SG10201403901SA - Systems And Methods For Measuring High-Intensity Light Beams - Google Patents

Systems And Methods For Measuring High-Intensity Light Beams

Info

Publication number
SG10201403901SA
SG10201403901SA SG10201403901SA SG10201403901SA SG10201403901SA SG 10201403901S A SG10201403901S A SG 10201403901SA SG 10201403901S A SG10201403901S A SG 10201403901SA SG 10201403901S A SG10201403901S A SG 10201403901SA SG 10201403901S A SG10201403901S A SG 10201403901SA
Authority
SG
Singapore
Prior art keywords
systems
methods
light beams
intensity light
measuring high
Prior art date
Application number
SG10201403901SA
Other languages
English (en)
Inventor
Anikitchev Sergeui
Gaines David
Original Assignee
Ultratech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ultratech Inc filed Critical Ultratech Inc
Publication of SG10201403901SA publication Critical patent/SG10201403901SA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0414—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using plane or convex mirrors, parallel phase plates, or plane beam-splitters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0477—Prisms, wedges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/108—Beam splitting or combining systems for sampling a portion of a beam or combining a small beam in a larger one, e.g. wherein the area ratio or power ratio of the divided beams significantly differs from unity, without spectral selectivity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/04—Prisms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J2001/0481—Preset integrating sphere or cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G01J2001/4261—Scan through beam in order to obtain a cross-sectional profile of the beam

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
SG10201403901SA 2013-07-29 2014-07-07 Systems And Methods For Measuring High-Intensity Light Beams SG10201403901SA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/953,423 US8988674B2 (en) 2013-07-29 2013-07-29 Systems and methods for measuring high-intensity light beams

Publications (1)

Publication Number Publication Date
SG10201403901SA true SG10201403901SA (en) 2015-02-27

Family

ID=52390255

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201403901SA SG10201403901SA (en) 2013-07-29 2014-07-07 Systems And Methods For Measuring High-Intensity Light Beams

Country Status (6)

Country Link
US (1) US8988674B2 (zh)
JP (1) JP5774754B2 (zh)
KR (1) KR20150014370A (zh)
CN (1) CN104501946B (zh)
SG (1) SG10201403901SA (zh)
TW (1) TWI493159B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6964517B2 (ja) * 2015-03-29 2021-11-10 住友化学株式会社 積層基板の測定方法
US10612976B1 (en) * 2015-10-06 2020-04-07 J.A. Woollan Co., Inc. Systems and methods for producing a more uniform intensity wavelength dispersed beam of electromagnetic radiation entering a multi-element detector, while maintaining information content therein
CN107367516B (zh) * 2017-07-19 2020-08-04 武汉华星光电半导体显示技术有限公司 一种涂布检测修复装置及其方法
US10527920B1 (en) * 2018-06-14 2020-01-07 Dhpc Technologies, Inc. System, method and device for a high fidelity electro-optical simulator
US10613426B1 (en) * 2018-06-14 2020-04-07 Dhpc Technologies, Inc. System, method and device for a long range, real size weapon systems plume simulator for testing optical detection devices in the field
US11774323B1 (en) 2021-03-25 2023-10-03 Dhpc Technologies, Inc. System and method for creating a collimated space for a high fidelity simulator

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US3704934A (en) 1971-08-16 1972-12-05 Union Carbide Corp Laser polarizing beam splitter
US4333173A (en) * 1979-06-15 1982-06-01 Hitachi, Ltd. Optical information processor with prismatic correction of laser beam shape
US4342050A (en) 1980-09-29 1982-07-27 Xerox Corporation Beam intensity measurement system for raster scanners
GB2120779B (en) * 1982-03-31 1985-10-09 Komatsu Mfg Co Ltd Quantitative analysis in accordance with cars
US4565426A (en) 1983-05-02 1986-01-21 Cullen Ralph A W Beam splitter
JPS6259820A (ja) * 1985-09-11 1987-03-16 Mitsubishi Electric Corp ビ−ムモ−ドプロフアイラ
US4711526A (en) 1986-07-07 1987-12-08 Coherent, Inc. Attenuating beam splitter
JPS63100333A (ja) * 1986-10-17 1988-05-02 Mitsubishi Electric Corp レ−ザエネルギ−検出装置
DE3706271A1 (de) 1987-02-26 1988-09-08 Erwin Strigl Vorrichtung zum messen des intensitaetsprofils eines laserstrahls
US4797555A (en) 1987-05-28 1989-01-10 The United States Of America As Represented By The Secretary Of The Air Force High energy laser target plate
US4828384A (en) 1987-12-03 1989-05-09 Westinghouse Electric Corp. High power laser beam intensity mapping apparatus
JPH01246829A (ja) * 1988-03-28 1989-10-02 Tokyo Electron Ltd ビームアニール装置
US5100231A (en) 1989-04-27 1992-03-31 Coherent, Inc. Apparatus for measuring the mode quality of a laser beam
US5408553A (en) 1992-08-26 1995-04-18 The United States Of America As Represented By The United States Department Of Energy Optical power splitter for splitting high power light
EP0605055B1 (en) 1992-12-29 1997-08-06 Koninklijke Philips Electronics N.V. Pyrometer including an emissivity meter
JPH07225151A (ja) * 1994-02-15 1995-08-22 Nec Eng Ltd レーザ出力測定装置
US5590148A (en) 1994-08-24 1996-12-31 Duke University Birefringent beamsplitter for high power lasers and laser applications
JPH0868690A (ja) * 1994-08-30 1996-03-12 Central Res Inst Of Electric Power Ind 光強度測定用光センサ及び光計測装置
JP3526652B2 (ja) * 1995-05-11 2004-05-17 倉敷紡績株式会社 光学的測定方法および光学的測定装置
FR2774766B1 (fr) 1998-02-09 2000-04-28 Centre Nat Rech Scient Polarimetre et procede de mesure correspondant
US5959733A (en) 1998-05-08 1999-09-28 Food Industry Research And Development Institute Non-contact continuous photoelectric inspecting device for paint coating contamination on welding seams of steel can sheet
US6130753A (en) 1999-02-01 2000-10-10 The United States Of America As Represented By The Secretary Of The Air Force Laser optical density measurement system
JP2004325336A (ja) * 2003-04-25 2004-11-18 Jasco Corp 円二色性測定装置
US7049544B2 (en) 2004-03-26 2006-05-23 Ultratech, Inc. Beamsplitter for high-power radiation
TW200912478A (en) * 2007-07-31 2009-03-16 Luminus Devices Inc Illumination assembly including wavelength converting material having spatially varying density
JP2010091441A (ja) * 2008-10-09 2010-04-22 Arkray Inc 光量モニタリング装置、および光量モニタリング方法
US8619247B1 (en) 2010-04-08 2013-12-31 Haas Laser Technologies, Inc. Laser beam analysis apparatus
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Also Published As

Publication number Publication date
TW201504600A (zh) 2015-02-01
KR20150014370A (ko) 2015-02-06
US8988674B2 (en) 2015-03-24
TWI493159B (zh) 2015-07-21
JP5774754B2 (ja) 2015-09-09
CN104501946B (zh) 2018-01-16
JP2015042972A (ja) 2015-03-05
US20150029497A1 (en) 2015-01-29
CN104501946A (zh) 2015-04-08

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