SE508228C2 - Anordning för detektering och beräkning av en laserstråles fokusläge, form och effektfördelning - Google Patents

Anordning för detektering och beräkning av en laserstråles fokusläge, form och effektfördelning

Info

Publication number
SE508228C2
SE508228C2 SE9701710A SE9701710A SE508228C2 SE 508228 C2 SE508228 C2 SE 508228C2 SE 9701710 A SE9701710 A SE 9701710A SE 9701710 A SE9701710 A SE 9701710A SE 508228 C2 SE508228 C2 SE 508228C2
Authority
SE
Sweden
Prior art keywords
light
laser beam
laser
affecting body
power distribution
Prior art date
Application number
SE9701710A
Other languages
English (en)
Swedish (sv)
Other versions
SE9701710D0 (sv
SE9701710L (sv
Inventor
Thomas Nilsson
Bernt Von Broemssen
Original Assignee
Inst Verkstadstek Forsk Ivf
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inst Verkstadstek Forsk Ivf filed Critical Inst Verkstadstek Forsk Ivf
Priority to SE9701710A priority Critical patent/SE9701710L/
Publication of SE9701710D0 publication Critical patent/SE9701710D0/xx
Priority to PCT/SE1998/000838 priority patent/WO1998050196A1/fr
Priority to JP54797998A priority patent/JP2001523167A/ja
Priority to US09/423,416 priority patent/US6151109A/en
Priority to EP98921984A priority patent/EP1007268A1/fr
Priority to AU74624/98A priority patent/AU7462498A/en
Publication of SE508228C2 publication Critical patent/SE508228C2/sv
Publication of SE9701710L publication Critical patent/SE9701710L/

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Automatic Focus Adjustment (AREA)
  • Laser Beam Processing (AREA)
  • Radiation-Therapy Devices (AREA)
  • Laser Surgery Devices (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
SE9701710A 1997-05-07 1997-05-07 Anordning för detektering och beräkning av en laserstråles fokusläge, form och effektfördelning SE9701710L (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE9701710A SE9701710L (sv) 1997-05-07 1997-05-07 Anordning för detektering och beräkning av en laserstråles fokusläge, form och effektfördelning
PCT/SE1998/000838 WO1998050196A1 (fr) 1997-05-07 1998-05-06 Dispositif de detection et de calcul de la position du point focal, de la forme et de la repartition de puissance d'un faisceau laser
JP54797998A JP2001523167A (ja) 1997-05-07 1998-05-06 レーザービームの焦点位置、形状および出力分布を検出および計算する装置
US09/423,416 US6151109A (en) 1997-05-07 1998-05-06 Device for detecting and calculating the focus point position, shape and power distribution of a laser beam
EP98921984A EP1007268A1 (fr) 1997-05-07 1998-05-06 Dispositif de detection et de calcul de la position du point focal, de la forme et de la repartition de puissance d'un faisceau laser
AU74624/98A AU7462498A (en) 1997-05-07 1998-05-06 Device for detecting and calculating the focus point position, shape and power distribution of a laser beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9701710A SE9701710L (sv) 1997-05-07 1997-05-07 Anordning för detektering och beräkning av en laserstråles fokusläge, form och effektfördelning

Publications (3)

Publication Number Publication Date
SE9701710D0 SE9701710D0 (sv) 1997-05-07
SE508228C2 true SE508228C2 (sv) 1998-09-14
SE9701710L SE9701710L (sv) 1998-09-14

Family

ID=20406857

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9701710A SE9701710L (sv) 1997-05-07 1997-05-07 Anordning för detektering och beräkning av en laserstråles fokusläge, form och effektfördelning

Country Status (6)

Country Link
US (1) US6151109A (fr)
EP (1) EP1007268A1 (fr)
JP (1) JP2001523167A (fr)
AU (1) AU7462498A (fr)
SE (1) SE9701710L (fr)
WO (1) WO1998050196A1 (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE9801590L (sv) * 1998-05-07 2000-01-21 Permanova Lasersystem Ab Anordning för att bestämma fokalpunktens läge i ett laserbearbetningssystem
JP2910763B1 (ja) * 1998-06-03 1999-06-23 スズキ株式会社 溶接レーザの焦点位置検出装置
SE518836C2 (sv) 1999-05-25 2002-11-26 Flir Systems Ab Anordning och förfarande för ett infrarött bildanalyserande autofokus
US6483071B1 (en) * 2000-05-16 2002-11-19 General Scanning Inc. Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site
US6467178B1 (en) * 2000-09-11 2002-10-22 Abb Automation Inc. Method and apparatus for beam tool center point calibration
US6649863B2 (en) * 2001-01-16 2003-11-18 Potomac Photonics, Inc. Gemstone marking system with a focus sensing unit for sensing relative disposition between a marking surface of the gemstone and a focal plane of a laser beam
EP1750891B1 (fr) * 2005-06-23 2007-10-24 Trumpf Werkzeugmaschinen GmbH + Co. KG Procede de determination de la position focale d'un faisceau laser
CN101346669B (zh) * 2005-10-26 2012-12-05 麦克罗尼克激光系统公司 写入装置及写入方法
WO2007050022A2 (fr) * 2005-10-26 2007-05-03 Micronic Laser Systems Ab Appareils et procedes d'ecriture
US8122846B2 (en) 2005-10-26 2012-02-28 Micronic Mydata AB Platforms, apparatuses, systems and methods for processing and analyzing substrates
JP2009528561A (ja) * 2006-02-28 2009-08-06 マイクロニック レーザー システムズ アクチボラゲット 基材を処理し、解析する、プラットフォーム、装置、システム、及び方法
JP5759232B2 (ja) * 2011-04-04 2015-08-05 キヤノン株式会社 測定装置
US9170170B2 (en) * 2011-12-22 2015-10-27 Ziemer Ophthalmic Systems Ag Device and method for determining the focus position of a laser beam
JP6453780B2 (ja) 2013-03-12 2019-01-16 マイクロニック アーベーＭｙｃｒｏｎｉｃ Ａｂ 機械的に形成されるアライメント基準体の方法及び装置
WO2014140047A2 (fr) 2013-03-12 2014-09-18 Micronic Mydata AB Procédé et dispositif d'écriture de masques photographiques avec réduction des erreurs mura
CN106462140B (zh) * 2014-04-30 2019-04-26 Abb瑞士股份有限公司 用于标定工业机器人系统的工具中心点的方法
DE102015001421B4 (de) 2015-02-06 2016-09-15 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Vorrichtung und Verfahren zur Strahldiagnose an Laserbearbeitungs-Optiken (PRl-2015-001)
DE102015004163B4 (de) 2015-04-01 2017-03-23 Primes Gmbh Vorrichtung und Verfahren zur Bestimmung von Eigenschaften eines Laserstrahls
DE102015016240B3 (de) 2015-12-16 2017-05-24 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Transparente Mess-Sonde für Strahl-Abtastung
DE102016011568B4 (de) 2016-09-26 2019-03-07 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Vorrichtung und Verfahren zur Bestimmung von räumlichen Abmessungen eines Lichtstrahls
DE102017005418B4 (de) 2017-06-09 2019-12-24 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Vorrichtung zur Abtastung eines Lichtstrahls

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3555280A (en) * 1966-04-19 1971-01-12 Hycon Mfg Co Automatic focus sensor and control
US3571598A (en) * 1969-12-08 1971-03-23 Mc Donnell Douglas Corp Automatic focusing means using an analog signal correlator
US4008965A (en) * 1972-05-06 1977-02-22 Asahi Optical Co., Ltd. Method and device for use in detecting a precise focusing point
US4009392A (en) * 1976-01-26 1977-02-22 The United States Of America As Represented By The Secretary Of The Navy Radiation focus meter
GB2083216B (en) * 1980-09-02 1984-01-11 Amada Co Ltd Determining the focus position of focused beams
DE3623409A1 (de) * 1986-07-11 1988-01-21 Bias Forschung & Entwicklung Verfahren zur ueberwachung des bearbeitungsprozesses mit einer hochleistungsenergiequelle, insbesondere einem laser, und bearbeitungsoptik zur durchfuehrung desselben
JP2798218B2 (ja) * 1990-01-08 1998-09-17 三菱重工業株式会社 レーザ溶接モニタリング装置
US5048953A (en) * 1990-02-05 1991-09-17 Industrial Technology Research Institute Optical collimating, laser ray target position indicating and laser ray absorbing device of a laser system
DE19516376C2 (de) * 1995-05-04 1998-12-03 Blz Gmbh Verfahren und Vorrichtung zur Kontrolle und Regelung der Brennfleckposition bei der Lasermaterialbearbeitung

Also Published As

Publication number Publication date
WO1998050196A1 (fr) 1998-11-12
JP2001523167A (ja) 2001-11-20
US6151109A (en) 2000-11-21
SE9701710D0 (sv) 1997-05-07
SE9701710L (sv) 1998-09-14
AU7462498A (en) 1998-11-27
EP1007268A1 (fr) 2000-06-14

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