SE403523B - Ljuskeslig platta for framstellning av en fotografisk mask - Google Patents

Ljuskeslig platta for framstellning av en fotografisk mask

Info

Publication number
SE403523B
SE403523B SE7500730A SE7500730A SE403523B SE 403523 B SE403523 B SE 403523B SE 7500730 A SE7500730 A SE 7500730A SE 7500730 A SE7500730 A SE 7500730A SE 403523 B SE403523 B SE 403523B
Authority
SE
Sweden
Prior art keywords
making
photographic mask
great plate
great
plate
Prior art date
Application number
SE7500730A
Other languages
English (en)
Other versions
SE7500730L (sv
Inventor
F J Loprest
D E Barr
Original Assignee
Gaf Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gaf Corp filed Critical Gaf Corp
Publication of SE7500730L publication Critical patent/SE7500730L/xx
Publication of SE403523B publication Critical patent/SE403523B/sv

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C1/00—Photosensitive materials
    • G03C1/52—Compositions containing diazo compounds as photosensitive substances

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
SE7500730A 1970-06-11 1975-01-23 Ljuskeslig platta for framstellning av en fotografisk mask SE403523B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US4559070A 1970-06-11 1970-06-11

Publications (2)

Publication Number Publication Date
SE7500730L SE7500730L (sv) 1975-01-23
SE403523B true SE403523B (sv) 1978-08-21

Family

ID=21938804

Family Applications (2)

Application Number Title Priority Date Filing Date
SE7107192A SE380360B (sv) 1970-06-11 1971-06-03 Fotografisk mask
SE7500730A SE403523B (sv) 1970-06-11 1975-01-23 Ljuskeslig platta for framstellning av en fotografisk mask

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SE7107192A SE380360B (sv) 1970-06-11 1971-06-03 Fotografisk mask

Country Status (13)

Country Link
US (1) US3744904A (sv)
JP (1) JPS5040008B1 (sv)
BE (1) BE768355A (sv)
CA (1) CA944203A (sv)
CH (1) CH558029A (sv)
DD (1) DD99866A5 (sv)
DE (2) DE2166726A1 (sv)
FR (1) FR2096224A5 (sv)
GB (1) GB1360637A (sv)
IL (1) IL36862A0 (sv)
IT (1) IT943583B (sv)
NL (1) NL7107987A (sv)
SE (2) SE380360B (sv)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7201333A (sv) * 1972-02-02 1973-08-06
JPS50902A (sv) * 1973-05-04 1975-01-08
JPS5065232A (sv) * 1973-10-09 1975-06-02
JPS5230848B2 (sv) * 1973-10-09 1977-08-11
US3936301A (en) * 1974-04-01 1976-02-03 Bell Telephone Laboratories, Incorporated Process for contact photolithography utilizing a photomask having indented channels
US4126466A (en) * 1974-07-22 1978-11-21 E. I. Du Pont De Nemours And Company Composite, mask-forming, photohardenable elements
US4205989A (en) * 1976-04-14 1980-06-03 Kimoto & Co., Ltd. Dry system image producing element
US4374911A (en) * 1978-04-28 1983-02-22 International Business Machines Corporation Photo method of making tri-level density photomask
US4536240A (en) * 1981-12-02 1985-08-20 Advanced Semiconductor Products, Inc. Method of forming thin optical membranes
CA2019693A1 (en) * 1989-07-07 1991-01-07 Karen Ann Graziano Acid-hardening photoresists of improved sensitivity
DE4107762B4 (de) * 1990-03-09 2006-07-13 Dai Nippon Printing Co., Ltd. Verfahren zum Herstellen von Master- und Arbeitsmusterplatten für den Ätzprozess
US5801833A (en) * 1991-03-08 1998-09-01 Dai Nippon Printing Co., Ltd. Method of producing master and working pattern plates for etching and photolithographic apparatus therefor
US6350555B1 (en) * 1998-01-14 2002-02-26 Precision Coatings, Inc. Direct write imaging medium
CA2787249C (en) 2009-01-29 2017-09-12 Digiflex Ltd. Process for producing a photomask on a photopolymeric surface
WO2011090355A2 (ko) 2010-01-22 2011-07-28 (주)Lg화학 광배향막 배향 처리용 점착 필름

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3510371A (en) * 1967-01-25 1970-05-05 Itt Method of making an ultraviolet sensitive template
US3592649A (en) * 1967-04-21 1971-07-13 Mead Corp Color photographic process for producing visually transparent but photographically opaque photomasks
US3542612A (en) * 1967-08-11 1970-11-24 Western Electric Co Photolithographic masks and methods for their manufacture

Also Published As

Publication number Publication date
DD99866A5 (sv) 1973-08-20
US3744904A (en) 1973-07-10
GB1360637A (en) 1974-07-17
DE2166726A1 (de) 1975-08-14
NL7107987A (sv) 1971-12-14
IL36862A0 (en) 1971-07-28
SE380360B (sv) 1975-11-03
BE768355A (fr) 1971-11-03
DE2128654A1 (de) 1971-12-16
FR2096224A5 (sv) 1972-02-11
SE7500730L (sv) 1975-01-23
CH558029A (de) 1975-01-15
CA944203A (en) 1974-03-26
IT943583B (it) 1973-04-10
JPS5040008B1 (sv) 1975-12-20

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