SE526337C2 - PVD-belagt skärverktyg med åtminstone ett skikt av (Ti, A1) (O, N) samt metod för att framställa detsamma - Google Patents

PVD-belagt skärverktyg med åtminstone ett skikt av (Ti, A1) (O, N) samt metod för att framställa detsamma

Info

Publication number
SE526337C2
SE526337C2 SE0202230A SE0202230A SE526337C2 SE 526337 C2 SE526337 C2 SE 526337C2 SE 0202230 A SE0202230 A SE 0202230A SE 0202230 A SE0202230 A SE 0202230A SE 526337 C2 SE526337 C2 SE 526337C2
Authority
SE
Sweden
Prior art keywords
layer
atom
coating
ratio
substrate
Prior art date
Application number
SE0202230A
Other languages
English (en)
Swedish (sv)
Other versions
SE0202230L (sv
SE0202230D0 (sv
Inventor
Jacob Sjoelen
Lars Frisk
Original Assignee
Seco Tools Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seco Tools Ab filed Critical Seco Tools Ab
Priority to SE0202230A priority Critical patent/SE526337C2/sv
Publication of SE0202230D0 publication Critical patent/SE0202230D0/xx
Priority to EP03014921A priority patent/EP1400293A3/en
Priority to US10/610,650 priority patent/US20040076857A1/en
Priority to JP2003195122A priority patent/JP2004050403A/ja
Priority to CNB031476783A priority patent/CN100448600C/zh
Priority to KR1020030048807A priority patent/KR20040010234A/ko
Publication of SE0202230L publication Critical patent/SE0202230L/xx
Publication of SE526337C2 publication Critical patent/SE526337C2/sv

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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • C04B41/85Coating or impregnation with inorganic materials
    • C04B41/87Ceramics
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/58007Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on refractory metal nitrides
    • C04B35/58014Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on refractory metal nitrides based on titanium nitrides, e.g. TiAlON
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5062Borides, Nitrides or Silicides
    • C04B41/5068Titanium nitride
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676Oxynitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/40Metallic constituents or additives not added as binding phase
    • C04B2235/402Aluminium
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/40Metallic constituents or additives not added as binding phase
    • C04B2235/404Refractory metals
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    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/46Gases other than oxygen used as reactant, e.g. nitrogen used to make a nitride phase
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    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658Atmosphere during thermal treatment
    • C04B2235/6583Oxygen containing atmosphere, e.g. with changing oxygen pressures
    • C04B2235/6584Oxygen containing atmosphere, e.g. with changing oxygen pressures at an oxygen percentage below that of air
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    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658Atmosphere during thermal treatment
    • C04B2235/6583Oxygen containing atmosphere, e.g. with changing oxygen pressures
    • C04B2235/6585Oxygen containing atmosphere, e.g. with changing oxygen pressures at an oxygen percentage above that of air
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    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74Physical characteristics
    • C04B2235/76Crystal structural characteristics, e.g. symmetry
    • C04B2235/762Cubic symmetry, e.g. beta-SiC
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    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74Physical characteristics
    • C04B2235/78Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
    • C04B2235/781Nanograined materials, i.e. having grain sizes below 100 nm
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    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
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    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/963Surface properties, e.g. surface roughness

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Nanotechnology (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Composite Materials (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Laminated Bodies (AREA)
SE0202230A 2002-07-16 2002-07-16 PVD-belagt skärverktyg med åtminstone ett skikt av (Ti, A1) (O, N) samt metod för att framställa detsamma SE526337C2 (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE0202230A SE526337C2 (sv) 2002-07-16 2002-07-16 PVD-belagt skärverktyg med åtminstone ett skikt av (Ti, A1) (O, N) samt metod för att framställa detsamma
EP03014921A EP1400293A3 (en) 2002-07-16 2003-07-01 PVD coated cutting tool
US10/610,650 US20040076857A1 (en) 2002-07-16 2003-07-02 PVD coated cutting tool
JP2003195122A JP2004050403A (ja) 2002-07-16 2003-07-10 切削工具インサートおよびその製造方法
CNB031476783A CN100448600C (zh) 2002-07-16 2003-07-16 Pvc涂层刀具
KR1020030048807A KR20040010234A (ko) 2002-07-16 2003-07-16 Pvd 피복 절삭 공구

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0202230A SE526337C2 (sv) 2002-07-16 2002-07-16 PVD-belagt skärverktyg med åtminstone ett skikt av (Ti, A1) (O, N) samt metod för att framställa detsamma

Publications (3)

Publication Number Publication Date
SE0202230D0 SE0202230D0 (sv) 2002-07-16
SE0202230L SE0202230L (sv) 2004-01-17
SE526337C2 true SE526337C2 (sv) 2005-08-23

Family

ID=20288550

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0202230A SE526337C2 (sv) 2002-07-16 2002-07-16 PVD-belagt skärverktyg med åtminstone ett skikt av (Ti, A1) (O, N) samt metod för att framställa detsamma

Country Status (6)

Country Link
US (1) US20040076857A1 (enExample)
EP (1) EP1400293A3 (enExample)
JP (1) JP2004050403A (enExample)
KR (1) KR20040010234A (enExample)
CN (1) CN100448600C (enExample)
SE (1) SE526337C2 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4908767B2 (ja) * 2005-03-31 2012-04-04 京セラ株式会社 表面被覆部材および切削工具
CA2885593C (en) * 2006-05-17 2018-03-06 G & H Technologies Llc Wear resistant coating
DE102006025244A1 (de) 2006-05-29 2007-12-06 Rheinmetall Waffe Munition Gmbh Schutzschicht für Bauteile einer Waffe oder dergleichen
DE102006025243A1 (de) 2006-05-29 2007-12-06 Rheinmetall Waffe Munition Gmbh Schutzschicht für Teile insbesondere einer Waffe, einer Lafette, eines Turmes oder dergleichen, insbesondere als Korrosionsschutz dieser Teile
CN100557072C (zh) * 2006-07-25 2009-11-04 震虎精密科技股份有限公司 一种刀具的表面硬化方法
EP2077172B1 (en) * 2006-10-02 2020-05-06 Sumitomo Electric Industries, Ltd. Surface-coated cutting tool
US9138994B2 (en) 2009-03-03 2015-09-22 Taiwan Semiconductor Manufacturing Company, Ltd. MEMS devices and methods of fabrication thereof
DE102009001675A1 (de) * 2009-03-19 2010-09-23 Eberhard-Karls-Universität Tübingen Schneidwerkzeug
JP6198176B2 (ja) 2013-02-26 2017-09-20 三菱マテリアル株式会社 表面被覆切削工具
JP5974940B2 (ja) * 2013-03-14 2016-08-23 三菱マテリアル株式会社 交換式切削ヘッド
JP5879664B2 (ja) * 2013-12-26 2016-03-08 住友電工ハードメタル株式会社 切削工具
US11840045B2 (en) * 2017-03-29 2023-12-12 Toyo Kohan Co., Ltd. Roll-bonded laminate
JP6877859B2 (ja) * 2017-03-30 2021-05-26 京セラ株式会社 切削インサート及び切削工具
EP3935202A1 (en) 2019-03-07 2022-01-12 Oerlikon Surface Solutions AG, Pfäffikon Tm-al-o-n coating layers with increased thermal stability
CN110541145A (zh) * 2019-09-27 2019-12-06 宁波丽成真空科技有限公司 一种真空镀膜制作氧氮高铝钛薄膜用于微钻孔刀具的应用

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5858273A (ja) * 1981-10-01 1983-04-06 Sumitomo Electric Ind Ltd 被覆超硬合金
CH673071B5 (enExample) * 1988-06-24 1990-08-15 Asulab Sa
US5330853A (en) * 1991-03-16 1994-07-19 Leybold Ag Multilayer Ti-Al-N coating for tools
EP0592986B1 (en) * 1992-10-12 1998-07-08 Sumitomo Electric Industries, Limited Ultra-thin film laminate
CH686767A5 (de) * 1993-07-29 1996-06-28 Balzers Hochvakuum Beschichtetes Werkzeug und dessen Verwendung.
JP3866305B2 (ja) * 1994-10-27 2007-01-10 住友電工ハードメタル株式会社 工具用複合高硬度材料
US5879823A (en) * 1995-12-12 1999-03-09 Kennametal Inc. Coated cutting tool
US6071560A (en) * 1997-09-12 2000-06-06 Balzers Aktiengesellschaft Tool with tool body and protective layer system
DE69829816T2 (de) * 1997-10-10 2006-01-26 Burle Technologies, Inc., Wilmington Sekundäremissionsbechichtung für Vervielfacherröhren
JP3031907B2 (ja) * 1998-03-16 2000-04-10 日立ツール株式会社 多層膜被覆部材
EP0980917B1 (en) * 1998-07-29 2002-07-03 Toshiba Tungaloy Co., Ltd. Aluminium oxide-coated tool member
ATE343659T1 (de) * 2000-12-28 2006-11-15 Kobe Steel Ltd Hartstoffschicht für schneidwerkzeuge

Also Published As

Publication number Publication date
CN1481971A (zh) 2004-03-17
KR20040010234A (ko) 2004-01-31
US20040076857A1 (en) 2004-04-22
EP1400293A3 (en) 2006-04-12
CN100448600C (zh) 2009-01-07
EP1400293A2 (en) 2004-03-24
SE0202230L (sv) 2004-01-17
SE0202230D0 (sv) 2002-07-16
JP2004050403A (ja) 2004-02-19

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