SE508711C2 - Anordning för en skikttjockleksmätare och ett förfarande för att mäta tjockleken hos ett skikt - Google Patents
Anordning för en skikttjockleksmätare och ett förfarande för att mäta tjockleken hos ett skiktInfo
- Publication number
- SE508711C2 SE508711C2 SE9604760A SE9604760A SE508711C2 SE 508711 C2 SE508711 C2 SE 508711C2 SE 9604760 A SE9604760 A SE 9604760A SE 9604760 A SE9604760 A SE 9604760A SE 508711 C2 SE508711 C2 SE 508711C2
- Authority
- SE
- Sweden
- Prior art keywords
- layer
- film
- thickness
- measuring
- layer thickness
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
- G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
- G01B5/06—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness
- G01B5/066—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness of coating
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9604760A SE508711C2 (sv) | 1996-12-23 | 1996-12-23 | Anordning för en skikttjockleksmätare och ett förfarande för att mäta tjockleken hos ett skikt |
EP97850170A EP0851204A3 (en) | 1996-12-23 | 1997-12-09 | Arrangement for a layer thickness measurer and a method for measuring the thickness of a layer |
BR9706265A BR9706265A (pt) | 1996-12-23 | 1997-12-23 | Disposição para um medidor de espessura de camada e um método para medir a espessura de uma camada |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9604760A SE508711C2 (sv) | 1996-12-23 | 1996-12-23 | Anordning för en skikttjockleksmätare och ett förfarande för att mäta tjockleken hos ett skikt |
Publications (3)
Publication Number | Publication Date |
---|---|
SE9604760D0 SE9604760D0 (sv) | 1996-12-23 |
SE9604760L SE9604760L (sv) | 1998-06-24 |
SE508711C2 true SE508711C2 (sv) | 1998-10-26 |
Family
ID=20405115
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE9604760A SE508711C2 (sv) | 1996-12-23 | 1996-12-23 | Anordning för en skikttjockleksmätare och ett förfarande för att mäta tjockleken hos ett skikt |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0851204A3 (pt) |
BR (1) | BR9706265A (pt) |
SE (1) | SE508711C2 (pt) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104792255B (zh) * | 2015-05-06 | 2018-06-05 | 京东方科技集团股份有限公司 | 一种膜厚测试装置及膜厚测试方法 |
CN112268496B (zh) * | 2020-09-24 | 2022-05-17 | 深圳华力岩土工程有限公司 | 一种垫砂层厚度检测设备及检测方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4738131A (en) * | 1987-06-17 | 1988-04-19 | Paul N. Gardner Company, Inc. | Guarded ring tensioned thickness standard |
DE4007363A1 (de) * | 1990-03-08 | 1991-09-12 | Weber Maschinenbau Gmbh | Verfahren zur messung der dicke einer schicht auf einem traegermaterial |
US5241280A (en) * | 1990-06-05 | 1993-08-31 | Defelsko Corporation | Coating thickness measurement gauge |
DE59201672D1 (de) * | 1992-07-03 | 1995-04-20 | Nix Norbert | Magnetinduktive und Wirbelstrommesssonde zur Messung einer Schichtdicke. |
DE19635855C2 (de) * | 1996-09-04 | 2001-03-08 | Elektrophysik Dr Steingroever | Verfahren und Meßsonde zum Messen der Dicke von pulvrigen oder weichen Schichtwerkstoffen auf einem festen Grundwerkstoff |
-
1996
- 1996-12-23 SE SE9604760A patent/SE508711C2/sv not_active IP Right Cessation
-
1997
- 1997-12-09 EP EP97850170A patent/EP0851204A3/en not_active Withdrawn
- 1997-12-23 BR BR9706265A patent/BR9706265A/pt not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP0851204A2 (en) | 1998-07-01 |
BR9706265A (pt) | 1999-03-30 |
EP0851204A3 (en) | 2001-04-04 |
SE9604760D0 (sv) | 1996-12-23 |
SE9604760L (sv) | 1998-06-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
NUG | Patent has lapsed |