SG11201804539YA - Method for double-side polishing wafer - Google Patents
Method for double-side polishing waferInfo
- Publication number
- SG11201804539YA SG11201804539YA SG11201804539YA SG11201804539YA SG11201804539YA SG 11201804539Y A SG11201804539Y A SG 11201804539YA SG 11201804539Y A SG11201804539Y A SG 11201804539YA SG 11201804539Y A SG11201804539Y A SG 11201804539YA SG 11201804539Y A SG11201804539Y A SG 11201804539YA
- Authority
- SG
- Singapore
- Prior art keywords
- double
- side polishing
- polishing wafer
- wafer
- polishing
- Prior art date
Links
- 238000000034 method Methods 0.000 title 1
- 238000005498 polishing Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
- B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/28—Work carriers for double side lapping of plane surfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02024—Mirror polishing
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015241964A JP6424809B2 (en) | 2015-12-11 | 2015-12-11 | Double sided polishing method of wafer |
PCT/JP2016/004942 WO2017098691A1 (en) | 2015-12-11 | 2016-11-22 | Method for double-sided polishing of wafers |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201804539YA true SG11201804539YA (en) | 2018-06-28 |
Family
ID=59013992
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201804539YA SG11201804539YA (en) | 2015-12-11 | 2016-11-22 | Method for double-side polishing wafer |
Country Status (8)
Country | Link |
---|---|
US (1) | US11298796B2 (en) |
JP (1) | JP6424809B2 (en) |
KR (1) | KR102568201B1 (en) |
CN (1) | CN108290268B (en) |
DE (1) | DE112016005348T5 (en) |
SG (1) | SG11201804539YA (en) |
TW (1) | TWI700147B (en) |
WO (1) | WO2017098691A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6747599B2 (en) * | 2017-08-31 | 2020-08-26 | 株式会社Sumco | Double side polishing method for silicon wafer |
JP6977657B2 (en) * | 2018-05-08 | 2021-12-08 | 信越半導体株式会社 | How to store carriers for double-sided polishing equipment and how to polish double-sided wafers |
JP7435436B2 (en) | 2020-12-24 | 2024-02-21 | 株式会社Sumco | How to polish carrier plate |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6190868A (en) * | 1984-10-08 | 1986-05-09 | Toshiba Corp | Polishing unit |
US6595831B1 (en) * | 1996-05-16 | 2003-07-22 | Ebara Corporation | Method for polishing workpieces using fixed abrasives |
EP1007703A1 (en) * | 1996-12-27 | 2000-06-14 | Sumitomo Chemical Company, Limited | Methods of conferring ppo-inhibiting herbicide resistance to plants by gene manipulation |
US5882245A (en) * | 1997-02-28 | 1999-03-16 | Advanced Ceramics Research, Inc. | Polymer carrier gears for polishing of flat objects |
CN1203530C (en) * | 2000-04-24 | 2005-05-25 | 三菱住友硅晶株式会社 | Method of manufacturing semiconductor wafer |
US6454635B1 (en) * | 2000-08-08 | 2002-09-24 | Memc Electronic Materials, Inc. | Method and apparatus for a wafer carrier having an insert |
KR100832942B1 (en) * | 2000-10-26 | 2008-05-27 | 신에츠 한도타이 가부시키가이샤 | Wafer manufacturing method, polishing apparatus, and wafer |
JP2004283929A (en) * | 2003-03-20 | 2004-10-14 | Shin Etsu Handotai Co Ltd | Carrier for wafer holding, double side polishing device using it and double side polishing method of wafer |
US20070184662A1 (en) * | 2004-06-23 | 2007-08-09 | Komatsu Denshi Kinzoku Kabushiki Kaisha | Double-side polishing carrier and fabrication method thereof |
JP2007021680A (en) | 2005-07-19 | 2007-02-01 | Shin Etsu Handotai Co Ltd | Double-side lapping method for wafer |
KR100898821B1 (en) * | 2007-11-29 | 2009-05-22 | 주식회사 실트론 | Method for manufacturing wafer carrier |
JP4605233B2 (en) * | 2008-02-27 | 2011-01-05 | 信越半導体株式会社 | Carrier for double-side polishing apparatus, double-side polishing apparatus and double-side polishing method using the same |
JP2010221362A (en) * | 2009-03-24 | 2010-10-07 | Showa Denko Kk | Manufacturing method of disk shaped substrate |
JP5233888B2 (en) * | 2009-07-21 | 2013-07-10 | 信越半導体株式会社 | Method for manufacturing carrier for double-side polishing apparatus, carrier for double-side polishing apparatus and double-side polishing method for wafer |
KR101209271B1 (en) * | 2009-08-21 | 2012-12-06 | 주식회사 엘지실트론 | Apparatus for double side polishing and Carrier for double side polishing apparatus |
SG185085A1 (en) * | 2010-04-30 | 2012-12-28 | Sumco Corp | Method for polishing silicon wafer and polishing liquid therefor |
DE102010032501B4 (en) * | 2010-07-28 | 2019-03-28 | Siltronic Ag | Method and device for dressing the working layers of a double-side sanding device |
US20130017765A1 (en) * | 2011-07-11 | 2013-01-17 | 3M Innovative Properties Company | Lapping carrier and method of using the same |
JP5847789B2 (en) * | 2013-02-13 | 2016-01-27 | 信越半導体株式会社 | Method for manufacturing carrier for double-side polishing apparatus and double-side polishing method for wafer |
DE102013202488B4 (en) * | 2013-02-15 | 2015-01-22 | Siltronic Ag | Process for dressing polishing cloths for simultaneous two-sided polishing of semiconductor wafers |
JP6244962B2 (en) * | 2014-02-17 | 2017-12-13 | 株式会社Sumco | Manufacturing method of semiconductor wafer |
JP6056793B2 (en) * | 2014-03-14 | 2017-01-11 | 信越半導体株式会社 | Method for manufacturing carrier for double-side polishing apparatus and double-side polishing method |
JP6443370B2 (en) * | 2016-03-18 | 2018-12-26 | 信越半導体株式会社 | Method for manufacturing carrier for double-side polishing apparatus and double-side polishing method for wafer |
-
2015
- 2015-12-11 JP JP2015241964A patent/JP6424809B2/en active Active
-
2016
- 2016-11-22 US US15/779,141 patent/US11298796B2/en active Active
- 2016-11-22 KR KR1020187015445A patent/KR102568201B1/en active IP Right Grant
- 2016-11-22 WO PCT/JP2016/004942 patent/WO2017098691A1/en active Application Filing
- 2016-11-22 DE DE112016005348.7T patent/DE112016005348T5/en active Pending
- 2016-11-22 CN CN201680069349.8A patent/CN108290268B/en active Active
- 2016-11-22 SG SG11201804539YA patent/SG11201804539YA/en unknown
- 2016-11-23 TW TW105138413A patent/TWI700147B/en active
Also Published As
Publication number | Publication date |
---|---|
TW201729938A (en) | 2017-09-01 |
KR102568201B1 (en) | 2023-08-18 |
TWI700147B (en) | 2020-08-01 |
KR20180087275A (en) | 2018-08-01 |
CN108290268B (en) | 2020-12-11 |
WO2017098691A1 (en) | 2017-06-15 |
DE112016005348T5 (en) | 2018-08-02 |
US11298796B2 (en) | 2022-04-12 |
JP2017104958A (en) | 2017-06-15 |
CN108290268A (en) | 2018-07-17 |
US20180272497A1 (en) | 2018-09-27 |
JP6424809B2 (en) | 2018-11-21 |
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