SE398023B - Anordning for samtidig drift av ett antal gasurladdningselektronkanoner - Google Patents

Anordning for samtidig drift av ett antal gasurladdningselektronkanoner

Info

Publication number
SE398023B
SE398023B SE7505869A SE7505869A SE398023B SE 398023 B SE398023 B SE 398023B SE 7505869 A SE7505869 A SE 7505869A SE 7505869 A SE7505869 A SE 7505869A SE 398023 B SE398023 B SE 398023B
Authority
SE
Sweden
Prior art keywords
simultaneous operation
electron guns
gas charge
charge electron
gas
Prior art date
Application number
SE7505869A
Other languages
English (en)
Swedish (sv)
Other versions
SE7505869L (sv
Inventor
T M B Schoenmakers
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of SE7505869L publication Critical patent/SE7505869L/
Publication of SE398023B publication Critical patent/SE398023B/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/077Electron guns using discharge in gases or vapours as electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Electron Beam Exposure (AREA)
SE7505869A 1974-05-27 1975-05-23 Anordning for samtidig drift av ett antal gasurladdningselektronkanoner SE398023B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7407058A NL7407058A (nl) 1974-05-27 1974-05-27 Inrichting voor het gelijktijdig bedrijven van een aantal gasontladingselektronenkanonnen.

Publications (2)

Publication Number Publication Date
SE7505869L SE7505869L (sv) 1975-11-28
SE398023B true SE398023B (sv) 1977-11-28

Family

ID=19821435

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7505869A SE398023B (sv) 1974-05-27 1975-05-23 Anordning for samtidig drift av ett antal gasurladdningselektronkanoner

Country Status (8)

Country Link
JP (1) JPS55853B2 (enrdf_load_stackoverflow)
AT (1) AT331370B (enrdf_load_stackoverflow)
CA (1) CA1030588A (enrdf_load_stackoverflow)
CH (1) CH585964A5 (enrdf_load_stackoverflow)
FR (1) FR2273367B1 (enrdf_load_stackoverflow)
GB (1) GB1518153A (enrdf_load_stackoverflow)
NL (1) NL7407058A (enrdf_load_stackoverflow)
SE (1) SE398023B (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS514495A (enrdf_load_stackoverflow) 1976-01-14
GB1518153A (en) 1978-07-19
DE2521427A1 (de) 1975-12-11
FR2273367B1 (enrdf_load_stackoverflow) 1979-03-30
ATA399175A (de) 1975-11-15
SE7505869L (sv) 1975-11-28
NL7407058A (nl) 1975-12-01
DE2521427B2 (de) 1976-10-21
JPS55853B2 (enrdf_load_stackoverflow) 1980-01-10
CA1030588A (en) 1978-05-02
AT331370B (de) 1976-08-25
FR2273367A1 (enrdf_load_stackoverflow) 1975-12-26
CH585964A5 (enrdf_load_stackoverflow) 1977-03-15

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