FR2873045B1 - TREATMENT OF GASEOUS EFFLUENTS BY ATMOSPHERIC PRESSURE PLASMA - Google Patents

TREATMENT OF GASEOUS EFFLUENTS BY ATMOSPHERIC PRESSURE PLASMA

Info

Publication number
FR2873045B1
FR2873045B1 FR0451527A FR0451527A FR2873045B1 FR 2873045 B1 FR2873045 B1 FR 2873045B1 FR 0451527 A FR0451527 A FR 0451527A FR 0451527 A FR0451527 A FR 0451527A FR 2873045 B1 FR2873045 B1 FR 2873045B1
Authority
FR
France
Prior art keywords
treatment
atmospheric pressure
pressure plasma
gaseous effluents
effluents
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0451527A
Other languages
French (fr)
Other versions
FR2873045A1 (en
Inventor
Yassine Kabouzi
Michel Moisan
Jean Christophe Rostaing
Daniel Guerin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Priority to FR0451527A priority Critical patent/FR2873045B1/en
Priority to CN 200580023515 priority patent/CN101065182A/en
Priority to US11/571,652 priority patent/US20080234530A1/en
Priority to JP2007520867A priority patent/JP2008506516A/en
Priority to EP05789918A priority patent/EP1768776A2/en
Priority to PCT/FR2005/050555 priority patent/WO2006008421A2/en
Publication of FR2873045A1 publication Critical patent/FR2873045A1/en
Application granted granted Critical
Publication of FR2873045B1 publication Critical patent/FR2873045B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0869—Feeding or evacuating the reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0875—Gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treating Waste Gases (AREA)
FR0451527A 2004-07-13 2004-07-13 TREATMENT OF GASEOUS EFFLUENTS BY ATMOSPHERIC PRESSURE PLASMA Expired - Fee Related FR2873045B1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0451527A FR2873045B1 (en) 2004-07-13 2004-07-13 TREATMENT OF GASEOUS EFFLUENTS BY ATMOSPHERIC PRESSURE PLASMA
CN 200580023515 CN101065182A (en) 2004-07-13 2005-07-08 Atmospheric-pressure plasma treatment of gaseous effluents
US11/571,652 US20080234530A1 (en) 2004-07-13 2005-07-08 Atmospheric Pressure Plasma Treatment of Gaseous Effluents
JP2007520867A JP2008506516A (en) 2004-07-13 2005-07-08 Atmospheric pressure plasma treatment of gas emissions
EP05789918A EP1768776A2 (en) 2004-07-13 2005-07-08 Atmospheric-pressure plasma treatment of gaseous effluents
PCT/FR2005/050555 WO2006008421A2 (en) 2004-07-13 2005-07-08 Atmospheric-pressure plasma treatment of gaseous effluents

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0451527A FR2873045B1 (en) 2004-07-13 2004-07-13 TREATMENT OF GASEOUS EFFLUENTS BY ATMOSPHERIC PRESSURE PLASMA

Publications (2)

Publication Number Publication Date
FR2873045A1 FR2873045A1 (en) 2006-01-20
FR2873045B1 true FR2873045B1 (en) 2007-01-19

Family

ID=34949995

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0451527A Expired - Fee Related FR2873045B1 (en) 2004-07-13 2004-07-13 TREATMENT OF GASEOUS EFFLUENTS BY ATMOSPHERIC PRESSURE PLASMA

Country Status (2)

Country Link
CN (1) CN101065182A (en)
FR (1) FR2873045B1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2888130A1 (en) * 2005-07-06 2007-01-12 Air Liquide Electronics Sys Gas conversion by chemical bond cleavage in an electric and-or magnetic field, e.g. for treatment of fluorinated effluents from semiconductor production, involves injecting gas into the field in a non-rectilinear manner
GB2497273B (en) * 2011-11-19 2017-09-13 Edwards Ltd Apparatus for treating a gas stream
US10573496B2 (en) * 2014-12-09 2020-02-25 Applied Materials, Inc. Direct outlet toroidal plasma source

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5349154A (en) * 1991-10-16 1994-09-20 Rockwell International Corporation Diamond growth by microwave generated plasma flame
FR2751565B1 (en) * 1996-07-26 1998-09-04 Air Liquide PROCESS AND PLANT FOR THE TREATMENT OF PERFLUOROUS AND HYDROFLUOROCARBON GASES FOR THEIR DESTRUCTION
CA2410927A1 (en) * 2002-11-05 2004-05-05 Michel Petitclerc Electrically heated reactor for reforming in gaseous phase

Also Published As

Publication number Publication date
CN101065182A (en) 2007-10-31
FR2873045A1 (en) 2006-01-20

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20150331