SE461300B - Tryckmaetare - Google Patents

Tryckmaetare

Info

Publication number
SE461300B
SE461300B SE8801848A SE8801848A SE461300B SE 461300 B SE461300 B SE 461300B SE 8801848 A SE8801848 A SE 8801848A SE 8801848 A SE8801848 A SE 8801848A SE 461300 B SE461300 B SE 461300B
Authority
SE
Sweden
Prior art keywords
pressure
sensor element
support plate
pressure sensor
tubes
Prior art date
Application number
SE8801848A
Other languages
English (en)
Swedish (sv)
Other versions
SE8801848D0 (sv
SE8801848L (sv
Inventor
S Jonsson
Original Assignee
Hydrolab Ab
Jonsson & Billquist Dev Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hydrolab Ab, Jonsson & Billquist Dev Ab filed Critical Hydrolab Ab
Priority to SE8801848A priority Critical patent/SE461300B/sv
Publication of SE8801848D0 publication Critical patent/SE8801848D0/xx
Priority to DE89906212T priority patent/DE68909045D1/de
Priority to JP1505748A priority patent/JPH03504277A/ja
Priority to EP89906212A priority patent/EP0417156B1/en
Priority to PCT/SE1989/000270 priority patent/WO1989011640A1/en
Priority to US07/634,196 priority patent/US5249469A/en
Publication of SE8801848L publication Critical patent/SE8801848L/
Publication of SE461300B publication Critical patent/SE461300B/sv
Priority to FI905690A priority patent/FI905690A0/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
SE8801848A 1988-05-17 1988-05-17 Tryckmaetare SE461300B (sv)

Priority Applications (7)

Application Number Priority Date Filing Date Title
SE8801848A SE461300B (sv) 1988-05-17 1988-05-17 Tryckmaetare
DE89906212T DE68909045D1 (en) 1988-05-17 1989-05-17 Manometer.
JP1505748A JPH03504277A (ja) 1988-05-17 1989-05-17 圧力計
EP89906212A EP0417156B1 (en) 1988-05-17 1989-05-17 A pressure gauge
PCT/SE1989/000270 WO1989011640A1 (en) 1988-05-17 1989-05-17 A pressure gauge
US07/634,196 US5249469A (en) 1988-05-17 1989-05-17 Pressure gauge
FI905690A FI905690A0 (fi) 1988-05-17 1990-11-16 Tryckmaetare.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE8801848A SE461300B (sv) 1988-05-17 1988-05-17 Tryckmaetare

Publications (3)

Publication Number Publication Date
SE8801848D0 SE8801848D0 (sv) 1988-05-18
SE8801848L SE8801848L (sv) 1989-11-18
SE461300B true SE461300B (sv) 1990-01-29

Family

ID=20372349

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8801848A SE461300B (sv) 1988-05-17 1988-05-17 Tryckmaetare

Country Status (7)

Country Link
US (1) US5249469A (ja)
EP (1) EP0417156B1 (ja)
JP (1) JPH03504277A (ja)
DE (1) DE68909045D1 (ja)
FI (1) FI905690A0 (ja)
SE (1) SE461300B (ja)
WO (1) WO1989011640A1 (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5271277A (en) * 1991-12-23 1993-12-21 The Boc Group, Inc. Capacitance pressure transducer
US5902933A (en) * 1993-02-22 1999-05-11 Omron Corporation Pressure sensor and its application
EP0706038B1 (en) * 1994-10-07 1999-01-13 Omron Corporation Capacitive pressure sensor with two chambers
US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6612176B2 (en) * 2000-12-28 2003-09-02 Mks Instruments, Inc. Pressure transducer assembly with thermal shield
US6837112B2 (en) * 2003-03-22 2005-01-04 Stec Inc. Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
US6993973B2 (en) 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
JP4702311B2 (ja) * 2007-03-19 2011-06-15 トヨタ自動車株式会社 コンデンサを備えた電気ユニット
DE102017126121A1 (de) * 2017-11-08 2019-05-09 Tdk Electronics Ag Drucksensorsystem mit Schutz vor einfrierendem Medium

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2714703A (en) * 1954-10-26 1955-08-02 Avieu Knickerbocker Inc Transducer
US3619742A (en) * 1970-05-21 1971-11-09 Rosemount Eng Co Ltd Shielded capacitance pressure sensor
US4168517A (en) * 1977-11-10 1979-09-18 Lee Shih Y Capacitive pressure transducer
JPS56141531A (en) * 1980-04-04 1981-11-05 Toshiba Corp Pressure transducer
US4358814A (en) * 1980-10-27 1982-11-09 Setra Systems, Inc. Capacitive pressure sensor
US4389895A (en) * 1981-07-27 1983-06-28 Rosemount Inc. Capacitance pressure sensor
JPS5826237A (ja) * 1981-08-07 1983-02-16 Mitsubishi Electric Corp 圧力センサ
US4415948A (en) * 1981-10-13 1983-11-15 United Technologies Corporation Electrostatic bonded, silicon capacitive pressure transducer
US4422125A (en) * 1982-05-21 1983-12-20 The Bendix Corporation Pressure transducer with an invariable reference capacitor
DE3404262A1 (de) * 1983-03-09 1984-09-13 Fuji Electric Co., Ltd., Kawasaki Kapazitiver messfuehler
US4562742A (en) * 1984-08-07 1986-01-07 Bell Microcomponents, Inc. Capacitive pressure transducer
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
US4586109A (en) * 1985-04-01 1986-04-29 Bourns Instruments, Inc. Batch-process silicon capacitive pressure sensor
SE459887B (sv) * 1987-02-12 1989-08-14 Hydrolab Ab Tryckgivare
FI78784C (fi) * 1988-01-18 1989-09-11 Vaisala Oy Tryckgivarkonstruktion och foerfarande foer framstaellning daerav.
US4823603A (en) * 1988-05-03 1989-04-25 Vacuum General, Inc. Capacitance manometer having stress relief for fixed electrode

Also Published As

Publication number Publication date
WO1989011640A1 (en) 1989-11-30
SE8801848D0 (sv) 1988-05-18
JPH03504277A (ja) 1991-09-19
FI905690A0 (fi) 1990-11-16
EP0417156A1 (en) 1991-03-20
EP0417156B1 (en) 1993-09-08
US5249469A (en) 1993-10-05
DE68909045D1 (en) 1993-10-14
SE8801848L (sv) 1989-11-18

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