SE382772B - Forfarande for att bryta en tunn bricka av brecklig monostabil kisel lengs i forveg bestemda linjer - Google Patents

Forfarande for att bryta en tunn bricka av brecklig monostabil kisel lengs i forveg bestemda linjer

Info

Publication number
SE382772B
SE382772B SE1232871A SE1232871A SE382772B SE 382772 B SE382772 B SE 382772B SE 1232871 A SE1232871 A SE 1232871A SE 1232871 A SE1232871 A SE 1232871A SE 382772 B SE382772 B SE 382772B
Authority
SE
Sweden
Prior art keywords
monostable
fragrant
breaking
procedure
advance determined
Prior art date
Application number
SE1232871A
Other languages
English (en)
Swedish (sv)
Inventor
P Delivorias
T Kamprath
Original Assignee
Rca Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rca Corp filed Critical Rca Corp
Publication of SE382772B publication Critical patent/SE382772B/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304Mechanical treatment, e.g. grinding, polishing, cutting
    • H01L21/3043Making grooves, e.g. cutting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604Chemical etching
    • H01L21/30608Anisotropic liquid etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Weting (AREA)
  • Silicon Compounds (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • ing And Chemical Polishing (AREA)
  • Dicing (AREA)
SE1232871A 1970-09-30 1971-09-29 Forfarande for att bryta en tunn bricka av brecklig monostabil kisel lengs i forveg bestemda linjer SE382772B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US7677770A 1970-09-30 1970-09-30

Publications (1)

Publication Number Publication Date
SE382772B true SE382772B (sv) 1976-02-16

Family

ID=22134121

Family Applications (1)

Application Number Title Priority Date Filing Date
SE1232871A SE382772B (sv) 1970-09-30 1971-09-29 Forfarande for att bryta en tunn bricka av brecklig monostabil kisel lengs i forveg bestemda linjer

Country Status (9)

Country Link
JP (1) JPS5010095B1 (enrdf_load_stackoverflow)
BE (1) BE773286A (enrdf_load_stackoverflow)
CA (1) CA926035A (enrdf_load_stackoverflow)
DE (1) DE2147703A1 (enrdf_load_stackoverflow)
ES (2) ES395341A1 (enrdf_load_stackoverflow)
FR (1) FR2108602A5 (enrdf_load_stackoverflow)
GB (1) GB1297235A (enrdf_load_stackoverflow)
NL (1) NL7113366A (enrdf_load_stackoverflow)
SE (1) SE382772B (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5284893A (en) * 1975-12-30 1977-07-14 Matsushita Electric Works Ltd Shoulder patting device circuit configuration
JPS5284894A (en) * 1975-12-30 1977-07-14 Matsushita Electric Works Ltd Shoulder patting device circuit configuration
JP4515790B2 (ja) * 2004-03-08 2010-08-04 株式会社東芝 半導体装置の製造方法及びその製造装置

Also Published As

Publication number Publication date
GB1297235A (enrdf_load_stackoverflow) 1972-11-22
DE2147703A1 (de) 1972-04-06
CA926035A (en) 1973-05-08
NL7113366A (enrdf_load_stackoverflow) 1972-04-05
ES395341A1 (es) 1974-12-16
JPS5010095B1 (enrdf_load_stackoverflow) 1975-04-18
FR2108602A5 (enrdf_load_stackoverflow) 1972-05-19
ES419651A1 (es) 1976-05-16
BE773286A (fr) 1972-01-17
AU3334071A (en) 1973-03-15

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