SG11201404309VA - Die up fully molded fan-out wafer level packaging - Google Patents

Die up fully molded fan-out wafer level packaging

Info

Publication number
SG11201404309VA
SG11201404309VA SG11201404309VA SG11201404309VA SG11201404309VA SG 11201404309V A SG11201404309V A SG 11201404309VA SG 11201404309V A SG11201404309V A SG 11201404309VA SG 11201404309V A SG11201404309V A SG 11201404309VA SG 11201404309V A SG11201404309V A SG 11201404309VA
Authority
SG
Singapore
Prior art keywords
die
wafer level
level packaging
out wafer
fully molded
Prior art date
Application number
SG11201404309VA
Inventor
Christopher Scanlan
Original Assignee
Deca Technologies Inc
Christopher Scanlan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US13/632,062 external-priority patent/US8535978B2/en
Application filed by Deca Technologies Inc, Christopher Scanlan filed Critical Deca Technologies Inc
Priority claimed from PCT/US2012/072184 external-priority patent/WO2013102146A1/en
Publication of SG11201404309VA publication Critical patent/SG11201404309VA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/561—Batch processing
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    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/568—Temporary substrate used as encapsulation process aid
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    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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    • H01L2224/13001—Core members of the bump connector
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    • H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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    • H01L2224/20—Structure, shape, material or disposition of high density interconnect preforms
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    • H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
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    • H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L2224/20—Structure, shape, material or disposition of high density interconnect preforms
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    • H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92—Specific sequence of method steps
    • H—ELECTRICITY
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    • H01L2224/93—Batch processes
    • H01L2224/94—Batch processes at wafer-level, i.e. with connecting carried out on a wafer comprising a plurality of undiced individual devices
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/96—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
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    • H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
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    • H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
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    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
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    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10—Bump connectors ; Manufacturing methods related thereto
    • H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181—Encapsulation
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    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/35—Mechanical effects
    • H01L2924/351—Thermal stress
    • H01L2924/3511—Warping

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
SG11201404309VA 2011-12-30 2012-12-28 Die up fully molded fan-out wafer level packaging SG11201404309VA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/341,654 US8604600B2 (en) 2011-12-30 2011-12-30 Fully molded fan-out
US13/632,062 US8535978B2 (en) 2011-12-30 2012-09-30 Die up fully molded fan-out wafer level packaging
PCT/US2012/072184 WO2013102146A1 (en) 2011-12-30 2012-12-28 Die up fully molded fan-out wafer level packaging

Publications (1)

Publication Number Publication Date
SG11201404309VA true SG11201404309VA (en) 2014-10-30

Family

ID=48678422

Family Applications (2)

Application Number Title Priority Date Filing Date
SG11201404307TA SG11201404307TA (en) 2011-12-30 2012-12-28 Fully molded fan-out
SG11201404309VA SG11201404309VA (en) 2011-12-30 2012-12-28 Die up fully molded fan-out wafer level packaging

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG11201404307TA SG11201404307TA (en) 2011-12-30 2012-12-28 Fully molded fan-out

Country Status (4)

Country Link
US (2) US8604600B2 (en)
CN (2) CN103187322B (en)
SG (2) SG11201404307TA (en)
WO (1) WO2013102137A2 (en)

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US11189500B2 (en) 2018-11-20 2021-11-30 AT&S (Chongqing) Company Limited Method of manufacturing a component carrier with an embedded cluster and the component carrier

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