SE7613232L - Forfarande for tillverkning av halvledaranordningar - Google Patents
Forfarande for tillverkning av halvledaranordningarInfo
- Publication number
- SE7613232L SE7613232L SE7613232A SE7613232A SE7613232L SE 7613232 L SE7613232 L SE 7613232L SE 7613232 A SE7613232 A SE 7613232A SE 7613232 A SE7613232 A SE 7613232A SE 7613232 L SE7613232 L SE 7613232L
- Authority
- SE
- Sweden
- Prior art keywords
- procedure
- manufacture
- semiconductor devices
- semiconductor
- devices
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/24—Alloying of impurity materials, e.g. doping materials, electrode materials, with a semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
- H01L29/0661—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body specially adapted for altering the breakdown voltage by removing semiconductor material at, or in the neighbourhood of, a reverse biased junction, e.g. by bevelling, moat etching, depletion etching
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Weting (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Element Separation (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/635,327 US4042448A (en) | 1975-11-26 | 1975-11-26 | Post TGZM surface etch |
Publications (1)
Publication Number | Publication Date |
---|---|
SE7613232L true SE7613232L (sv) | 1977-05-27 |
Family
ID=24547343
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE7613232A SE7613232L (sv) | 1975-11-26 | 1976-11-25 | Forfarande for tillverkning av halvledaranordningar |
Country Status (6)
Country | Link |
---|---|
US (1) | US4042448A (fr) |
JP (1) | JPS5275173A (fr) |
DE (1) | DE2653287A1 (fr) |
FR (1) | FR2333347A1 (fr) |
GB (1) | GB1557300A (fr) |
SE (1) | SE7613232L (fr) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4076559A (en) * | 1977-03-18 | 1978-02-28 | General Electric Company | Temperature gradient zone melting through an oxide layer |
US6727527B1 (en) | 1995-07-31 | 2004-04-27 | Ixys Corporation | Reverse blocking IGBT |
US20040061170A1 (en) * | 1995-07-31 | 2004-04-01 | Ixys Corporation | Reverse blocking IGBT |
US5698454A (en) * | 1995-07-31 | 1997-12-16 | Ixys Corporation | Method of making a reverse blocking IGBT |
FR2815470A1 (fr) * | 2000-10-12 | 2002-04-19 | St Microelectronics Sa | Procede de fabrication de composants de puissance verticaux |
US6936908B2 (en) | 2001-05-03 | 2005-08-30 | Ixys Corporation | Forward and reverse blocking devices |
US20040188385A1 (en) * | 2003-03-26 | 2004-09-30 | Kenji Yamada | Etching agent composition for thin films having high permittivity and process for etching |
DE102004021228B4 (de) * | 2004-04-30 | 2009-01-08 | Infineon Technologies Ag | Verfahren zum Einbringen eines Grabens in einen Halbleiterkörper eines Kompensationsbauelementes |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3272748A (en) * | 1964-06-29 | 1966-09-13 | Western Electric Co | Etching of silicon and germanium |
US3379584A (en) * | 1964-09-04 | 1968-04-23 | Texas Instruments Inc | Semiconductor wafer with at least one epitaxial layer and methods of making same |
US3608186A (en) * | 1969-10-30 | 1971-09-28 | Jearld L Hutson | Semiconductor device manufacture with junction passivation |
US3699402A (en) * | 1970-07-27 | 1972-10-17 | Gen Electric | Hybrid circuit power module |
US3901736A (en) * | 1973-10-30 | 1975-08-26 | Gen Electric | Method of making deep diode devices |
DE2450902A1 (de) * | 1973-10-30 | 1975-05-07 | Gen Electric | Elektrische durchfuehrungsleiter in halbleitervorrichtungen |
US3920482A (en) * | 1974-03-13 | 1975-11-18 | Signetics Corp | Method for forming a semiconductor structure having islands isolated by adjacent moats |
-
1975
- 1975-11-26 US US05/635,327 patent/US4042448A/en not_active Expired - Lifetime
-
1976
- 1976-11-15 GB GB47428/76A patent/GB1557300A/en not_active Expired
- 1976-11-22 FR FR7635061A patent/FR2333347A1/fr not_active Withdrawn
- 1976-11-24 DE DE19762653287 patent/DE2653287A1/de active Pending
- 1976-11-25 SE SE7613232A patent/SE7613232L/xx unknown
- 1976-11-26 JP JP51141338A patent/JPS5275173A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
GB1557300A (en) | 1979-12-05 |
JPS5275173A (en) | 1977-06-23 |
DE2653287A1 (de) | 1977-06-08 |
FR2333347A1 (fr) | 1977-06-24 |
US4042448A (en) | 1977-08-16 |
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