SG110090A1 - Actuator coil cooling system - Google Patents
Actuator coil cooling systemInfo
- Publication number
- SG110090A1 SG110090A1 SG200402069A SG200402069A SG110090A1 SG 110090 A1 SG110090 A1 SG 110090A1 SG 200402069 A SG200402069 A SG 200402069A SG 200402069 A SG200402069 A SG 200402069A SG 110090 A1 SG110090 A1 SG 110090A1
- Authority
- SG
- Singapore
- Prior art keywords
- cooling system
- coil cooling
- actuator coil
- actuator
- cooling
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K9/00—Arrangements for cooling or ventilating
- H02K9/19—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K3/00—Details of windings
- H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
- H02K3/24—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors with channels or ducts for cooling medium between the conductors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K5/00—Casings; Enclosures; Supports
- H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
- H02K5/20—Casings or enclosures characterised by the shape, form or construction thereof with channels or ducts for flow of cooling medium
- H02K5/203—Casings or enclosures characterised by the shape, form or construction thereof with channels or ducts for flow of cooling medium specially adapted for liquids, e.g. cooling jackets
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K9/00—Arrangements for cooling or ventilating
- H02K9/22—Arrangements for cooling or ventilating by solid heat conducting material embedded in, or arranged in contact with, the stator or rotor, e.g. heat bridges
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K9/00—Arrangements for cooling or ventilating
- H02K9/22—Arrangements for cooling or ventilating by solid heat conducting material embedded in, or arranged in contact with, the stator or rotor, e.g. heat bridges
- H02K9/227—Heat sinks
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K9/00—Arrangements for cooling or ventilating
- H02K9/22—Arrangements for cooling or ventilating by solid heat conducting material embedded in, or arranged in contact with, the stator or rotor, e.g. heat bridges
- H02K9/223—Heat bridges
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Public Health (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Toxicology (AREA)
- Atmospheric Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Linear Motors (AREA)
- Motor Or Generator Cooling System (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US46368803P | 2003-04-18 | 2003-04-18 | |
US10/680,290 US6946761B2 (en) | 2003-04-18 | 2003-10-08 | Actuator coil cooling system |
Publications (1)
Publication Number | Publication Date |
---|---|
SG110090A1 true SG110090A1 (en) | 2005-04-28 |
Family
ID=32912429
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200402069A SG110090A1 (en) | 2003-04-18 | 2004-04-16 | Actuator coil cooling system |
Country Status (7)
Country | Link |
---|---|
US (2) | US6946761B2 (ja) |
EP (1) | EP1469578A3 (ja) |
JP (1) | JP4142610B2 (ja) |
KR (1) | KR100623535B1 (ja) |
CN (1) | CN1284290C (ja) |
SG (1) | SG110090A1 (ja) |
TW (1) | TW200503388A (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8037853B2 (en) * | 2005-04-19 | 2011-10-18 | Len Development Services Usa, Llc | Internal combustion engine with electronic valve actuators and control system therefor |
TWI454859B (zh) * | 2006-03-30 | 2014-10-01 | 尼康股份有限公司 | 移動體裝置、曝光裝置與曝光方法以及元件製造方法 |
NL2003139A1 (nl) * | 2008-07-31 | 2010-02-02 | Asml Holding Nv | Cooling of actuator coils. |
CN101752958B (zh) * | 2010-01-18 | 2012-11-14 | 东元总合科技(杭州)有限公司 | 水冷电机及电机冷却方法 |
TWI477039B (zh) * | 2011-11-23 | 2015-03-11 | Delta Electronics Inc | 冷卻套 |
TWI455461B (zh) * | 2011-11-23 | 2014-10-01 | Delta Electronics Inc | 冷卻套 |
CN102882314B (zh) * | 2012-10-23 | 2015-12-02 | 哈尔滨工业大学 | 超精密直线电机的冷却结构 |
TWI488409B (zh) * | 2012-11-21 | 2015-06-11 | Ind Tech Res Inst | 定子模組及其磁力產生構件 |
DE102018213189A1 (de) * | 2018-08-07 | 2020-02-13 | Carl Zeiss Smt Gmbh | Verfahren zum Biegen von hydrogeformten Kühleinrichtungen und gebogene, hydrogeformte Kühleinrichtungen |
EP4312351A1 (en) * | 2022-07-28 | 2024-01-31 | Airbus Operations, S.L.U. | Improved internal cooling systems for e-machines |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB714391A (en) * | 1951-08-25 | 1954-08-25 | Bolinders Fabriks Ab | Improvements in cooling fins for heat exchanger tube coils |
US4874916A (en) * | 1986-01-17 | 1989-10-17 | Guthrie Canadian Investments Limited | Induction heating and melting systems having improved induction coils |
US4956626A (en) * | 1989-01-13 | 1990-09-11 | Sundstrand Corporation | Inductor transformer cooling apparatus |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US617716A (en) * | 1899-01-17 | Detachable chain | ||
US4760294A (en) * | 1982-09-13 | 1988-07-26 | Hansen Thomas C | Linear motor with independently controlled coils |
US5140204A (en) * | 1991-07-05 | 1992-08-18 | Westinghouse Electric Corp. | Heat pipes for cooling pole windings of salient pole machines |
KR100200872B1 (ko) * | 1996-01-09 | 1999-06-15 | 윤종용 | 광픽업장치용 액츄에이터 |
GB2343240A (en) * | 1998-10-26 | 2000-05-03 | Michael Ernest Saxby | Projectiles |
JP2000253623A (ja) | 1999-03-02 | 2000-09-14 | Nikon Corp | 電磁アクチュエータの冷却方法および電磁アクチュエータ |
JP3643273B2 (ja) * | 1999-10-28 | 2005-04-27 | 株式会社ソディック | リニアモータのコイル装置およびその製造方法 |
JP2002078314A (ja) * | 2000-08-24 | 2002-03-15 | Nikon Corp | 電機子ユニット、電磁アクチュエータ、ステージ装置、露光装置及びこれを用いたデバイスの製造方法 |
JP3750793B2 (ja) * | 2000-11-21 | 2006-03-01 | 株式会社安川電機 | リニアモータ |
US6617716B2 (en) * | 2000-12-14 | 2003-09-09 | Denso Corporation | Rotary electric machine having stator coolant passage means |
WO2002060037A1 (en) * | 2001-01-25 | 2002-08-01 | Koninklijke Philips Electronics N.V. | Coil with cooling means |
DE10114321A1 (de) * | 2001-03-23 | 2002-10-24 | Siemens Ag | Elektrische Maschine |
GB0111629D0 (en) * | 2001-05-11 | 2001-07-04 | Switched Reluctance Drives Ltd | Cooling of electrical machines |
-
2003
- 2003-10-08 US US10/680,290 patent/US6946761B2/en not_active Expired - Fee Related
-
2004
- 2004-04-16 SG SG200402069A patent/SG110090A1/en unknown
- 2004-04-16 TW TW093110706A patent/TW200503388A/zh unknown
- 2004-04-17 KR KR1020040026419A patent/KR100623535B1/ko not_active IP Right Cessation
- 2004-04-19 CN CNB2004100368170A patent/CN1284290C/zh not_active Expired - Fee Related
- 2004-04-19 JP JP2004123316A patent/JP4142610B2/ja not_active Expired - Fee Related
- 2004-04-19 EP EP04009239A patent/EP1469578A3/en not_active Withdrawn
-
2005
- 2005-06-17 US US11/154,669 patent/US7176593B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB714391A (en) * | 1951-08-25 | 1954-08-25 | Bolinders Fabriks Ab | Improvements in cooling fins for heat exchanger tube coils |
US4874916A (en) * | 1986-01-17 | 1989-10-17 | Guthrie Canadian Investments Limited | Induction heating and melting systems having improved induction coils |
US4956626A (en) * | 1989-01-13 | 1990-09-11 | Sundstrand Corporation | Inductor transformer cooling apparatus |
Also Published As
Publication number | Publication date |
---|---|
CN1284290C (zh) | 2006-11-08 |
JP4142610B2 (ja) | 2008-09-03 |
EP1469578A3 (en) | 2006-06-07 |
JP2004320998A (ja) | 2004-11-11 |
TW200503388A (en) | 2005-01-16 |
US7176593B2 (en) | 2007-02-13 |
US6946761B2 (en) | 2005-09-20 |
KR20040090930A (ko) | 2004-10-27 |
US20040207273A1 (en) | 2004-10-21 |
US20050231048A1 (en) | 2005-10-20 |
KR100623535B1 (ko) | 2006-09-19 |
EP1469578A2 (en) | 2004-10-20 |
CN1540839A (zh) | 2004-10-27 |
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