SE392360B - Aluminium-tantalskikt for tunnskiktskopplingar samt diskreta motstand och kondensatorer - Google Patents

Aluminium-tantalskikt for tunnskiktskopplingar samt diskreta motstand och kondensatorer

Info

Publication number
SE392360B
SE392360B SE7314493A SE7314493A SE392360B SE 392360 B SE392360 B SE 392360B SE 7314493 A SE7314493 A SE 7314493A SE 7314493 A SE7314493 A SE 7314493A SE 392360 B SE392360 B SE 392360B
Authority
SE
Sweden
Prior art keywords
tantal
capacitors
aluminum
layers
thin layer
Prior art date
Application number
SE7314493A
Other languages
English (en)
Swedish (sv)
Inventor
Alois Schauer
Manfred Roschy
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19722253490 external-priority patent/DE2253490C3/de
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of SE392360B publication Critical patent/SE392360B/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006Thin film resistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00Electric solid-state thin-film or thick-film devices, not otherwise provided for
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31678Of metal
SE7314493A 1972-10-31 1973-10-25 Aluminium-tantalskikt for tunnskiktskopplingar samt diskreta motstand och kondensatorer SE392360B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722253490 DE2253490C3 (de) 1972-10-31 Aluminium-Tantal-Schichten für Dünnschichtschaltungen sowie diskrete Widerstände und Kondensatoren

Publications (1)

Publication Number Publication Date
SE392360B true SE392360B (sv) 1977-03-21

Family

ID=5860570

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7314493A SE392360B (sv) 1972-10-31 1973-10-25 Aluminium-tantalskikt for tunnskiktskopplingar samt diskreta motstand och kondensatorer

Country Status (15)

Country Link
US (1) US3955039A (fr)
JP (1) JPS5815933B2 (fr)
AT (1) AT341630B (fr)
BE (1) BE806831A (fr)
CH (1) CH559410A5 (fr)
FR (1) FR2204850B1 (fr)
GB (1) GB1398254A (fr)
IN (1) IN142001B (fr)
IT (1) IT998990B (fr)
LU (1) LU67831A1 (fr)
NL (1) NL183111C (fr)
NO (1) NO136126C (fr)
SE (1) SE392360B (fr)
SU (1) SU518166A3 (fr)
YU (1) YU283373A (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2546675C3 (de) * 1975-10-17 1979-08-02 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen einer Dünnschichtschaltung
DE2703636C3 (de) * 1977-01-28 1985-10-10 Siemens AG, 1000 Berlin und 8000 München Regenerierfähiger elektrischer Kondensator und Verfahren zu seiner Herstellung
DE2719988C2 (de) * 1977-05-04 1983-01-05 Siemens AG, 1000 Berlin und 8000 München Amorphe, Tantal enthaltende mindestens bis 300 Grad C temperaturstabile Metallschicht und Verfahren zu ihrer Herstellung
JPS6045008A (ja) * 1983-08-22 1985-03-11 松下電器産業株式会社 薄膜コンデンサの製造方法
US4671110A (en) * 1984-12-06 1987-06-09 Kock Michiel D De Level sensing device
DE3867120D1 (de) * 1987-04-28 1992-02-06 Yoshida Kogyo Kk Amorphe alluminiumlegierungen.
FR2642891B1 (fr) * 1989-02-03 1993-12-24 Marchal Equip Automobiles Resistance shunt
CA2028123C (fr) * 1989-02-28 1998-02-10 Kenji Hasegawa Tete d'impression a jet d'encre munie d'une resistance chauffante fabriquee a partir d'une matiere cristalline pluricellulaire contenant du ir, du ta et d'autres matieres, et dispositif d'impression a jet d'encre dote de ladite tete d'impression
US5500301A (en) * 1991-03-07 1996-03-19 Kabushiki Kaisha Kobe Seiko Sho A1 alloy films and melting A1 alloy sputtering targets for depositing A1 alloy films
DE69321862T2 (de) * 1992-04-07 1999-05-12 Koji Hashimoto Temperatur resistente amorphe Legierungen
US6348113B1 (en) * 1998-11-25 2002-02-19 Cabot Corporation High purity tantalum, products containing the same, and methods of making the same
US6140909A (en) * 1999-03-23 2000-10-31 Industrial Technology Research Institute Heat-generating resistor and use thereof
US6692586B2 (en) 2001-05-23 2004-02-17 Rolls-Royce Corporation High temperature melting braze materials for bonding niobium based alloys

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3013193A (en) * 1960-01-11 1961-12-12 Battelle Development Corp Compound semiconductor devices
US3627577A (en) * 1968-05-22 1971-12-14 Bell Telephone Labor Inc Thin film resistors
US3737343A (en) * 1971-04-19 1973-06-05 Bell Telephone Labor Inc Technique for the preparation of ion implanted tantalum-aluminum alloy

Also Published As

Publication number Publication date
NL7311843A (fr) 1974-05-02
CH559410A5 (fr) 1975-02-28
NL183111C (nl) 1988-07-18
DE2253490B2 (de) 1975-10-30
US3955039A (en) 1976-05-04
GB1398254A (en) 1975-06-18
JPS5815933B2 (ja) 1983-03-28
AU6079473A (en) 1975-03-27
YU283373A (en) 1982-06-30
FR2204850A1 (fr) 1974-05-24
FR2204850B1 (fr) 1978-06-23
IN142001B (fr) 1977-05-14
NO136126B (fr) 1977-04-12
AT341630B (de) 1978-02-27
JPS4977174A (fr) 1974-07-25
ATA889673A (de) 1977-06-15
NO136126C (no) 1977-07-20
DE2253490A1 (de) 1974-07-11
IT998990B (it) 1976-02-20
BE806831A (fr) 1974-02-15
LU67831A1 (fr) 1973-08-28
SU518166A3 (ru) 1976-06-15

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