SG10201501193YA - Polishing apparatus - Google Patents
Polishing apparatusInfo
- Publication number
- SG10201501193YA SG10201501193YA SG10201501193YA SG10201501193YA SG10201501193YA SG 10201501193Y A SG10201501193Y A SG 10201501193YA SG 10201501193Y A SG10201501193Y A SG 10201501193YA SG 10201501193Y A SG10201501193Y A SG 10201501193YA SG 10201501193Y A SG10201501193Y A SG 10201501193YA
- Authority
- SG
- Singapore
- Prior art keywords
- polishing apparatus
- polishing
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014031488A JP6393489B2 (en) | 2014-02-21 | 2014-02-21 | Polishing equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201501193YA true SG10201501193YA (en) | 2015-09-29 |
Family
ID=53905159
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201501193YA SG10201501193YA (en) | 2014-02-21 | 2015-02-16 | Polishing apparatus |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6393489B2 (en) |
KR (1) | KR102172963B1 (en) |
CN (1) | CN104858772B (en) |
SG (1) | SG10201501193YA (en) |
TW (1) | TWI647067B (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6704244B2 (en) * | 2015-12-03 | 2020-06-03 | 株式会社ディスコ | Polishing equipment |
CN105619236A (en) * | 2016-01-08 | 2016-06-01 | 哈尔滨秋冠光电科技有限公司 | High-speed machining and automatic measuring integrated equipment |
CN108067959A (en) * | 2016-11-10 | 2018-05-25 | 天津市昊航复合管业有限公司 | Temperature quickly cooling device in a kind of composite steel tube bruting process |
JP2019102687A (en) * | 2017-12-05 | 2019-06-24 | 株式会社ディスコ | Polishing device |
JP7031491B2 (en) * | 2018-05-22 | 2022-03-08 | 株式会社Sumco | Work double-sided polishing device and double-sided polishing method |
DE102018121626A1 (en) * | 2018-09-05 | 2020-03-05 | Rud. Starcke Gmbh & Co. Kg | Polishing device |
CN109015344A (en) * | 2018-09-25 | 2018-12-18 | 天通银厦新材料有限公司 | A kind of sapphire substrate grinding device |
CN111283548B (en) * | 2018-12-07 | 2023-07-18 | 株式会社迪思科 | Method for machining disc-shaped workpiece |
CN110039379B (en) * | 2019-03-20 | 2021-04-13 | 洛阳市精科主轴有限公司 | Ultra-precise grinding temperature compensation instrument and grinding process |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2688490B2 (en) * | 1988-05-18 | 1997-12-10 | 東芝機械株式会社 | Method and apparatus for measuring profile of plastic sheet |
JPH05209723A (en) * | 1992-01-29 | 1993-08-20 | Mitsui Toatsu Chem Inc | Method for measuring thickness of transparent sheet |
US6709981B2 (en) * | 2000-08-16 | 2004-03-23 | Memc Electronic Materials, Inc. | Method and apparatus for processing a semiconductor wafer using novel final polishing method |
JP2005203729A (en) | 2003-12-19 | 2005-07-28 | Ebara Corp | Substrate polishing apparatus |
JP4631021B2 (en) * | 2004-03-12 | 2011-02-16 | 株式会社ディスコ | Polishing equipment |
EP1758711B1 (en) * | 2004-06-21 | 2013-08-07 | Ebara Corporation | Polishing apparatus and polishing method |
JP5443180B2 (en) * | 2010-01-13 | 2014-03-19 | 株式会社ディスコ | Thickness detection device and grinding machine |
JP5517698B2 (en) * | 2010-03-30 | 2014-06-11 | 株式会社ディスコ | Polishing equipment |
JP2011224758A (en) | 2010-04-22 | 2011-11-10 | Disco Corp | Polishing method |
JP5752961B2 (en) | 2011-03-11 | 2015-07-22 | 株式会社ディスコ | Measuring device |
CN102423872A (en) * | 2011-12-07 | 2012-04-25 | 深圳深爱半导体股份有限公司 | Method for polishing silicon chip |
-
2014
- 2014-02-21 JP JP2014031488A patent/JP6393489B2/en active Active
-
2015
- 2015-01-06 TW TW104100292A patent/TWI647067B/en active
- 2015-02-09 KR KR1020150019226A patent/KR102172963B1/en active IP Right Grant
- 2015-02-15 CN CN201510081241.8A patent/CN104858772B/en active Active
- 2015-02-16 SG SG10201501193YA patent/SG10201501193YA/en unknown
Also Published As
Publication number | Publication date |
---|---|
KR102172963B1 (en) | 2020-11-02 |
TW201536478A (en) | 2015-10-01 |
CN104858772A (en) | 2015-08-26 |
CN104858772B (en) | 2019-09-06 |
JP2015155136A (en) | 2015-08-27 |
KR20150099420A (en) | 2015-08-31 |
JP6393489B2 (en) | 2018-09-19 |
TWI647067B (en) | 2019-01-11 |
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