SG10201403211QA - Semiconductor device and method of stacking semiconductordie on a fan-out wlcsp - Google Patents
Semiconductor device and method of stacking semiconductordie on a fan-out wlcspInfo
- Publication number
- SG10201403211QA SG10201403211QA SG10201403211QA SG10201403211QA SG10201403211QA SG 10201403211Q A SG10201403211Q A SG 10201403211QA SG 10201403211Q A SG10201403211Q A SG 10201403211QA SG 10201403211Q A SG10201403211Q A SG 10201403211QA SG 10201403211Q A SG10201403211Q A SG 10201403211QA
- Authority
- SG
- Singapore
- Prior art keywords
- semiconductor die
- interconnect structure
- semiconductor
- semiconductor device
- semiconductordie
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 13
- 239000008393 encapsulating agent Substances 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
Classifications
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- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
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- H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
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US14/261,252 US9478485B2 (en) | 2013-06-28 | 2014-04-24 | Semiconductor device and method of stacking semiconductor die on a fan-out WLCSP |
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US20160013076A1 (en) * | 2014-07-14 | 2016-01-14 | Michael B. Vincent | Three dimensional package assemblies and methods for the production thereof |
US9633974B2 (en) * | 2015-03-04 | 2017-04-25 | Apple Inc. | System in package fan out stacking architecture and process flow |
US11056373B2 (en) | 2015-07-21 | 2021-07-06 | Apple Inc. | 3D fanout stacking |
CN106449420B (zh) * | 2015-08-05 | 2019-06-21 | 凤凰先驱股份有限公司 | 嵌埋式封装结构及其制造方法 |
TWI582933B (zh) * | 2015-08-05 | 2017-05-11 | 恆勁科技股份有限公司 | 嵌埋式封裝結構的製造方法 |
US10049953B2 (en) * | 2015-09-21 | 2018-08-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of manufacturing an integrated fan-out package having fan-out redistribution layer (RDL) to accommodate electrical connectors |
WO2017108121A1 (en) * | 2015-12-23 | 2017-06-29 | Intel IP Corporation | Semiconductor die package with more than one hanging die |
US10049893B2 (en) * | 2016-05-11 | 2018-08-14 | Advanced Semiconductor Engineering, Inc. | Semiconductor device with a conductive post |
US11257724B2 (en) | 2016-08-08 | 2022-02-22 | Semiconductor Components Industries, Llc | Semiconductor wafer and method of probe testing |
US9793186B1 (en) | 2016-08-08 | 2017-10-17 | Semiconductor Components Industries, Llc | Semiconductor wafer and method of backside probe testing through opening in film frame |
US10461000B2 (en) * | 2016-08-08 | 2019-10-29 | Semiconductor Components Industries, Llc | Semiconductor wafer and method of probe testing |
US11075129B2 (en) | 2016-08-08 | 2021-07-27 | Semiconductor Components Industries, Llc | Substrate processing carrier |
WO2018125202A1 (en) * | 2016-12-30 | 2018-07-05 | Intel IP Corporation | Interconnect structure for stacked die in a microelectronic device |
WO2020036631A2 (en) * | 2018-03-06 | 2020-02-20 | The Regents Of The University Of California | Network on interconnect fabric |
CN109599390A (zh) * | 2018-12-29 | 2019-04-09 | 华进半导体封装先导技术研发中心有限公司 | 一种扇出型封装结构和封装方法 |
US11239173B2 (en) * | 2019-03-28 | 2022-02-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Structure and formation method of chip package with fan-out feature |
KR20220109753A (ko) * | 2021-01-29 | 2022-08-05 | 삼성전자주식회사 | 포스트를 포함하는 반도체 패키지 |
US11694876B2 (en) | 2021-12-08 | 2023-07-04 | Applied Materials, Inc. | Apparatus and method for delivering a plurality of waveform signals during plasma processing |
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US6847105B2 (en) * | 2001-09-21 | 2005-01-25 | Micron Technology, Inc. | Bumping technology in stacked die configurations |
US6987031B2 (en) * | 2002-08-27 | 2006-01-17 | Micron Technology, Inc. | Multiple chip semiconductor package and method of fabricating same |
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US8076232B2 (en) * | 2008-04-03 | 2011-12-13 | Stats Chippac, Ltd. | Semiconductor device and method of forming composite bump-on-lead interconnection |
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US8124471B2 (en) * | 2008-03-11 | 2012-02-28 | Intel Corporation | Method of post-mold grinding a semiconductor package |
US8383457B2 (en) * | 2010-09-03 | 2013-02-26 | Stats Chippac, Ltd. | Semiconductor device and method of forming interposer frame over semiconductor die to provide vertical interconnect |
US8642381B2 (en) * | 2010-07-16 | 2014-02-04 | Stats Chippac, Ltd. | Semiconductor device and method of forming protective layer over exposed surfaces of semiconductor die |
US8076184B1 (en) * | 2010-08-16 | 2011-12-13 | Stats Chippac, Ltd. | Semiconductor device and method of forming wafer-level multi-row etched leadframe with base leads and embedded semiconductor die |
US8288201B2 (en) | 2010-08-25 | 2012-10-16 | Stats Chippac, Ltd. | Semiconductor device and method of forming FO-WLCSP with discrete semiconductor components mounted under and over semiconductor die |
US8354297B2 (en) | 2010-09-03 | 2013-01-15 | Stats Chippac, Ltd. | Semiconductor device and method of forming different height conductive pillars to electrically interconnect stacked laterally offset semiconductor die |
GB2485830A (en) * | 2010-11-26 | 2012-05-30 | Cambridge Silicon Radio Ltd | Stacked multi-chip package using encapsulated electroplated pillar conductors; also able to include MEMS elements |
US20130069230A1 (en) * | 2011-09-16 | 2013-03-21 | Nagesh Vodrahalli | Electronic assembly apparatus and associated methods |
TWI590399B (zh) * | 2012-04-02 | 2017-07-01 | 矽品精密工業股份有限公司 | 半導體封裝件及其製法與其封裝基板 |
US9385006B2 (en) | 2012-06-21 | 2016-07-05 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming an embedded SOP fan-out package |
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