DE69733553D1 - Anordnung zur strahl-emission - Google Patents

Anordnung zur strahl-emission

Info

Publication number
DE69733553D1
DE69733553D1 DE69733553T DE69733553T DE69733553D1 DE 69733553 D1 DE69733553 D1 DE 69733553D1 DE 69733553 T DE69733553 T DE 69733553T DE 69733553 T DE69733553 T DE 69733553T DE 69733553 D1 DE69733553 D1 DE 69733553D1
Authority
DE
Germany
Prior art keywords
arrangement
beam emission
emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69733553T
Other languages
English (en)
Other versions
DE69733553T2 (de
Inventor
Jan-Ake Vilhelmsson
Michael Larsson
Af Segerstad Sverker Hard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
THORLABS INC., NEWTON, N.J., US
Original Assignee
RADIANS INNOVA GOETEBURG GO AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RADIANS INNOVA GOETEBURG GO AB filed Critical RADIANS INNOVA GOETEBURG GO AB
Publication of DE69733553D1 publication Critical patent/DE69733553D1/de
Application granted granted Critical
Publication of DE69733553T2 publication Critical patent/DE69733553T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/14—Mode converters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/18—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective
    • G02B27/20—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective for imaging minute objects, e.g. light-pointer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206—Optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4256—Details of housings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4266—Thermal aspects, temperature control or temperature monitoring
    • G02B6/4268—Cooling
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4207—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms with optical elements reducing the sensitivity to optical feedback

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Semiconductor Lasers (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69733553T 1996-04-01 1997-04-01 Anordnung zur strahl-emission Expired - Fee Related DE69733553T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SE9601252 1996-04-01
SE9601252A SE9601252D0 (sv) 1996-04-01 1996-04-01 Anordning vid strålningsemission
PCT/SE1997/000562 WO1997037265A1 (en) 1996-04-01 1997-04-01 Arrangement relating to beam emission

Publications (2)

Publication Number Publication Date
DE69733553D1 true DE69733553D1 (de) 2005-07-21
DE69733553T2 DE69733553T2 (de) 2006-05-11

Family

ID=20402042

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69733553T Expired - Fee Related DE69733553T2 (de) 1996-04-01 1997-04-01 Anordnung zur strahl-emission

Country Status (6)

Country Link
US (1) US6104489A (de)
EP (1) EP0892936B1 (de)
JP (1) JP4012571B2 (de)
DE (1) DE69733553T2 (de)
SE (1) SE9601252D0 (de)
WO (1) WO1997037265A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001055671A1 (en) * 2000-01-31 2001-08-02 Therma-Wave, Inc. Fiber-filtered laser system for use in measuring thin film thicknesses
US7079249B2 (en) 2002-06-21 2006-07-18 Therma-Wave, Inc. Modulated reflectance measurement system with fiber laser technology
GB0714563D0 (en) * 2007-07-26 2007-09-05 Malvern Instr Ltd Apparatus and method of producing a light beam for an optical measurement instrument
KR102536386B1 (ko) 2016-12-14 2023-05-23 에이에스엠엘 네델란즈 비.브이. 광 디바이스 및 연관된 시스템

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5395362A (en) * 1992-01-14 1995-03-07 Summit Technology Methods and apparatus for distributing laser radiation
WO1994029762A1 (en) * 1993-06-04 1994-12-22 Coulter Corporation Laser diffraction particle sizing apparatus and method

Also Published As

Publication number Publication date
SE9601252D0 (sv) 1996-04-01
JP2000507716A (ja) 2000-06-20
US6104489A (en) 2000-08-15
EP0892936B1 (de) 2005-06-15
WO1997037265A1 (en) 1997-10-09
EP0892936A1 (de) 1999-01-27
DE69733553T2 (de) 2006-05-11
JP4012571B2 (ja) 2007-11-21

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: THORLABS INC., NEWTON, N.J., US

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee