SG11201402404VA - Apparatus for treating a gas stream - Google Patents
Apparatus for treating a gas streamInfo
- Publication number
- SG11201402404VA SG11201402404VA SG11201402404VA SG11201402404VA SG11201402404VA SG 11201402404V A SG11201402404V A SG 11201402404VA SG 11201402404V A SG11201402404V A SG 11201402404VA SG 11201402404V A SG11201402404V A SG 11201402404VA SG 11201402404V A SG11201402404V A SG 11201402404VA
- Authority
- SG
- Singapore
- Prior art keywords
- treating
- gas stream
- stream
- gas
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
- B01D2259/818—Employing electrical discharges or the generation of a plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0894—Processes carried out in the presence of a plasma
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Organic Chemistry (AREA)
- Toxicology (AREA)
- Thermal Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Treating Waste Gases (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1119990.8A GB2497273B (en) | 2011-11-19 | 2011-11-19 | Apparatus for treating a gas stream |
| PCT/GB2012/052443 WO2013072658A1 (en) | 2011-11-19 | 2012-10-03 | Apparatus for treating a gas stream |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201402404VA true SG11201402404VA (en) | 2014-09-26 |
Family
ID=45475418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201402404VA SG11201402404VA (en) | 2011-11-19 | 2012-10-03 | Apparatus for treating a gas stream |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9346005B2 (en) |
| EP (1) | EP2780101B1 (en) |
| JP (1) | JP6153033B2 (en) |
| KR (1) | KR102007549B1 (en) |
| CN (1) | CN103930189B (en) |
| GB (1) | GB2497273B (en) |
| SG (1) | SG11201402404VA (en) |
| TW (1) | TWI553148B (en) |
| WO (1) | WO2013072658A1 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2535528A (en) | 2015-02-23 | 2016-08-24 | Edwards Ltd | Apparatus for treating gas |
| GB2540992A (en) * | 2015-08-04 | 2017-02-08 | Edwards Ltd | Control of gas flow and power supplied to a plasma torch in a multiple process chamber gas treatment system |
| WO2017068609A1 (en) * | 2015-10-19 | 2017-04-27 | カンケンテクノ株式会社 | Exhaust gas treatment device |
| CN110214046A (en) * | 2017-02-03 | 2019-09-06 | 应用材料公司 | The plasma abatement of nitrous oxide from semiconductor technology effluent |
| KR102282582B1 (en) * | 2019-10-14 | 2021-07-29 | 영진아이엔디(주) | Energy saving type scrubber system for treating waste gas and method for the same |
| TWI786954B (en) * | 2021-11-22 | 2022-12-11 | 財團法人工業技術研究院 | Device and method of simultaneously removing flammable gas and nitrous oxide |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5779991A (en) * | 1996-11-12 | 1998-07-14 | Eastern Digital Inc. | Apparatus for destroying hazardous compounds in a gas stream |
| JP2000133494A (en) * | 1998-10-23 | 2000-05-12 | Mitsubishi Heavy Ind Ltd | Microwave plasma generation device and method |
| JP2003183832A (en) * | 2001-12-20 | 2003-07-03 | Sekisui Chem Co Ltd | Discharge plasma treatment method |
| ES2686868T3 (en) | 2002-05-08 | 2018-10-22 | Benjamin Chun Pong Chan | A synthetic gas production system |
| FR2864795B1 (en) * | 2004-01-06 | 2008-04-18 | Air Liquide | PROCESS FOR TREATING GASES BY HIGH FREQUENCY DISCHARGES |
| GB0403797D0 (en) * | 2004-02-20 | 2004-03-24 | Boc Group Plc | Gas abatement |
| FR2873045B1 (en) * | 2004-07-13 | 2007-01-19 | Air Liquide | TREATMENT OF GASEOUS EFFLUENTS BY ATMOSPHERIC PRESSURE PLASMA |
| JPWO2008068917A1 (en) * | 2006-12-01 | 2010-03-18 | カンケンテクノ株式会社 | Semiconductor manufacturing exhaust gas abatement system |
| JP5153218B2 (en) * | 2007-06-12 | 2013-02-27 | キヤノン株式会社 | Digital data broadcast receiving apparatus and control method thereof |
| US8747762B2 (en) * | 2009-12-03 | 2014-06-10 | Applied Materials, Inc. | Methods and apparatus for treating exhaust gas in a processing system |
-
2011
- 2011-11-19 GB GB1119990.8A patent/GB2497273B/en active Active
-
2012
- 2012-10-03 EP EP12775288.9A patent/EP2780101B1/en active Active
- 2012-10-03 KR KR1020147016291A patent/KR102007549B1/en active IP Right Grant
- 2012-10-03 JP JP2014541745A patent/JP6153033B2/en active Active
- 2012-10-03 WO PCT/GB2012/052443 patent/WO2013072658A1/en active Application Filing
- 2012-10-03 CN CN201280056784.9A patent/CN103930189B/en active Active
- 2012-10-03 US US14/358,935 patent/US9346005B2/en active Active
- 2012-10-03 SG SG11201402404VA patent/SG11201402404VA/en unknown
- 2012-10-25 TW TW101139551A patent/TWI553148B/en active
Also Published As
| Publication number | Publication date |
|---|---|
| EP2780101A1 (en) | 2014-09-24 |
| GB201119990D0 (en) | 2012-01-04 |
| KR20140101801A (en) | 2014-08-20 |
| US9346005B2 (en) | 2016-05-24 |
| JP2015502249A (en) | 2015-01-22 |
| GB2497273A (en) | 2013-06-12 |
| TW201326450A (en) | 2013-07-01 |
| US20140334982A1 (en) | 2014-11-13 |
| TWI553148B (en) | 2016-10-11 |
| CN103930189B (en) | 2016-08-24 |
| JP6153033B2 (en) | 2017-06-28 |
| WO2013072658A1 (en) | 2013-05-23 |
| CN103930189A (en) | 2014-07-16 |
| EP2780101B1 (en) | 2021-02-17 |
| GB2497273B (en) | 2017-09-13 |
| KR102007549B1 (en) | 2019-10-21 |
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