SE9601252D0 - Anordning vid strålningsemission - Google Patents

Anordning vid strålningsemission

Info

Publication number
SE9601252D0
SE9601252D0 SE9601252A SE9601252A SE9601252D0 SE 9601252 D0 SE9601252 D0 SE 9601252D0 SE 9601252 A SE9601252 A SE 9601252A SE 9601252 A SE9601252 A SE 9601252A SE 9601252 D0 SE9601252 D0 SE 9601252D0
Authority
SE
Sweden
Prior art keywords
pct
mode
filter
date oct
sec
Prior art date
Application number
SE9601252A
Other languages
English (en)
Inventor
Johan Michael Larsson
Kennet Vilhelmsson
Sverker Haard Af Segerstad
Original Assignee
Radians Innova Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radians Innova Ab filed Critical Radians Innova Ab
Priority to SE9601252A priority Critical patent/SE9601252D0/sv
Publication of SE9601252D0 publication Critical patent/SE9601252D0/sv
Priority to EP97916705A priority patent/EP0892936B1/en
Priority to JP53521197A priority patent/JP4012571B2/ja
Priority to US09/155,664 priority patent/US6104489A/en
Priority to DE69733553T priority patent/DE69733553T2/de
Priority to PCT/SE1997/000562 priority patent/WO1997037265A1/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/14—Mode converters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/18—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective
    • G02B27/20—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective for imaging minute objects, e.g. light-pointer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206—Optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4256—Details of housings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4266—Thermal aspects, temperature control or temperature monitoring
    • G02B6/4268—Cooling
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4207—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms with optical elements reducing the sensitivity to optical feedback

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Semiconductor Lasers (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
SE9601252A 1996-01-04 1996-04-01 Anordning vid strålningsemission SE9601252D0 (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE9601252A SE9601252D0 (sv) 1996-04-01 1996-04-01 Anordning vid strålningsemission
EP97916705A EP0892936B1 (en) 1996-04-01 1997-04-01 Arrangement relating to beam emission
JP53521197A JP4012571B2 (ja) 1996-04-01 1997-04-01 光線発射に関連するシステム
US09/155,664 US6104489A (en) 1996-01-04 1997-04-01 Arrangement relating to beam emission
DE69733553T DE69733553T2 (de) 1996-04-01 1997-04-01 Anordnung zur strahl-emission
PCT/SE1997/000562 WO1997037265A1 (en) 1996-04-01 1997-04-01 Arrangement relating to beam emission

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9601252A SE9601252D0 (sv) 1996-04-01 1996-04-01 Anordning vid strålningsemission

Publications (1)

Publication Number Publication Date
SE9601252D0 true SE9601252D0 (sv) 1996-04-01

Family

ID=20402042

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9601252A SE9601252D0 (sv) 1996-01-04 1996-04-01 Anordning vid strålningsemission

Country Status (6)

Country Link
US (1) US6104489A (sv)
EP (1) EP0892936B1 (sv)
JP (1) JP4012571B2 (sv)
DE (1) DE69733553T2 (sv)
SE (1) SE9601252D0 (sv)
WO (1) WO1997037265A1 (sv)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001055671A1 (en) * 2000-01-31 2001-08-02 Therma-Wave, Inc. Fiber-filtered laser system for use in measuring thin film thicknesses
US7079249B2 (en) 2002-06-21 2006-07-18 Therma-Wave, Inc. Modulated reflectance measurement system with fiber laser technology
GB0714563D0 (en) * 2007-07-26 2007-09-05 Malvern Instr Ltd Apparatus and method of producing a light beam for an optical measurement instrument
NL2019924A (en) 2016-12-14 2018-06-18 Asml Netherlands Bv An optical device and associated systems

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5395362A (en) * 1992-01-14 1995-03-07 Summit Technology Methods and apparatus for distributing laser radiation
JP3380555B2 (ja) * 1993-06-04 2003-02-24 コールター インターナショナル コーポレイション レーザー回折粒子サイジング装置及び方法

Also Published As

Publication number Publication date
EP0892936B1 (en) 2005-06-15
US6104489A (en) 2000-08-15
DE69733553D1 (de) 2005-07-21
WO1997037265A1 (en) 1997-10-09
JP2000507716A (ja) 2000-06-20
JP4012571B2 (ja) 2007-11-21
DE69733553T2 (de) 2006-05-11
EP0892936A1 (en) 1999-01-27

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