SG105006A1 - Method for controlling queue time constraints in a fabrication facility - Google Patents

Method for controlling queue time constraints in a fabrication facility

Info

Publication number
SG105006A1
SG105006A1 SG200303051A SG200303051A SG105006A1 SG 105006 A1 SG105006 A1 SG 105006A1 SG 200303051 A SG200303051 A SG 200303051A SG 200303051 A SG200303051 A SG 200303051A SG 105006 A1 SG105006 A1 SG 105006A1
Authority
SG
Singapore
Prior art keywords
time constraints
fabrication facility
queue time
controlling queue
controlling
Prior art date
Application number
SG200303051A
Other languages
English (en)
Inventor
Huang Liang-Kai
Lu Span
You Ren-Chyi
Hsu Kuang-Huan
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Publication of SG105006A1 publication Critical patent/SG105006A1/en

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling

Landscapes

  • Engineering & Computer Science (AREA)
  • Business, Economics & Management (AREA)
  • Human Resources & Organizations (AREA)
  • Strategic Management (AREA)
  • Economics (AREA)
  • Entrepreneurship & Innovation (AREA)
  • Educational Administration (AREA)
  • Game Theory and Decision Science (AREA)
  • Development Economics (AREA)
  • Marketing (AREA)
  • Operations Research (AREA)
  • Quality & Reliability (AREA)
  • Tourism & Hospitality (AREA)
  • Physics & Mathematics (AREA)
  • General Business, Economics & Management (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • General Factory Administration (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
SG200303051A 2002-11-07 2003-05-30 Method for controlling queue time constraints in a fabrication facility SG105006A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/290,006 US6647307B1 (en) 2002-11-07 2002-11-07 Method for controlling queue time constraints in a fabrication facility

Publications (1)

Publication Number Publication Date
SG105006A1 true SG105006A1 (en) 2004-07-30

Family

ID=29401160

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200303051A SG105006A1 (en) 2002-11-07 2003-05-30 Method for controlling queue time constraints in a fabrication facility

Country Status (4)

Country Link
US (1) US6647307B1 (zh)
CN (1) CN1287419C (zh)
SG (1) SG105006A1 (zh)
TW (1) TWI257119B (zh)

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JP2004094900A (ja) * 2002-07-09 2004-03-25 National Institute Of Advanced Industrial & Technology 生産計画作成システム及び方法、並びにプログラム
US7167767B2 (en) * 2003-08-22 2007-01-23 Ged Integrated Solutions, Inc. Glass production sequencing
US7426420B2 (en) * 2003-09-15 2008-09-16 International Business Machines Corporation System for dispatching semiconductors lots
US7463939B1 (en) * 2004-11-18 2008-12-09 Advanced Micro Devices, Inc. Scheduling tools with queue time constraints
US20070225848A1 (en) * 2006-03-24 2007-09-27 Taiwan Semiconductor Manufacturing Company, Ltd. Method and System for Providing Automatic and Accurate Manufacturing Delivery Schedule
US7369911B1 (en) * 2007-01-10 2008-05-06 International Business Machines Corporation Methods, systems, and computer program products for managing movement of work-in-process materials in an automated manufacturing environment
US7937177B2 (en) * 2007-06-27 2011-05-03 International Business Machines Corporation Manufacturing work in process management system
US8005560B2 (en) * 2007-10-18 2011-08-23 International Business Machines Corporation Method of optimizing queue times in a production cycle
CN101644923B (zh) * 2008-08-04 2012-05-23 中芯国际集成电路制造(上海)有限公司 生产流程控制方法及系统
US7897434B2 (en) * 2008-08-12 2011-03-01 International Business Machines Corporation Methods of fabricating solar cell chips
TWI385589B (zh) * 2009-03-17 2013-02-11 Univ Nat Taiwan Science Tech 面板業之多目標產能規劃系統與方法
US8041451B2 (en) * 2009-04-21 2011-10-18 Taiwan Semiconductor Manufacturing Company, Ltd. Method for bin-based control
US8452437B2 (en) * 2009-11-10 2013-05-28 International Business Machines Corporation Product release control into time-sensitive processing environments
CN102768941B (zh) * 2011-05-05 2015-01-28 中芯国际集成电路制造(上海)有限公司 一种批处理机台派货的方法和装置
CN103064380B (zh) * 2012-12-20 2016-06-08 上海华虹宏力半导体制造有限公司 具有多台工艺设备的制造系统的派工方法
CN103077882B (zh) * 2013-01-10 2017-03-15 无锡华润上华科技有限公司 一种改善晶片良率的工艺控制方法和系统
CN104021499B (zh) * 2013-03-01 2018-03-09 中芯国际集成电路制造(上海)有限公司 半导体制造控制方法
US20140289099A1 (en) * 2013-03-15 2014-09-25 Mortgage Research Center, Llc Loan status monitoring system and method
CN103345666B (zh) * 2013-06-04 2016-06-08 上海华力微电子有限公司 Ye区域扫描机台的派工方法
CN103413771B (zh) * 2013-06-04 2016-01-27 上海华力微电子有限公司 晶圆可接受测试机台的派工方法
CN103646891B (zh) * 2013-11-29 2016-09-07 上海华力微电子有限公司 晶圆派工方法
CN104977903B (zh) * 2014-04-03 2018-09-07 中芯国际集成电路制造(上海)有限公司 基于实时派工系统的机台组下的晶圆批次派工方法和系统
CN105096021B (zh) * 2014-05-23 2019-06-04 中芯国际集成电路制造(上海)有限公司 一种追踪半导体产品队列时间的系统及方法
CN105302078B (zh) * 2014-06-04 2018-11-16 中芯国际集成电路制造(上海)有限公司 一种半导体制造工艺中炉管机台运行的控制系统及方法
CN105448786B (zh) * 2014-06-13 2018-07-10 中芯国际集成电路制造(上海)有限公司 一种晶圆盒组件、系统及监控晶圆制程的方法
CN105446281B (zh) 2014-09-01 2019-04-26 中芯国际集成电路制造(上海)有限公司 工艺腔室的派货方法和系统
CN105652812B (zh) * 2014-11-12 2018-11-16 中芯国际集成电路制造(上海)有限公司 一种针对特殊批次货物进行预排程的系统及其方法
CN105988443B (zh) * 2015-02-27 2019-01-08 中芯国际集成电路制造(上海)有限公司 用于具有时间间隔限制的制造流程处理方法及装置
CN106033217B (zh) * 2015-03-18 2019-01-08 中芯国际集成电路制造(上海)有限公司 派工系统及派工方法
CN106469230A (zh) * 2015-08-19 2017-03-01 北大方正集团有限公司 一种非作业时间长度确定方法及其系统
WO2019104264A1 (en) * 2017-11-27 2019-05-31 Weiping Shi Control product flow of semiconductor manufacture process under time constraints
CN110164803B (zh) * 2019-06-23 2021-04-09 郑州工业应用技术学院 一种释放机台程式的方法及系统
CN113762797B (zh) * 2021-09-14 2023-10-24 长鑫存储技术有限公司 晶圆制备的控制方法及其装置
CN116544152A (zh) * 2023-07-06 2023-08-04 粤芯半导体技术股份有限公司 半导体机台组的投片量控制方法和装置

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US5612886A (en) 1995-05-12 1997-03-18 Taiwan Semiconductor Manufacturing Company Ltd. Method and system for dynamic dispatching in semiconductor manufacturing plants
US5751580A (en) 1996-07-26 1998-05-12 Chartered Semiconductor Manufacturing, Ltd. Fuzzy logic method and system for adjustment of priority rating of work in process in a production line
US5818716A (en) 1996-10-18 1998-10-06 Taiwan Semiconductor Manufacturing Company Ltd. Dynamic lot dispatching required turn rate factory control system and method of operation thereof
US5928389A (en) 1996-10-21 1999-07-27 Applied Materials, Inc. Method and apparatus for priority based scheduling of wafer processing within a multiple chamber semiconductor wafer processing tool
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US5825650A (en) 1997-03-11 1998-10-20 Taiwan Semiconductor Manufacturing Co., Ltd. Method for determining standard cycle time of a stage dynamically
US5841677A (en) 1997-05-21 1998-11-24 Taiwan Semiconductor Manufacturing Co., Ltd. Method and apparatus for dispatching lots in a factory
US6263253B1 (en) 1998-11-24 2001-07-17 Taiwan Semiconductor Manufacturing Co., Ltd. Method for allocating bottleneck resources
US6356797B1 (en) 1999-01-04 2002-03-12 Taiwan Semiconductor Manufacturing Co., Ltd. Method for automatic scheduling of production plan
US6353769B1 (en) 1999-03-22 2002-03-05 Taiwan Semiconductor Manufacturing Company Method for allocating lot priority by ranking lots as a function of budget queue time in a manufacturing control system
US6415260B1 (en) 1999-04-21 2002-07-02 Taiwan Semiconductor Manufacturing Co., Ltd Dynamic capacity demand forecast system
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US6463346B1 (en) * 1999-10-08 2002-10-08 Avaya Technology Corp. Workflow-scheduling optimization driven by target completion time
US6480756B1 (en) * 1999-10-12 2002-11-12 Taiwan Semiconductor Manufacturing Co., Ltd. Real-time monitor mechanism for heterogeneous production lines

Also Published As

Publication number Publication date
CN1499570A (zh) 2004-05-26
US6647307B1 (en) 2003-11-11
TW200407949A (en) 2004-05-16
TWI257119B (en) 2006-06-21
CN1287419C (zh) 2006-11-29

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