 2016-02-01 2017-01-24 Gyroscope devices and methods for fabricating gyroscope devices

Country Status (3)

Country Link
US (1) US20190033075A1 (en)
SG (1) SG11201806199YA (en)
WO (1) WO2017135891A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019032179A1 (en) * 2017-08-11 2019-02-14 Hrl Laboratories, Llc A silicon multi-mode coriolis vibratory gyroscopes having high order rotationally symmetric mechanical structure and 32 electrodes
US10794702B2 (en) * 2017-12-13 2020-10-06 Invensense, Inc. On-chip gap measurement
IT201900009582A1 (en) * 2019-06-20 2020-12-20 St Microelectronics Srl MEMS GYRO WITH REAL-TIME SCALE FACTOR CALIBRATION AND RELATED CALIBRATION METHOD
WO2021252398A1 (en) 2020-06-08 2021-12-16 Analog Devices, Inc. Drive and sense stress relief apparatus
EP4162281A1 (en) 2020-06-08 2023-04-12 Analog Devices, Inc. Stress-relief mems gyroscope
WO2022046799A1 (en) * 2020-08-24 2022-03-03 Analog Devices, Inc. Isotropic attenuated motion gyroscope
US11698257B2 (en) 2020-08-24 2023-07-11 Analog Devices, Inc. Isotropic attenuated motion gyroscope

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09196682A (en) * 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd Angular velocity sensor and acceleration sensor
DE102009001248B4 (en) * 2009-02-27 2020-12-17 Hanking Electronics, Ltd. MEMS gyroscope for determining rotational movements around an x, y or z axis
US8322213B2 (en) * 2009-06-12 2012-12-04 The Regents Of The University Of California Micromachined tuning fork gyroscopes with ultra-high sensitivity and shock rejection
CN104501792B (en) * 2014-12-18 2016-06-22 东南大学 A kind of split type difference silicon micro-resonance type accelerometer of twin shaft

Also Published As

Publication number Publication date
US20190033075A1 (en) 2019-01-31
WO2017135891A1 (en) 2017-08-10

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