WO2002060037A1 - Coil with cooling means - Google Patents

Coil with cooling means Download PDF

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Publication number
WO2002060037A1
WO2002060037A1 PCT/IB2001/002680 IB0102680W WO02060037A1 WO 2002060037 A1 WO2002060037 A1 WO 2002060037A1 IB 0102680 W IB0102680 W IB 0102680W WO 02060037 A1 WO02060037 A1 WO 02060037A1
Authority
WO
WIPO (PCT)
Prior art keywords
coil
turns
conducting
foil
magnets
Prior art date
Application number
PCT/IB2001/002680
Other languages
French (fr)
Inventor
Theodorus H. J. Bisschops
Original Assignee
Koninklijke Philips Electronics N.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics N.V. filed Critical Koninklijke Philips Electronics N.V.
Priority to JP2002560258A priority Critical patent/JP4257118B2/en
Priority to EP01273472A priority patent/EP1356570A1/en
Publication of WO2002060037A1 publication Critical patent/WO2002060037A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F5/00—Coils
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
    • H02K3/24—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors with channels or ducts for cooling medium between the conductors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Definitions

  • the invention relates to a coil provided with current-conducting turns and with cooling means.
  • the invention also relates to an actuator in which such a coil is used.
  • Such cooled coils are generally known.
  • the heat removal from the turns may take place, for example, by means of a cooling channel through which a cooling liquid is pumped, see e.g. EP 0414927 and DE 331707, or by means of radiation plates as known from US 5,164,262.
  • the cooling effect of these coils is limited and certainly not ideal. The problem of the cooling is even greater if coils are used in high-power equipment. The removal of heat then becomes highly essential.
  • the coil according to the invention is for this purpose characterized in that the coil is provided with a number of heat-conducting foil turns whose edge portions are cooled by the cooling means. Providing the coil with heat-conducting foil turns and cooling the edge portions thereof leads to a good heat transport to the cooled edge portions.
  • the edge portions could be cooled, for example, by means of an air flow. It is more efficient, however, to connect the edge portions thermally to the cooling means, i.e. to provide a physical connection through which a sufficient heat flow can be conducted.
  • the cooling means used may be a cooling channel through which a cooling liquid is pumped. The edge portions of the foil turns must make good contact with a wall of the cooling channel.
  • the heat-conducting foil turns are at the same time the current-conducting turns.
  • the advantage of foil coils over wire coils is the greater filling factor of the current conductors, usually of copper, whereby a much higher efficiency is achieved.
  • Many foil turns are present in each foil coil, all contributing to a very good heat dissipation. It is nevertheless also possible to construct the current-conducting turns as electrically insulated wire turns, between which the heat-conducting turns extend.
  • the I-N characteristic can be better optimized with a wire- wound coil than with a foil- wound coil.
  • the cooled coils in accordance with the invention described above may be used in an actuator which is characterized by two systems of permanent N- and Z- magnets situated one above the other, between which the coil according to the invention is accommodated, the direction of a magnetic field generated by the magnets being perpendicular to the plane in which the foil turns are oriented, while the coil is movable with respect to the magnet systems in a direction parallel to the plane in which the foil turns are oriented.
  • High powers can be used in such an actuator, also denoted X-Y actuator.
  • the coil may be very flat, and the air gaps between the coil and the magnets can be small, so that a highly homogeneous magnetic field can be used.
  • the coils according to the invention may be used in an actuator which is characterized by one system of alternate permanent N- and Z-magnets above which a coil according to the invention is present, the direction of a magnetic field generated by the magnets being parallel to the plane in which the foil turns are oriented, while the coil is movable with respect to the system of magnets in a direction perpendicular to the plane in which the foil turns are oriented.
  • the actuators mentioned above may be used as a displacement device in a component placement machine for placing components on a printed circuit board, or in a lithographic device (wafer stepper) for manufacturing integrated circuits on a semiconductor substrate.
  • Fig. 1 shows a coil with a cooling channel in perspective view
  • Fig. 2 is a cross-sectional view of the coil of Fig. 1 taken on the line II-II,
  • Fig. 3 is a perspective view of an alternative embodiment of the coil of Fig. 1, Fig. 4 shows a detail of the coil of Fig. 3,
  • Fig. 5 shows an actuator in which the first embodiment of the coil is used
  • Fig. 6 shows an actuator in which the second embodiment of the coil is used.
  • Fig. 1 shows a flat coil 1 with current-conducting foil turns 2, a cooling channel 3 being provided around the coil.
  • the arrow I indicates a current direction.
  • a cooling liquid is pumped through the cooling channel, as indicated with an arrow F.
  • the coil is formed by a number of (copper) foil turns 4 which are separated from one another by insulation layers 5.
  • the ends 7 of the edge portions 6 of the turns are in contact with the wall 8 of the cooling channel 3.
  • the ends of the edges of the turns must not make contact with one another.
  • a heat-conducting epoxy layer may be provided on said ends, i.e. over the entire lateral side of the coil.
  • the heat generated in the coil flows through the (copper) foils 4 to the edge portions 6, as indicated by an arrow , because this is the coldest spot.
  • the current-conducting foil turns 2 in this example therefore, at the same time serve as the heat-conducting turns 4.
  • Figs. 3 and 4 show a coil with electrically insulated current wire turns 9.
  • a number of wire windings lie above one another in layers, said layers being separated from one another by heat-conducting (copper) foil turns 4.
  • the ends 7 of the edge portions 6 of these foil turns are thermally connected to a wall 8 of the cooling channel 3.
  • the foil turns now are allowed to make contact with one another.
  • the heat arising in the (copper) wire turns 9 is transported from the wire through the insulating layer to the foil turns 4, and then to the edge portions 6 thereof which adjoin the cooling channel 3, where cooling takes place.
  • said turns are interrupted as shown in Fig. 3 with the double line 10.
  • Fig. 5 shows an example of a Lorentz X-Y actuator 11.
  • the actuator is built up from two systems 12, 13 of N-Z magnets situated one above the other, a Z-magnet lying opposite an N-magnet each time.
  • a cooled coil 1, 3 as described above is present between the systems.
  • the coil is present in a homogeneous magnetic field.
  • the direction of the magnetic field through the coil is indicated with arrows M.
  • Closing plates for the magnetic circuit are referenced 14 and 15.
  • the foil turns 4 of the coil extend in a plane 16 perpendicular to the magnetic field M. The coil moves parallel to the plane 16 in which the foil turns 4 are oriented.
  • the actuator can be incorporated in equipment in a simple manner thanks to its flat, i.e. small dimensions. In practice, it may be either the coil or the magnets which form the moving part. If the magnets move, this has the advantage that the electrical connections and the tubing for the cooling need not move. This renders the actuator particularly suitable for use in a wafer stepper in which operations take place in vacuum.
  • Fig. 6 shows a second embodiment of an actuator 18 with a cooled coil 1, 3 according to the invention.
  • the actuator now consists of one system 19 of alternating N- and Z-magnets, with the coil arranged immediately above the magnets, a three-phase coil in this case.
  • the direction of the magnetic field M is parallel to the plane 20 in which the foil turns 4 are oriented.
  • a closing plate for the magnetic circuit is referenced 21.
  • the X- or Y- movement of the coil is perpendicular to the plane 20 of the turns.
  • the cooling channel 3 now lies at one side only of the coil 1, i.e. at that side where the edge portions 6 of the turns 4 face away from the system 19 of magnets.
  • the actuator is to be capable of performing an X- and Y-movement, the magnets must be arranged in a chessboard pattern, and at least a second coil is to be provided which is oriented perpendicularly to the first coil.

Abstract

The invention relates to a coil comprising current-conducting turns (2) and cooling means (3) for cooling the coil. To improve the cooling efficiency, the coil comprises a plurality of heat conducting foil turns (4). These foil turns can be thermally connected to a cooling channel with a cooling fluid. In a preferred embodiment, the heat-conducting foil turns (4) are also the current-conducting turns (2).

Description

Coil with cooling means
The invention relates to a coil provided with current-conducting turns and with cooling means. The invention also relates to an actuator in which such a coil is used.
Such cooled coils are generally known. The heat removal from the turns may take place, for example, by means of a cooling channel through which a cooling liquid is pumped, see e.g. EP 0414927 and DE 331707, or by means of radiation plates as known from US 5,164,262. The cooling effect of these coils, however, is limited and certainly not ideal. The problem of the cooling is even greater if coils are used in high-power equipment. The removal of heat then becomes highly essential.
It is an object of the invention to provide a coil with a very efficient cooling.
The coil according to the invention is for this purpose characterized in that the coil is provided with a number of heat-conducting foil turns whose edge portions are cooled by the cooling means. Providing the coil with heat-conducting foil turns and cooling the edge portions thereof leads to a good heat transport to the cooled edge portions.
The edge portions could be cooled, for example, by means of an air flow. It is more efficient, however, to connect the edge portions thermally to the cooling means, i.e. to provide a physical connection through which a sufficient heat flow can be conducted. The cooling means used may be a cooling channel through which a cooling liquid is pumped. The edge portions of the foil turns must make good contact with a wall of the cooling channel.
In a coil which is to be used by preference, the heat-conducting foil turns are at the same time the current-conducting turns. The advantage of foil coils over wire coils is the greater filling factor of the current conductors, usually of copper, whereby a much higher efficiency is achieved. Many foil turns are present in each foil coil, all contributing to a very good heat dissipation. It is nevertheless also possible to construct the current-conducting turns as electrically insulated wire turns, between which the heat-conducting turns extend. Depending on the application or the available control, the I-N characteristic can be better optimized with a wire- wound coil than with a foil- wound coil. In addition, the risk of eddy currents arising is smaller in wire-wound coils than in foil-wound coils. The air gaps and the insulation provide a considerable heat barrier in normal wire-wound coils. The provision of heat-conducting turns between the coil wires and cooling of the edge portions of said turns strongly improves the removal of heat. In this latter embodiment, it is useful and sometimes imperative that the heat-conducting turns should not form a closed circuit. This is to prevent the generation of undesirable eddy currents. This objective may be achieved in that the heat- conducting foil turns are interrupted.
Preferably, the cooled coils in accordance with the invention described above may be used in an actuator which is characterized by two systems of permanent N- and Z- magnets situated one above the other, between which the coil according to the invention is accommodated, the direction of a magnetic field generated by the magnets being perpendicular to the plane in which the foil turns are oriented, while the coil is movable with respect to the magnet systems in a direction parallel to the plane in which the foil turns are oriented. High powers can be used in such an actuator, also denoted X-Y actuator. The coil may be very flat, and the air gaps between the coil and the magnets can be small, so that a highly homogeneous magnetic field can be used.
In an alternative embodiment, the coils according to the invention may be used in an actuator which is characterized by one system of alternate permanent N- and Z-magnets above which a coil according to the invention is present, the direction of a magnetic field generated by the magnets being parallel to the plane in which the foil turns are oriented, while the coil is movable with respect to the system of magnets in a direction perpendicular to the plane in which the foil turns are oriented.
The actuators mentioned above may be used as a displacement device in a component placement machine for placing components on a printed circuit board, or in a lithographic device (wafer stepper) for manufacturing integrated circuits on a semiconductor substrate.
The invention will now be explained in more detail below with reference to a few embodiments shown in diagrammatic drawings, in which
Fig. 1 shows a coil with a cooling channel in perspective view,
Fig. 2 is a cross-sectional view of the coil of Fig. 1 taken on the line II-II,
Fig. 3 is a perspective view of an alternative embodiment of the coil of Fig. 1, Fig. 4 shows a detail of the coil of Fig. 3,
Fig. 5 shows an actuator in which the first embodiment of the coil is used, and Fig. 6 shows an actuator in which the second embodiment of the coil is used.
Fig. 1 shows a flat coil 1 with current-conducting foil turns 2, a cooling channel 3 being provided around the coil. The arrow I indicates a current direction. A cooling liquid is pumped through the cooling channel, as indicated with an arrow F. As Fig. 2 shows, the coil is formed by a number of (copper) foil turns 4 which are separated from one another by insulation layers 5. The ends 7 of the edge portions 6 of the turns are in contact with the wall 8 of the cooling channel 3. Obviously, the ends of the edges of the turns must not make contact with one another. To prevent this contact, a heat-conducting epoxy layer may be provided on said ends, i.e. over the entire lateral side of the coil. The heat generated in the coil flows through the (copper) foils 4 to the edge portions 6, as indicated by an arrow , because this is the coldest spot. The current-conducting foil turns 2 in this example, therefore, at the same time serve as the heat-conducting turns 4.
Figs. 3 and 4 show a coil with electrically insulated current wire turns 9. A number of wire windings lie above one another in layers, said layers being separated from one another by heat-conducting (copper) foil turns 4. The ends 7 of the edge portions 6 of these foil turns are thermally connected to a wall 8 of the cooling channel 3. Obviously, the foil turns now are allowed to make contact with one another. The heat arising in the (copper) wire turns 9 is transported from the wire through the insulating layer to the foil turns 4, and then to the edge portions 6 thereof which adjoin the cooling channel 3, where cooling takes place. To prevent undesirable eddy currents from arising in the heat-conducting foil turns, said turns are interrupted as shown in Fig. 3 with the double line 10.
Fig. 5 shows an example of a Lorentz X-Y actuator 11. The actuator is built up from two systems 12, 13 of N-Z magnets situated one above the other, a Z-magnet lying opposite an N-magnet each time. A cooled coil 1, 3 as described above is present between the systems. The coil is present in a homogeneous magnetic field. The direction of the magnetic field through the coil is indicated with arrows M. Closing plates for the magnetic circuit are referenced 14 and 15. The foil turns 4 of the coil extend in a plane 16 perpendicular to the magnetic field M. The coil moves parallel to the plane 16 in which the foil turns 4 are oriented. Since the coil can be so effectively cooled, as described above, it is possible to make the (air) gaps 17 between the coil and the magnets small, so that a strong and homogeneous magnetic field arises, which renders the actuator suitable for use at high powers. The actuator can be incorporated in equipment in a simple manner thanks to its flat, i.e. small dimensions. In practice, it may be either the coil or the magnets which form the moving part. If the magnets move, this has the advantage that the electrical connections and the tubing for the cooling need not move. This renders the actuator particularly suitable for use in a wafer stepper in which operations take place in vacuum.
Finally, Fig. 6 shows a second embodiment of an actuator 18 with a cooled coil 1, 3 according to the invention. The actuator now consists of one system 19 of alternating N- and Z-magnets, with the coil arranged immediately above the magnets, a three-phase coil in this case. The direction of the magnetic field M is parallel to the plane 20 in which the foil turns 4 are oriented. A closing plate for the magnetic circuit is referenced 21. The X- or Y- movement of the coil is perpendicular to the plane 20 of the turns. The cooling channel 3 now lies at one side only of the coil 1, i.e. at that side where the edge portions 6 of the turns 4 face away from the system 19 of magnets. If the actuator is to be capable of performing an X- and Y-movement, the magnets must be arranged in a chessboard pattern, and at least a second coil is to be provided which is oriented perpendicularly to the first coil.

Claims

CLAIMS:
1. A coil (1) provided with current-conducting turns (2) and with cooling means
(3), characterized in that the coil (1) is provided with a number of heat-conducting foil turns (4) of which edge portions (6) are cooled by the cooling means (3).
2. A coil as claimed in claim 1 , characterized in that the edge portions (6) are thermally connected to the cooling means (3).
3. A coil as claimed in claim 1 or 2, characterized in that the cooling means comprise a cooling channel (3) through which a cooling liquid flows.
4. A coil as claimed in claim 1, 2, or 3, characterized in that the heat-conducting foil turns (4) at the same time form the current-conducting turns (2).
5. A coil as claimed in claim 1, 2, or 3, characterized in that the current- conducting turns (2) are electrically insulated wire turns (9) between which the heat- conducting foil turns (4) are present.
6. A coil as claimed in claim 5, characterized in that the heat-conducting foil turns (4) have interruptions (10) for preventing eddy currents.
7. An actuator (11) provided with two systems (12, 13) of permanent N- and Z- magnets lying one above the other between which a coil (1) as claimed in any one of the claims 1 to 6 is present each time, wherein the direction of a magnetic field M generated by the magnets is perpendicular to the plane (16) in which the foil turns (4) are oriented, and the coil (1) is movable with respect to the systems (12, 13) of magnets in a direction parallel to the plane (16) in which the foil turns (4) are oriented.
8. An actuator (18) provided with a system (19) of alternating permanent N- and Z-magnets above which a coil (1) as claimed in any one of the claims 1 to 6 is present, wherein the direction of a magnetic field (M) generated by the magnets is parallel to the plane (20) in which the foil turns (4) are oriented, and the coil is movable with respect to the system of magnets in a direction (X,Y) which is perpendicular to the plane (20) in which the foil turns (4) are oriented.
PCT/IB2001/002680 2001-01-25 2001-12-19 Coil with cooling means WO2002060037A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2002560258A JP4257118B2 (en) 2001-01-25 2001-12-19 Coil with cooling means
EP01273472A EP1356570A1 (en) 2001-01-25 2001-12-19 Coil with cooling means

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP01200299.4 2001-01-25
EP01200299 2001-01-25

Publications (1)

Publication Number Publication Date
WO2002060037A1 true WO2002060037A1 (en) 2002-08-01

Family

ID=8179809

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2001/002680 WO2002060037A1 (en) 2001-01-25 2001-12-19 Coil with cooling means

Country Status (5)

Country Link
US (1) US6545377B2 (en)
EP (1) EP1356570A1 (en)
JP (1) JP4257118B2 (en)
KR (1) KR20030007477A (en)
WO (1) WO2002060037A1 (en)

Cited By (4)

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EP1372035A2 (en) * 2002-06-12 2003-12-17 ASML Netherlands B.V. Lithographic projection apparatus and device manufacturing method
EP1469578A2 (en) * 2003-04-18 2004-10-20 ASML Holding N.V. Actuator coil cooling system
DE102008052627A1 (en) * 2008-10-22 2010-04-29 Itk Dr. Kassen Gmbh Conductor assembly, method for their preparation and use of a conductor arrangement
CN103904804A (en) * 2012-12-28 2014-07-02 上海微电子装备有限公司 Coil unit for machine winding and planar motor using the coil unit

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JP4227452B2 (en) * 2002-12-27 2009-02-18 キヤノン株式会社 Positioning device and exposure apparatus using the positioning device
EP1457825A1 (en) * 2003-03-11 2004-09-15 ASML Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufactured thereby
EP1457827A1 (en) * 2003-03-11 2004-09-15 ASML Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufactured thereby
EP1457833B1 (en) * 2003-03-11 2012-05-30 ASML Netherlands B.V. Lithographic apparatus, device manufacturing method, and device manufactured thereby
EP1465014B1 (en) * 2003-03-11 2008-08-06 ASML Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufacturated thereby
US6992410B2 (en) * 2003-04-29 2006-01-31 Asm Technology Singapore Pte Ltd Cooling system for motors
NL2005236A (en) * 2009-09-16 2011-03-17 Asml Netherlands Bv Actuator, lithographic apparatus, and actuator constructing method.
KR20150128454A (en) * 2014-05-09 2015-11-18 주식회사 만도 Cooling structure for a motor
DE102017207659B4 (en) * 2017-05-08 2019-11-14 Audi Ag Electric machine and method for manufacturing an electric machine
DE102018115654A1 (en) * 2018-06-28 2020-01-02 Schaeffler Technologies AG & Co. KG Actively cooled coil
DE102019103541A1 (en) * 2018-07-06 2020-01-09 Hanon Systems Cooling module with axial fan for vehicles, especially for electric vehicles
CN110061606B (en) * 2019-05-28 2020-06-26 北京理工大学 High-power-density magnetic compression power generation mechanism and power generator comprising same

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US6084319A (en) * 1996-10-16 2000-07-04 Canon Kabushiki Kaisha Linear motor, and stage device and exposure apparatus provided with the same
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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1372035A2 (en) * 2002-06-12 2003-12-17 ASML Netherlands B.V. Lithographic projection apparatus and device manufacturing method
US6891600B2 (en) 2002-06-12 2005-05-10 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
SG121780A1 (en) * 2002-06-12 2006-05-26 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
EP1372035A3 (en) * 2002-06-12 2006-08-02 ASML Netherlands B.V. Lithographic projection apparatus and device manufacturing method
EP1469578A2 (en) * 2003-04-18 2004-10-20 ASML Holding N.V. Actuator coil cooling system
EP1469578A3 (en) * 2003-04-18 2006-06-07 ASML Holding N.V. Actuator coil cooling system
US7176593B2 (en) 2003-04-18 2007-02-13 Asml Holding N.V. Actuator coil cooling system
DE102008052627A1 (en) * 2008-10-22 2010-04-29 Itk Dr. Kassen Gmbh Conductor assembly, method for their preparation and use of a conductor arrangement
CN103904804A (en) * 2012-12-28 2014-07-02 上海微电子装备有限公司 Coil unit for machine winding and planar motor using the coil unit

Also Published As

Publication number Publication date
KR20030007477A (en) 2003-01-23
JP2004518395A (en) 2004-06-17
US20020096946A1 (en) 2002-07-25
JP4257118B2 (en) 2009-04-22
EP1356570A1 (en) 2003-10-29
US6545377B2 (en) 2003-04-08

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