SG11201401251TA - Slurry and method for producing slurry - Google Patents

Slurry and method for producing slurry

Info

Publication number
SG11201401251TA
SG11201401251TA SG11201401251TA SG11201401251TA SG11201401251TA SG 11201401251T A SG11201401251T A SG 11201401251TA SG 11201401251T A SG11201401251T A SG 11201401251TA SG 11201401251T A SG11201401251T A SG 11201401251TA SG 11201401251T A SG11201401251T A SG 11201401251TA
Authority
SG
Singapore
Prior art keywords
slurry
producing
producing slurry
Prior art date
Application number
SG11201401251TA
Other languages
English (en)
Inventor
Koji Kitagawa
Original Assignee
Shinetsu Handotai Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Handotai Kk filed Critical Shinetsu Handotai Kk
Publication of SG11201401251TA publication Critical patent/SG11201401251TA/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00Materials not provided for elsewhere
    • C09K3/14Anti-slip materials; Abrasives
    • C09K3/1454Abrasive powders, suspensions and pastes for polishing
    • C09K3/1472Non-aqueous liquid suspensions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/007Use, recovery or regeneration of abrasive mediums
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/06Grinders for cutting-off
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00Materials not provided for elsewhere
    • C09K3/14Anti-slip materials; Abrasives
    • C09K3/1409Abrasive particles per se
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00Materials not provided for elsewhere
    • C09K3/14Anti-slip materials; Abrasives
    • C09K3/1454Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463Aqueous liquid suspensions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304Mechanical treatment, e.g. grinding, polishing, cutting
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
SG11201401251TA 2011-10-27 2012-10-04 Slurry and method for producing slurry SG11201401251TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011235924A JP5594273B2 (ja) 2011-10-27 2011-10-27 スラリー及びスラリーの製造方法
PCT/JP2012/006377 WO2013061519A1 (ja) 2011-10-27 2012-10-04 スラリー及びスラリーの製造方法

Publications (1)

Publication Number Publication Date
SG11201401251TA true SG11201401251TA (en) 2014-08-28

Family

ID=48167376

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201401251TA SG11201401251TA (en) 2011-10-27 2012-10-04 Slurry and method for producing slurry

Country Status (8)

Country Link
US (1) US9260643B2 (ko)
JP (1) JP5594273B2 (ko)
KR (1) KR101887874B1 (ko)
CN (1) CN103906601B (ko)
DE (1) DE112012003990B4 (ko)
SG (1) SG11201401251TA (ko)
TW (1) TWI500478B (ko)
WO (1) WO2013061519A1 (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6432453B2 (ja) * 2015-06-23 2018-12-05 株式会社Sumco ワイヤーソー装置およびワークの切断方法
JP6604313B2 (ja) 2016-11-10 2019-11-13 株式会社Sumco 砥粒の評価方法並びにウェーハの製造方法
CN106914804A (zh) * 2017-03-28 2017-07-04 安庆机床有限公司 一体化磨球机
CN109530061B (zh) * 2018-12-07 2020-11-03 徐州徐薯薯业科技有限公司 小麦研磨装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1143923A (en) 1965-04-06 1969-02-26 Rank Xerox Ltd Improvements in polishing and polishing materials
JPS63114865A (ja) 1986-10-30 1988-05-19 Shin Etsu Chem Co Ltd 超精密研磨用研磨材
US6046110A (en) 1995-06-08 2000-04-04 Kabushiki Kaisha Toshiba Copper-based metal polishing solution and method for manufacturing a semiconductor device
JPH09314459A (ja) * 1996-05-29 1997-12-09 Sanyo Chem Ind Ltd 水性ラップ液組成物
US6602439B1 (en) * 1997-02-24 2003-08-05 Superior Micropowders, Llc Chemical-mechanical planarization slurries and powders and methods for using same
US6383991B1 (en) * 1998-04-03 2002-05-07 Kao Corporation Cutting oil composition
JP4248895B2 (ja) 2003-02-27 2009-04-02 Sumco Techxiv株式会社 スラリ再生方法及びワイヤソーシステム
JP2006224266A (ja) * 2005-02-18 2006-08-31 Sumco Corp ワイヤソーを用いたインゴット切断方法
JP5352872B2 (ja) * 2007-03-15 2013-11-27 国立大学法人宇都宮大学 研磨用複合粒子の製造方法
CN102369268A (zh) 2009-03-31 2012-03-07 出光兴产株式会社 脆性材料用加工液以及硬质材料用加工液
JP4605298B1 (ja) * 2009-07-03 2011-01-05 横浜ゴム株式会社 空気入りタイヤ
JP2011171689A (ja) * 2009-07-07 2011-09-01 Kao Corp シリコンウエハ用研磨液組成物
JP5499324B2 (ja) * 2010-04-28 2014-05-21 旭硝子株式会社 情報記録媒体用ガラス基板及びその製造のための研磨用コロイダルシリカスラリー、並びに情報記録媒体

Also Published As

Publication number Publication date
KR101887874B1 (ko) 2018-08-14
TW201336627A (zh) 2013-09-16
DE112012003990T5 (de) 2014-06-12
WO2013061519A1 (ja) 2013-05-02
JP5594273B2 (ja) 2014-09-24
TWI500478B (zh) 2015-09-21
KR20140103907A (ko) 2014-08-27
US9260643B2 (en) 2016-02-16
JP2013091141A (ja) 2013-05-16
CN103906601A (zh) 2014-07-02
CN103906601B (zh) 2017-06-20
US20150000208A1 (en) 2015-01-01
DE112012003990B4 (de) 2021-07-08

Similar Documents

Publication Publication Date Title
IL263389B (en) A method for the production of modified 5-fluoro-1h-pyrazolopyridines
ZA201401133B (en) Method for producing ternesite
EP2716662A4 (en) HYDROGEL AND METHOD FOR ITS MANUFACTURE
GB201101966D0 (en) Infrastructure equipmnet and method
EP2763933A4 (en) PROCESS FOR THE PREPARATION AND USE OF NANOPARTICLES
EP2674396A4 (en) PROCESS FOR THE PREPARATION OF GRAPHS AND GRAPHS
EP2722540A4 (en) STABILIZATION COMPOUND AND METHOD OF MANUFACTURING THEREOF
EP2719929A4 (en) SEAL AND METHOD FOR THEIR PRODUCTION
EP2537825A4 (en) PROCESS FOR PREPARING 1-AMINO-1-ALKOXYCARBONYL-2-VINYLCYCLOPROPANE
EP2689839A4 (en) PROCESS FOR PRODUCING MICROPARTICLES
SG10201604976RA (en) Hydroxy-aminopolymers and method for producing same
EP2722159A4 (en) STRUCTURE AND MANUFACTURING METHOD THEREFOR
SG11201400909WA (en) Composition and method for producing same
EP2844382A4 (en) PARTICLES AND METHOD FOR PRODUCING PARTICLES
EP2698159A4 (en) PITAVASTATE-CONTAINING PREPARATION AND METHOD OF MANUFACTURING THEREOF
EP2653481A4 (en) PROCESS FOR PRODUCING PSEUDOPOLYROTAXANE
EP2653482A4 (en) PROCESS FOR PRODUCING PSEUDOPOLYROTAXANE
EP2792640A4 (en) METHOD FOR THE PRODUCTION OF HIGH-PURITY CHLOROPOLYSILANE
EP2719767A4 (en) PROCESS FOR PRODUCTION OF POLYSACCHARIDE
EP2716765A4 (en) PROCESS FOR PRODUCING ACRYLAMIDE
HUP1100236A2 (en) Method for producing form pieces
SG11201401251TA (en) Slurry and method for producing slurry
IL231877A0 (en) A method for the production of dithiene tetracarboximides
GB201113168D0 (en) Method for producing particulate clusters
EP2796274A4 (en) FLAT THREAD AND METHOD FOR PRODUCING THE SAME