SG10201908830SA - Pre-alignment apparatus and method - Google Patents

Pre-alignment apparatus and method

Info

Publication number
SG10201908830SA
SG10201908830SA SG10201908830SA SG10201908830SA SG10201908830SA SG 10201908830S A SG10201908830S A SG 10201908830SA SG 10201908830S A SG10201908830S A SG 10201908830SA SG 10201908830S A SG10201908830S A SG 10201908830SA SG 10201908830S A SG10201908830S A SG 10201908830SA
Authority
SG
Singapore
Prior art keywords
alignment apparatus
alignment
Prior art date
Application number
SG10201908830SA
Inventor
Gang Wang
Hongyan Fu
Hai Xia
Xinxin Wang
Wenshu Chen
Original Assignee
Shanghai Micro Electronics Equipment Group Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Micro Electronics Equipment Group Co Ltd filed Critical Shanghai Micro Electronics Equipment Group Co Ltd
Publication of SG10201908830SA publication Critical patent/SG10201908830SA/en

Links

SG10201908830SA 2018-09-21 2019-09-23 Pre-alignment apparatus and method SG10201908830SA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811110623.9A CN110943021B (en) 2018-09-21 2018-09-21 Pre-alignment device and method

Publications (1)

Publication Number Publication Date
SG10201908830SA true SG10201908830SA (en) 2020-04-29

Family

ID=69905509

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201908830SA SG10201908830SA (en) 2018-09-21 2019-09-23 Pre-alignment apparatus and method

Country Status (3)

Country Link
CN (1) CN110943021B (en)
SG (1) SG10201908830SA (en)
TW (1) TWI707426B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111785659B (en) * 2020-05-25 2021-04-06 杭州长川科技股份有限公司 Wafer pre-alignment and wafer ID reading method and device and computer equipment
WO2022153774A1 (en) * 2021-01-15 2022-07-21 東レエンジニアリング株式会社 Wafer holding device
CN115140549A (en) * 2022-03-14 2022-10-04 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） Transfer mechanism and equipment
CN117012691A (en) * 2022-04-29 2023-11-07 上海微电子装备（集团）股份有限公司 Sucker assembly, silicon wafer adsorption device, exposure equipment and warpage silicon wafer adsorption method
CN117471865B (en) * 2023-11-03 2024-04-30 江苏雷博微电子设备有限公司 Silicon wafer placement device for prealignment system of photoetching machine

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1059540A (en) * 1996-05-13 1998-03-03 Ebara Corp Substrate clamping device
JP4552222B2 (en) * 2001-09-21 2010-09-29 ムラテックオートメーション株式会社 Wafer aligner
JP2003303876A (en) * 2002-04-10 2003-10-24 Seiko Instruments Inc Semiconductor wafer holding mechanism of sample stage
JP2008103544A (en) * 2006-10-19 2008-05-01 Yaskawa Electric Corp Aligner apparatus
US8911554B2 (en) * 2010-01-05 2014-12-16 Applied Materials, Inc. System for batch processing of magnetic media
CN103199033B (en) * 2012-01-05 2016-03-23 沈阳新松机器人自动化股份有限公司 For the whirligig of prealignment machine
CN103811388A (en) * 2012-11-08 2014-05-21 沈阳新松机器人自动化股份有限公司 Two-station wafer pre-alignment device
CN103489818B (en) * 2013-10-14 2016-04-20 北京自动化技术研究院 A kind of silicon wafer pre-alignment device
CN105336654B (en) * 2014-07-29 2017-12-29 上海微电子装备（集团）股份有限公司 A kind of prealignment device for adapting to kinds of processes type silicon chip
US10276418B2 (en) * 2013-12-31 2019-04-30 Shanghai Micro Electronics Equipment (Group) Co., Ltd. Silicon wafer pre-alignment device and method therefor
CN105632971B (en) * 2014-11-26 2019-06-25 上海微电子装备（集团）股份有限公司 A kind of silicon wafer processing unit and method
CN108461440B (en) * 2018-03-30 2024-04-05 上海新创达半导体设备技术有限公司 Wafer centering device and method

Also Published As

Publication number Publication date
TW202013579A (en) 2020-04-01
CN110943021B (en) 2022-05-31
CN110943021A (en) 2020-03-31
TWI707426B (en) 2020-10-11

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