SG10201501104QA - Universal process carrier for substrates - Google Patents

Universal process carrier for substrates

Info

Publication number
SG10201501104QA
SG10201501104QA SG10201501104QA SG10201501104QA SG10201501104QA SG 10201501104Q A SG10201501104Q A SG 10201501104QA SG 10201501104Q A SG10201501104Q A SG 10201501104QA SG 10201501104Q A SG10201501104Q A SG 10201501104QA SG 10201501104Q A SG10201501104Q A SG 10201501104QA
Authority
SG
Singapore
Prior art keywords
substrates
process carrier
universal process
universal
carrier
Prior art date
Application number
SG10201501104QA
Inventor
Howell John Chua Toc
Annabelle Q Yang
Steven Webster
Original Assignee
Apple Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Apple Inc filed Critical Apple Inc
Publication of SG10201501104QA publication Critical patent/SG10201501104QA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67333—Trays for chips
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49998—Work holding

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
SG10201501104QA 2014-02-13 2015-02-12 Universal process carrier for substrates SG10201501104QA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14/179,777 US20150228517A1 (en) 2014-02-13 2014-02-13 Universal process carrier for substrates

Publications (1)

Publication Number Publication Date
SG10201501104QA true SG10201501104QA (en) 2015-09-29

Family

ID=53775558

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201501104QA SG10201501104QA (en) 2014-02-13 2015-02-12 Universal process carrier for substrates

Country Status (3)

Country Link
US (1) US20150228517A1 (en)
CN (2) CN104851828A (en)
SG (1) SG10201501104QA (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015113956B4 (en) * 2015-08-24 2024-03-07 Meyer Burger (Germany) Gmbh Substrate carrier
WO2017180866A1 (en) * 2016-04-15 2017-10-19 Michaelis A John Maintaining alignment while turning over a panel
WO2020242611A1 (en) 2019-05-24 2020-12-03 Applied Materials, Inc. System and method for aligning a mask with a substrate
US11189516B2 (en) 2019-05-24 2021-11-30 Applied Materials, Inc. Method for mask and substrate alignment
CN110379758B (en) * 2019-07-05 2021-02-02 深超光电（深圳）有限公司 Adsorption device, transfer system and transfer method
US11756816B2 (en) 2019-07-26 2023-09-12 Applied Materials, Inc. Carrier FOUP and a method of placing a carrier
US11196360B2 (en) 2019-07-26 2021-12-07 Applied Materials, Inc. System and method for electrostatically chucking a substrate to a carrier
US10916464B1 (en) 2019-07-26 2021-02-09 Applied Materials, Inc. Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6581278B2 (en) * 2001-01-16 2003-06-24 St Assembly Test Service Ltd. Process and support carrier for flexible substrates
US7402893B2 (en) * 2003-11-21 2008-07-22 Texas Instruments Incorporated System and method for improved auto-boating
JP4613367B2 (en) * 2004-08-30 2011-01-19 スパンション エルエルシー Carrier structure for stacked semiconductor device, manufacturing method thereof, and manufacturing method of stacked semiconductor device
CN202384308U (en) * 2011-07-11 2012-08-15 诺发系统有限公司 Carrier adapter used for semiconductor wafer disposition

Also Published As

Publication number Publication date
CN204632730U (en) 2015-09-09
US20150228517A1 (en) 2015-08-13
CN104851828A (en) 2015-08-19

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