SG11201806132TA - Optical structure and method of forming the same - Google Patents

Optical structure and method of forming the same

Info

Publication number
SG11201806132TA
SG11201806132TA SG11201806132TA SG11201806132TA SG11201806132TA SG 11201806132T A SG11201806132T A SG 11201806132TA SG 11201806132T A SG11201806132T A SG 11201806132TA SG 11201806132T A SG11201806132T A SG 11201806132TA SG 11201806132T A SG11201806132T A SG 11201806132TA
Authority
SG
Singapore
Prior art keywords
nanyang
singapore
international
avenue
optical structure
Prior art date
Application number
SG11201806132TA
Inventor
Chuan Seng Tan
Wei Li
P Anantha
Kwang Hong Lee
Shuyu Bao
Lin Zhang
Original Assignee
Univ Nanyang Tech
Massachusetts Inst Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nanyang Tech, Massachusetts Inst Technology filed Critical Univ Nanyang Tech
Publication of SG11201806132TA publication Critical patent/SG11201806132TA/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264—Inorganic materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1892—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof methods involving the use of temporary, removable substrates
    • H01L31/1896—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof methods involving the use of temporary, removable substrates for thin-film semiconductors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12119—Bend
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Abstract

WO 17 / 15 1055 Al (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (10) International Publication Number (43) International Publication Date WO 2017/151055 Al 8 September 2017 (08.09.2017) WIPO I PCT 11111111111111011101111111111101011111011101111111101011111111111111111111111110111111 FIG. 1B W core 106 (51) International Patent Classification: GO2B 6/00 (2006.01) H0JL 21/02 (2006.01) H01L 31/0232 (2014.01) (21) International Application Number: PCT/SG2017/050060 (22) International Filing Date: 10 February 2017 (10.02.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 10201601522Q 29 February 2016 (29.02.2016) SG (71) Applicants: NANYANG TECHNOLOGICAL UNI- VERSITY [SG/SG]; 50 Nanyang Avenue, Singapore 639798 (SG). MASSACHUSETTS INSTITUTE OF TECHNOLOGY [US/US]; 77 Massachusetts Avenue, Cambridge, Massachusetts 02139 (US). (72) Inventors: TAN, Chuan Seng; c/o Nanyang Technologic- al University, 50 Nanyang Avenue, Singapore 639798 (SG). LI, Wei; c/o Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798 (SG). ANANTHA, P; c/o Nanyang Technological University, 50 Nanyang Av- enue, Singapore 639798 (SG). LEE, Kwang Hong; c/o Singapore-MIT Alliance for Research and Technology, 1 Create Way, #10-01 Create Tower, Singapore 138602 (SG). BAO, Shuyu; c/o Nanyang Technological Univer- sity, 50 Nanyang Avenue, Singapore 639798 (SG). ZHANG, Lin; c/o Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798 (SG). (74) Agent: VIERING, JENTSCHURA & PARTNER LLP; P.O Box 1088, Rochor Post Office, Rochor Road, Singa- pore 911833 (SG). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. [Continued on next page] (54) Title: OPTICAL STRUCTURE AND METHOD OF FORMING THE SAME (57) : Various embodiments may provide an optical structure. The optical structure may in- clude a substrate. The optical structure may also include a core layer configured to carry optical light. The core layer may include germanium. The 100 optical structure may further include an intermedi- ate layer separating the substrate and the core lay- er so that the substrate is isolated from the core layer. The intermediate layer may include one or more materials selected from a group consisting of III-V materials, dielectric materials, and chalco - 104 genide materials. A width of the core layer may be smaller than a width of the intermediate layer. A refractive index of the core layer may be more than 4. A refractive index of the intermediate layer may be smaller than 3.6. 102 Wintermediate WO 2017/151055 Al MIDEDIMOMOIDEIR010131130101MHIMMOIMIE (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: with international search report (Art. 21(3))
SG11201806132TA 2016-02-29 2017-02-10 Optical structure and method of forming the same SG11201806132TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG10201601522Q 2016-02-29
PCT/SG2017/050060 WO2017151055A1 (en) 2016-02-29 2017-02-10 Optical structure and method of forming the same

Publications (1)

Publication Number Publication Date
SG11201806132TA true SG11201806132TA (en) 2018-09-27

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201912982VA SG10201912982VA (en) 2016-02-29 2017-02-10 Optical structure and method of forming the same
SG11201806132TA SG11201806132TA (en) 2016-02-29 2017-02-10 Optical structure and method of forming the same

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG10201912982VA SG10201912982VA (en) 2016-02-29 2017-02-10 Optical structure and method of forming the same

Country Status (3)

Country Link
US (1) US10598853B2 (en)
SG (2) SG10201912982VA (en)
WO (1) WO2017151055A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11150494B2 (en) 2015-03-05 2021-10-19 Rockley Photonics Limited Waveguide modulator structures
WO2018096038A1 (en) * 2016-11-23 2018-05-31 Rockley Photonics Limited Electro-optically active device
US11101256B2 (en) 2016-11-23 2021-08-24 Rockley Photonics Limited Optical modulators

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7453129B2 (en) * 2002-12-18 2008-11-18 Noble Peak Vision Corp. Image sensor comprising isolated germanium photodetectors integrated with a silicon substrate and silicon circuitry
US6897498B2 (en) 2003-03-31 2005-05-24 Sioptical, Inc. Polycrystalline germanium-based waveguide detector integrated on a thin silicon-on-insulator (SOI) platform
US7496260B2 (en) * 2007-03-27 2009-02-24 Imra America, Inc. Ultra high numerical aperture optical fibers
KR101344346B1 (en) * 2007-07-25 2013-12-24 삼성전자주식회사 Phase change memory devices and methods of forming the same
KR101750742B1 (en) * 2011-10-14 2017-06-28 삼성전자주식회사 Photodetector structure
WO2013146406A1 (en) * 2012-03-30 2013-10-03 日本電気株式会社 Waveguide-coupled msm-type photodiode
US9171929B2 (en) * 2012-04-25 2015-10-27 Taiwan Semiconductor Manufacturing Company, Ltd. Strained structure of semiconductor device and method of making the strained structure
WO2014047443A1 (en) 2012-09-21 2014-03-27 The Regents Of The University Of California Integrated dielectric waveguide and semiconductor layer and method therefor
US9046650B2 (en) 2013-03-12 2015-06-02 The Massachusetts Institute Of Technology Methods and apparatus for mid-infrared sensing
US9612398B2 (en) * 2014-10-17 2017-04-04 The United States Of America, As Represented By The Secretary Of The Navy Ultra-broadband photonic integrated circuit platform and ultra-broadband photonic integrated circuit
BR102015027316B1 (en) * 2014-10-31 2021-07-27 Nichia Corporation LIGHT EMITTING DEVICE AND FRONT LAMP SYSTEM FOR ADAPTIVE DRIVE HEADLIGHT
US9916999B2 (en) * 2015-06-04 2018-03-13 Micron Technology, Inc. Methods of fabricating a semiconductor package structure including at least one redistribution layer

Also Published As

Publication number Publication date
US10598853B2 (en) 2020-03-24
US20190033523A1 (en) 2019-01-31
WO2017151055A9 (en) 2018-11-15
WO2017151055A1 (en) 2017-09-08
SG10201912982VA (en) 2020-03-30

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