Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
  • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
  • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
  • H01L21/3043—Making grooves, e.g. cutting
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
  • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
  • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
  • H01L21/30604—Chemical etching
  • H01L21/30608—Anisotropic liquid etching

Landscapes

• Engineering & Computer Science (AREA)
• Computer Hardware Design (AREA)
• Manufacturing & Machinery (AREA)
• Physics & Mathematics (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Power Engineering (AREA)
• Chemical & Material Sciences (AREA)
• General Chemical & Material Sciences (AREA)
• Chemical Kinetics & Catalysis (AREA)
• Weting (AREA)
• Silicon Compounds (AREA)
• Processing Of Stones Or Stones Resemblance Materials (AREA)
• ing And Chemical Polishing (AREA)
• Dicing (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=22134121

Family Applications (1)

Country Status (9)

Families Citing this family (3)

• 1971
  • 1971-07-14 CA CA118269A patent/CA926035A/en not_active Expired
  • 1971-09-23 ES ES395341A patent/ES395341A1/es not_active Expired
  • 1971-09-23 GB GB1297235D patent/GB1297235A/en not_active Expired
  • 1971-09-24 DE DE19712147703 patent/DE2147703A1/de active Pending
  • 1971-09-27 FR FR7134682A patent/FR2108602A5/fr not_active Expired
  • 1971-09-29 BE BE773286A patent/BE773286A/xx unknown
  • 1971-09-29 JP JP46076230A patent/JPS5010095B1/ja active Pending
  • 1971-09-29 SE SE1232871A patent/SE382772B/xx unknown
  • 1971-09-29 NL NL7113366A patent/NL7113366A/xx unknown
• 1973
  • 1973-10-15 ES ES419651A patent/ES419651A1/es not_active Expired

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