SG11201606712XA - System for and method of providing pressure insensitive self verifying mass flow controller - Google Patents

System for and method of providing pressure insensitive self verifying mass flow controller

Info

Publication number
SG11201606712XA
SG11201606712XA SG11201606712XA SG11201606712XA SG11201606712XA SG 11201606712X A SG11201606712X A SG 11201606712XA SG 11201606712X A SG11201606712X A SG 11201606712XA SG 11201606712X A SG11201606712X A SG 11201606712XA SG 11201606712X A SG11201606712X A SG 11201606712XA
Authority
SG
Singapore
Prior art keywords
mass flow
flow controller
providing pressure
pressure insensitive
verifying mass
Prior art date
Application number
SG11201606712XA
Other languages
English (en)
Inventor
Junhua Ding
Bassi Michael L
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/180,063 external-priority patent/US9471066B2/en
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Publication of SG11201606712XA publication Critical patent/SG11201606712XA/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
SG11201606712XA 2014-02-13 2015-01-26 System for and method of providing pressure insensitive self verifying mass flow controller SG11201606712XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/180,063 US9471066B2 (en) 2012-01-20 2014-02-13 System for and method of providing pressure insensitive self verifying mass flow controller
PCT/US2015/012851 WO2015123008A1 (fr) 2014-02-13 2015-01-26 Système et procédé permettant de produire un régulateur de débit massique autocontrôlé insensible à la pression

Publications (1)

Publication Number Publication Date
SG11201606712XA true SG11201606712XA (en) 2016-09-29

Family

ID=53800526

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201606712XA SG11201606712XA (en) 2014-02-13 2015-01-26 System for and method of providing pressure insensitive self verifying mass flow controller

Country Status (7)

Country Link
EP (1) EP3105647B1 (fr)
JP (1) JP6484248B2 (fr)
KR (1) KR102237868B1 (fr)
CN (1) CN106104402B (fr)
SG (1) SG11201606712XA (fr)
TW (1) TWI550376B (fr)
WO (1) WO2015123008A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2557670B (en) * 2016-12-15 2020-04-15 Thermo Fisher Scient Bremen Gmbh Improved gas flow control
JP7131561B2 (ja) * 2017-09-29 2022-09-06 日立金属株式会社 質量流量制御システム並びに当該システムを含む半導体製造装置及び気化器
US10725484B2 (en) 2018-09-07 2020-07-28 Mks Instruments, Inc. Method and apparatus for pulse gas delivery using an external pressure trigger
AT522357B1 (de) * 2019-03-18 2020-11-15 Avl List Gmbh Messsystem zur Messung eines Massendurchflusses, einer Dichte, einer Temperatur und/oder einer Strömungsgeschwindigkeit
DE102020210777A1 (de) * 2020-08-26 2022-03-03 Festo Se & Co. Kg Durchflussregler, Ventilanordnung und Verfahren
KR102359130B1 (ko) * 2021-05-04 2022-02-08 주식회사 삼양발브종합메이커 유량 제어 스마트 밸브와 이를 이용한 유량 제어 시스템

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6047462B2 (ja) * 1978-06-02 1985-10-22 株式会社日立製作所 電子制御燃料噴射装置の吸入空気量計測装置
JP3637278B2 (ja) * 2000-12-20 2005-04-13 Ｓｍｃ株式会社 ２センサ式流量計
KR101006537B1 (ko) * 2002-06-24 2011-01-07 엠케이에스 인스트루먼츠 인코포레이티드 압력변동에 영향을 받지 않는 질량 유량 제어장치
JP4137666B2 (ja) * 2003-02-17 2008-08-20 株式会社堀場エステック マスフローコントローラ
US6945123B1 (en) * 2004-06-28 2005-09-20 The General Electric Company Gas flow sensor having redundant flow sensing capability
US8197133B2 (en) * 2008-02-22 2012-06-12 Brooks Instruments, Llc System and method for sensor thermal drift offset compensation
JP5177864B2 (ja) * 2008-06-04 2013-04-10 株式会社フジキン 熱式質量流量調整器用自動圧力調整器
US7826986B2 (en) * 2008-09-26 2010-11-02 Advanced Energy Industries, Inc. Method and system for operating a mass flow controller
JP4750866B2 (ja) * 2009-02-18 2011-08-17 信越化学工業株式会社 石英ガラスの製造方法及び装置
JP5562712B2 (ja) * 2010-04-30 2014-07-30 東京エレクトロン株式会社 半導体製造装置用のガス供給装置
US9846074B2 (en) * 2012-01-20 2017-12-19 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US9760096B2 (en) * 2012-03-07 2017-09-12 Illinois Tool Works Inc. System and method for using a model for improving control of a mass flow controller

Also Published As

Publication number Publication date
EP3105647A1 (fr) 2016-12-21
TW201539167A (zh) 2015-10-16
TWI550376B (zh) 2016-09-21
KR20160122732A (ko) 2016-10-24
WO2015123008A1 (fr) 2015-08-20
JP6484248B2 (ja) 2019-03-13
KR102237868B1 (ko) 2021-04-12
EP3105647B1 (fr) 2019-01-23
CN106104402A (zh) 2016-11-09
CN106104402B (zh) 2020-03-24
EP3105647A4 (fr) 2017-09-13
JP2017506744A (ja) 2017-03-09

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