SG11201509690UA - A photon emitter array - Google Patents
A photon emitter arrayInfo
- Publication number
- SG11201509690UA SG11201509690UA SG11201509690UA SG11201509690UA SG11201509690UA SG 11201509690U A SG11201509690U A SG 11201509690UA SG 11201509690U A SG11201509690U A SG 11201509690UA SG 11201509690U A SG11201509690U A SG 11201509690UA SG 11201509690U A SG11201509690U A SG 11201509690UA
- Authority
- SG
- Singapore
- Prior art keywords
- emitter array
- photon emitter
- photon
- array
- emitter
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9506—Optical discs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8812—Diffuse illumination, e.g. "sky"
- G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8845—Multiple wavelengths of illumination or detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8848—Polarisation of light
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201361829171P | 2013-05-30 | 2013-05-30 | |
US14/194,443 US9581554B2 (en) | 2013-05-30 | 2014-02-28 | Photon emitter array |
PCT/US2014/039874 WO2014194014A1 (en) | 2013-05-30 | 2014-05-29 | A photon emitter array |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201509690UA true SG11201509690UA (en) | 2015-12-30 |
Family
ID=51984753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201509690UA SG11201509690UA (en) | 2013-05-30 | 2014-05-29 | A photon emitter array |
Country Status (5)
Country | Link |
---|---|
US (2) | US9581554B2 (zh) |
CN (1) | CN105358960B (zh) |
MY (1) | MY176812A (zh) |
SG (1) | SG11201509690UA (zh) |
WO (1) | WO2014194014A1 (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6289450B2 (ja) | 2012-05-09 | 2018-03-07 | シーゲイト テクノロジー エルエルシーSeagate Technology LLC | 表面特徴マッピング |
US9212900B2 (en) * | 2012-08-11 | 2015-12-15 | Seagate Technology Llc | Surface features characterization |
US9297759B2 (en) | 2012-10-05 | 2016-03-29 | Seagate Technology Llc | Classification of surface features using fluorescence |
US9297751B2 (en) | 2012-10-05 | 2016-03-29 | Seagate Technology Llc | Chemical characterization of surface features |
US9377394B2 (en) | 2012-10-16 | 2016-06-28 | Seagate Technology Llc | Distinguishing foreign surface features from native surface features |
US9217714B2 (en) | 2012-12-06 | 2015-12-22 | Seagate Technology Llc | Reflective surfaces for surface features of an article |
US9513215B2 (en) | 2013-05-30 | 2016-12-06 | Seagate Technology Llc | Surface features by azimuthal angle |
US9274064B2 (en) | 2013-05-30 | 2016-03-01 | Seagate Technology Llc | Surface feature manager |
US9201019B2 (en) | 2013-05-30 | 2015-12-01 | Seagate Technology Llc | Article edge inspection |
US9217715B2 (en) | 2013-05-30 | 2015-12-22 | Seagate Technology Llc | Apparatuses and methods for magnetic features of articles |
US10768406B2 (en) * | 2016-06-20 | 2020-09-08 | Scanogen Inc. | Imaging system |
EP3982113A1 (en) * | 2020-10-06 | 2022-04-13 | Sens-Tech Ltd. | Method and apparatus for inspection of a subject article |
Family Cites Families (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4806776A (en) * | 1980-03-10 | 1989-02-21 | Kley Victor B | Electrical illumination and detecting apparatus |
US4893932A (en) * | 1986-05-02 | 1990-01-16 | Particle Measuring Systems, Inc. | Surface analysis system and method |
US5426506A (en) | 1993-03-22 | 1995-06-20 | The University Of Chicago | Optical method and apparatus for detection of surface and near-subsurface defects in dense ceramics |
US5892745A (en) | 1996-08-27 | 1999-04-06 | Seagate Technology, Inc. | System and method to compensate for data defects within a magneto-optical computer memory device |
JP3692685B2 (ja) | 1997-02-19 | 2005-09-07 | 株式会社ニコン | 欠陥検査装置 |
US6324203B1 (en) * | 1997-06-13 | 2001-11-27 | Nikon Corporation | Laser light source, illuminating optical device, and exposure device |
DE69703487T2 (de) * | 1997-08-22 | 2001-06-13 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung zur automatischen Prüfung bewegter Oberflächen |
JPH11108847A (ja) | 1997-09-30 | 1999-04-23 | Mitsui Mining & Smelting Co Ltd | 欠陥評価装置 |
US6002705A (en) * | 1997-12-03 | 1999-12-14 | Xerox Corporation | Wavelength and polarization multiplexed vertical cavity surface emitting lasers |
WO1999032879A1 (en) | 1997-12-22 | 1999-07-01 | Ade Optical Systems Corporation | Method and apparatus for reducing roughness scatter as a noise source in wafer scanning systems |
US6366690B1 (en) | 1998-07-07 | 2002-04-02 | Applied Materials, Inc. | Pixel based machine for patterned wafers |
DE19909534B4 (de) | 1999-03-04 | 2011-07-07 | BYK-Gardner GmbH, 82538 | Vorrichtung und Verfahren zur Bestimmung der Qualität strukturierter Oberflächen |
US6919957B2 (en) * | 2000-09-20 | 2005-07-19 | Kla-Tencor Technologies Corp. | Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen |
US6768543B1 (en) | 2001-11-01 | 2004-07-27 | Arun Ananth Aiyer | Wafer inspection apparatus with unique illumination methodology and method of operation |
US7046353B2 (en) | 2001-12-04 | 2006-05-16 | Kabushiki Kaisha Topcon | Surface inspection system |
US20040032581A1 (en) * | 2002-01-15 | 2004-02-19 | Mehrdad Nikoonahad | Systems and methods for inspection of specimen surfaces |
US7319229B2 (en) * | 2003-12-29 | 2008-01-15 | Kla-Tencor Technologies Corporation | Illumination apparatus and methods |
US20060192949A1 (en) * | 2004-12-19 | 2006-08-31 | Bills Richard E | System and method for inspecting a workpiece surface by analyzing scattered light in a back quartersphere region above the workpiece |
US7692783B2 (en) * | 2006-02-13 | 2010-04-06 | Pacific Biosciences Of California | Methods and systems for simultaneous real-time monitoring of optical signals from multiple sources |
US7715001B2 (en) * | 2006-02-13 | 2010-05-11 | Pacific Biosciences Of California, Inc. | Methods and systems for simultaneous real-time monitoring of optical signals from multiple sources |
KR100763942B1 (ko) | 2006-09-04 | 2007-10-05 | (주)포씨스 | 표면검사장치 |
JP2008066032A (ja) * | 2006-09-05 | 2008-03-21 | Moritex Corp | 照明装置 |
JP4876019B2 (ja) * | 2007-04-25 | 2012-02-15 | 株式会社日立ハイテクノロジーズ | 欠陥検査装置およびその方法 |
US7978337B2 (en) | 2007-11-13 | 2011-07-12 | Zygo Corporation | Interferometer utilizing polarization scanning |
FI121151B (fi) * | 2007-11-22 | 2010-07-30 | Valtion Teknillinen | Menetelmä ja laitteisto liikkuvan pinnan topografian ja optisten ominaisuuksien määrittämiseksi |
JP4719284B2 (ja) | 2008-10-10 | 2011-07-06 | トヨタ自動車株式会社 | 表面検査装置 |
JP2012026862A (ja) | 2010-07-23 | 2012-02-09 | Konica Minolta Business Technologies Inc | 表面検査装置、表面検査方法 |
JP2012063154A (ja) * | 2010-09-14 | 2012-03-29 | Seiko Epson Corp | 検出装置 |
JP2012234081A (ja) * | 2011-05-06 | 2012-11-29 | Oputeikon:Kk | 照明装置および光学装置 |
NL2008936A (en) * | 2011-07-28 | 2013-01-29 | Asml Netherlands Bv | Illumination source for use in inspection methods and/or lithography inspection and lithographic apparatus and inspection method. |
JP6289450B2 (ja) * | 2012-05-09 | 2018-03-07 | シーゲイト テクノロジー エルエルシーSeagate Technology LLC | 表面特徴マッピング |
US8896827B2 (en) * | 2012-06-26 | 2014-11-25 | Kla-Tencor Corporation | Diode laser based broad band light sources for wafer inspection tools |
US9212900B2 (en) * | 2012-08-11 | 2015-12-15 | Seagate Technology Llc | Surface features characterization |
US9297759B2 (en) * | 2012-10-05 | 2016-03-29 | Seagate Technology Llc | Classification of surface features using fluorescence |
US9297751B2 (en) * | 2012-10-05 | 2016-03-29 | Seagate Technology Llc | Chemical characterization of surface features |
WO2014055962A1 (en) * | 2012-10-05 | 2014-04-10 | Seagate Technology Llc | Imaging a transparent article |
US9377394B2 (en) * | 2012-10-16 | 2016-06-28 | Seagate Technology Llc | Distinguishing foreign surface features from native surface features |
US20140152804A1 (en) * | 2012-12-05 | 2014-06-05 | Seagate Technology Llc | Sub-pixel imaging for enhanced pixel resolution |
US9217714B2 (en) * | 2012-12-06 | 2015-12-22 | Seagate Technology Llc | Reflective surfaces for surface features of an article |
WO2014146906A2 (en) * | 2013-03-20 | 2014-09-25 | Asml Netherlands B.V. | Method and apparatus for measuring asymmetry of a microsutructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method |
US9217715B2 (en) * | 2013-05-30 | 2015-12-22 | Seagate Technology Llc | Apparatuses and methods for magnetic features of articles |
US9201019B2 (en) * | 2013-05-30 | 2015-12-01 | Seagate Technology Llc | Article edge inspection |
US9513215B2 (en) * | 2013-05-30 | 2016-12-06 | Seagate Technology Llc | Surface features by azimuthal angle |
JP2013213836A (ja) * | 2013-07-18 | 2013-10-17 | Fujitsu Ltd | 表面欠陥検査装置及び表面欠陥検査方法 |
RU2659749C2 (ru) * | 2013-08-02 | 2018-07-03 | Конинклейке Филипс Н.В. | Лазерный прибор с регулируемой поляризацией |
US9518916B1 (en) * | 2013-10-18 | 2016-12-13 | Kla-Tencor Corporation | Compressive sensing for metrology |
US9882345B2 (en) * | 2014-04-24 | 2018-01-30 | Nec Display Solutions, Ltd. | Laser light source, projector provided with laser light source, and method for manufacturing laser light source |
JP6065875B2 (ja) * | 2014-06-02 | 2017-01-25 | 横河電機株式会社 | 偏光検査装置 |
-
2014
- 2014-02-28 US US14/194,443 patent/US9581554B2/en active Active
- 2014-05-29 WO PCT/US2014/039874 patent/WO2014194014A1/en active Application Filing
- 2014-05-29 SG SG11201509690UA patent/SG11201509690UA/en unknown
- 2014-05-29 MY MYPI2015704297A patent/MY176812A/en unknown
- 2014-05-29 CN CN201480030536.6A patent/CN105358960B/zh active Active
-
2016
- 2016-11-30 US US15/364,548 patent/US9869639B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
WO2014194014A1 (en) | 2014-12-04 |
MY176812A (en) | 2020-08-21 |
US9581554B2 (en) | 2017-02-28 |
CN105358960B (zh) | 2019-06-14 |
US9869639B2 (en) | 2018-01-16 |
US20140354994A1 (en) | 2014-12-04 |
US20170082553A1 (en) | 2017-03-23 |
CN105358960A (zh) | 2016-02-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB2521727B (en) | Array substrate | |
DK4101791T3 (en) | A grid frame structure | |
SG11201509690UA (en) | A photon emitter array | |
HK1217533A1 (zh) | 週期性傳感器陣列 | |
EP2956781A4 (en) | RECHARGE BLOCK | |
GB201320092D0 (en) | A Support Structure | |
GB201302664D0 (en) | A pixel structure | |
GB201314288D0 (en) | A Pixel | |
GB201317990D0 (en) | A conncetor | |
GB201306883D0 (en) | A retention arrangement | |
GB201313792D0 (en) | A pacifier | |
GB2535954B (en) | A support structure | |
EP2957315A4 (en) | MICRO NEEDLE ARRAY | |
IL239966B (en) | A photodiode array with a charge-absorbing capacitor region | |
GB201610584D0 (en) | Drive array | |
GB201302555D0 (en) | A detector | |
GB201316200D0 (en) | A getter | |
GB201302176D0 (en) | A solar trailer | |
GB201302440D0 (en) | A flood-control scheme | |
GB2532693B (en) | A toothbrush | |
GB201313797D0 (en) | A pacifier | |
EP3033057A4 (en) | Substrate | |
AU346919S (en) | A vial assembly | |
PT3033057T (pt) | Um substrato | |
ZA201407191B (en) | A dish support |