SE9601252D0 - Anordning vid strålningsemission - Google Patents

Anordning vid strålningsemission

Info

Publication number
SE9601252D0
SE9601252D0 SE9601252A SE9601252A SE9601252D0 SE 9601252 D0 SE9601252 D0 SE 9601252D0 SE 9601252 A SE9601252 A SE 9601252A SE 9601252 A SE9601252 A SE 9601252A SE 9601252 D0 SE9601252 D0 SE 9601252D0
Authority
SE
Sweden
Prior art keywords
pct
mode
filter
date oct
sec
Prior art date
Application number
SE9601252A
Other languages
English (en)
Swedish (sv)
Inventor
Johan Michael Larsson
Kennet Vilhelmsson
Sverker Haard Af Segerstad
Original Assignee
Radians Innova Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radians Innova Ab filed Critical Radians Innova Ab
Priority to SE9601252A priority Critical patent/SE9601252D0/xx
Publication of SE9601252D0 publication Critical patent/SE9601252D0/xx
Priority to JP53521197A priority patent/JP4012571B2/ja
Priority to PCT/SE1997/000562 priority patent/WO1997037265A1/en
Priority to EP97916705A priority patent/EP0892936B1/de
Priority to US09/155,664 priority patent/US6104489A/en
Priority to DE69733553T priority patent/DE69733553T2/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/14—Mode converters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/18—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective
    • G02B27/20—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective for imaging minute objects, e.g. light-pointer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206—Optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4256—Details of housings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4266—Thermal aspects, temperature control or temperature monitoring
    • G02B6/4268—Cooling
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4207—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms with optical elements reducing the sensitivity to optical feedback

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Semiconductor Lasers (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
SE9601252A 1996-01-04 1996-04-01 Anordning vid strålningsemission SE9601252D0 (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE9601252A SE9601252D0 (sv) 1996-04-01 1996-04-01 Anordning vid strålningsemission
JP53521197A JP4012571B2 (ja) 1996-04-01 1997-04-01 光線発射に関連するシステム
PCT/SE1997/000562 WO1997037265A1 (en) 1996-04-01 1997-04-01 Arrangement relating to beam emission
EP97916705A EP0892936B1 (de) 1996-04-01 1997-04-01 Anordnung zur strahl-emission
US09/155,664 US6104489A (en) 1996-01-04 1997-04-01 Arrangement relating to beam emission
DE69733553T DE69733553T2 (de) 1996-04-01 1997-04-01 Anordnung zur strahl-emission

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9601252A SE9601252D0 (sv) 1996-04-01 1996-04-01 Anordning vid strålningsemission

Publications (1)

Publication Number Publication Date
SE9601252D0 true SE9601252D0 (sv) 1996-04-01

Family

ID=20402042

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9601252A SE9601252D0 (sv) 1996-01-04 1996-04-01 Anordning vid strålningsemission

Country Status (6)

Country Link
US (1) US6104489A (de)
EP (1) EP0892936B1 (de)
JP (1) JP4012571B2 (de)
DE (1) DE69733553T2 (de)
SE (1) SE9601252D0 (de)
WO (1) WO1997037265A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001055671A1 (en) * 2000-01-31 2001-08-02 Therma-Wave, Inc. Fiber-filtered laser system for use in measuring thin film thicknesses
US7079249B2 (en) 2002-06-21 2006-07-18 Therma-Wave, Inc. Modulated reflectance measurement system with fiber laser technology
GB0714563D0 (en) * 2007-07-26 2007-09-05 Malvern Instr Ltd Apparatus and method of producing a light beam for an optical measurement instrument
NL2019924A (en) 2016-12-14 2018-06-18 Asml Netherlands Bv An optical device and associated systems

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5395362A (en) * 1992-01-14 1995-03-07 Summit Technology Methods and apparatus for distributing laser radiation
EP0701707B1 (de) * 1993-06-04 2005-05-11 Coulter International Corporation Verfahren und vorrichtung zur messung der teilchengrössenverteilung unter verwendung von laserstreuung

Also Published As

Publication number Publication date
JP2000507716A (ja) 2000-06-20
US6104489A (en) 2000-08-15
WO1997037265A1 (en) 1997-10-09
EP0892936A1 (de) 1999-01-27
EP0892936B1 (de) 2005-06-15
DE69733553T2 (de) 2006-05-11
DE69733553D1 (de) 2005-07-21
JP4012571B2 (ja) 2007-11-21

Similar Documents

Publication Publication Date Title
WO2001009665A8 (en) Optical beam shaper
JPS56500529A (de)
WO2002027402A3 (en) Illumination system particularly for microlithography
EP1209780A3 (de) Verfahren und Vorrichtung zur Erzeugung eines optischen Einseitenband-Frequenzkamms
DE69709499D1 (de) Testkarte für analysen
WO2004031741A3 (en) Illumination system for optical inspection
FR2661008B1 (fr) Systeme de lentilles pour focaliser le faisceau de sortie d'un laser a semi-conducteur.
EP0759538A3 (de) Laservermessungssystem
DE69107232T2 (de) Apparat zur Dämpfung eines Laserstrahls.
DE69617938D1 (de) Diodengepumpter laser mit kristallen mit starker thermaler fokussierung
SE9601252D0 (sv) Anordning vid strålningsemission
SE9400631D0 (sv) Anordning vid protetik konstruktionsenhet och implantat
DE69602951T2 (de) Optische vorrichtung zur homogenisierung eines laserstrahles
BR9501730A (pt) Método e aparelho para limpar a área do filtro de um secador de sucção
ATE396422T1 (de) Elektrooptisches filter
EP0908871A3 (de) Optisches Informationsspeichergerät
ES2165633T3 (es) Dispositivo de acoplamiento optico de un laser de cuerpo solido a una fibra optica y proceso de produccion de dicho dispositivo.
FR2800522B1 (fr) Dispositif d'elaboration d'une pluralite de faisceaux laser
IL126854A0 (en) Method and apparatus for illumination of light-sensitive materials
ATE183588T1 (de) Vorrichtungen zur einkopplung von strahlung
ATE245825T1 (de) Verfahren zur herstellung von reliefbildern und vorrichtung zur durchführung des verfahrens
DE29609850U1 (de) Vorrichtung zur Einkopplung der Strahlung von Kurzpulslasern in einem mikroskopischen Strahlengang
ATE143362T1 (de) 6-substituierte hexahydrobenz(cd>indole
DE59504828D1 (de) Holografischer neurochip
ATE119685T1 (de) Spiegelteleskop und verfahren zu seiner herstellung.