SG10201504586WA - Carrier having locking mechanism for holding substrates - Google Patents

Carrier having locking mechanism for holding substrates

Info

Publication number
SG10201504586WA
SG10201504586WA SG10201504586WA SG10201504586WA SG10201504586WA SG 10201504586W A SG10201504586W A SG 10201504586WA SG 10201504586W A SG10201504586W A SG 10201504586WA SG 10201504586W A SG10201504586W A SG 10201504586WA SG 10201504586W A SG10201504586W A SG 10201504586WA
Authority
SG
Singapore
Prior art keywords
carrier
locking mechanism
holding substrates
substrates
holding
Prior art date
Application number
SG10201504586WA
Inventor
Venkatesappa Prakash
Shiao Loong Tang
Juntao Yang
Ariel Hontiveros
Original Assignee
Apple Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Apple Inc filed Critical Apple Inc
Priority to SG10201504586WA priority Critical patent/SG10201504586WA/en
Priority to CN201510698376.9A priority patent/CN106252264A/en
Publication of SG10201504586WA publication Critical patent/SG10201504586WA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
SG10201504586WA 2015-06-10 2015-06-10 Carrier having locking mechanism for holding substrates SG10201504586WA (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
SG10201504586WA SG10201504586WA (en) 2015-06-10 2015-06-10 Carrier having locking mechanism for holding substrates
CN201510698376.9A CN106252264A (en) 2015-06-10 2015-10-26 For keeping the carrier with locking mechanism of substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG10201504586WA SG10201504586WA (en) 2015-06-10 2015-06-10 Carrier having locking mechanism for holding substrates

Publications (1)

Publication Number Publication Date
SG10201504586WA true SG10201504586WA (en) 2016-09-29

Family

ID=56991071

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201504586WA SG10201504586WA (en) 2015-06-10 2015-06-10 Carrier having locking mechanism for holding substrates

Country Status (2)

Country Link
CN (1) CN106252264A (en)
SG (1) SG10201504586WA (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6581278B2 (en) * 2001-01-16 2003-06-24 St Assembly Test Service Ltd. Process and support carrier for flexible substrates
JP4613367B2 (en) * 2004-08-30 2011-01-19 スパンション エルエルシー Carrier structure for stacked semiconductor device, manufacturing method thereof, and manufacturing method of stacked semiconductor device
MY152429A (en) * 2009-08-18 2014-09-30 Multitest Elektronische Syst Carrier for aligning electronic components with slidably arranged plates
CN202384308U (en) * 2011-07-11 2012-08-15 诺发系统有限公司 Carrier adapter used for semiconductor wafer disposition

Also Published As

Publication number Publication date
CN106252264A (en) 2016-12-21

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