SE372427B - - Google Patents

Info

Publication number
SE372427B
SE372427B SE7016055A SE1605570A SE372427B SE 372427 B SE372427 B SE 372427B SE 7016055 A SE7016055 A SE 7016055A SE 1605570 A SE1605570 A SE 1605570A SE 372427 B SE372427 B SE 372427B
Authority
SE
Sweden
Application number
SE7016055A
Inventor
K Bienert
W Lang
E Nordt
Original Assignee
Wacker Chemitronic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19691959392 external-priority patent/DE1959392C3/de
Application filed by Wacker Chemitronic filed Critical Wacker Chemitronic
Publication of SE372427B publication Critical patent/SE372427B/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S206/00—Special receptacle or package
    • Y10S206/832—Semiconductor wafer boat
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/131—Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
    • Y10T428/1317—Multilayer [continuous layer]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Ceramic Products (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
SE7016055A 1969-11-26 1970-11-26 SE372427B (cg-RX-API-DMAC10.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691959392 DE1959392C3 (de) 1969-11-26 Verwendung von mit inerten Stoffen geschützten Quarzampullen für die Herstellung und/oder Weiterverarbeitung von siliciumarmen 1I I-V-Halbleiterkörpern

Publications (1)

Publication Number Publication Date
SE372427B true SE372427B (cg-RX-API-DMAC10.html) 1974-12-23

Family

ID=5752154

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7016055A SE372427B (cg-RX-API-DMAC10.html) 1969-11-26 1970-11-26

Country Status (8)

Country Link
US (1) US3734817A (cg-RX-API-DMAC10.html)
JP (1) JPS4942419B1 (cg-RX-API-DMAC10.html)
BE (1) BE759405A (cg-RX-API-DMAC10.html)
CA (1) CA932246A (cg-RX-API-DMAC10.html)
FR (1) FR2082986A5 (cg-RX-API-DMAC10.html)
GB (1) GB1338243A (cg-RX-API-DMAC10.html)
NL (1) NL7017167A (cg-RX-API-DMAC10.html)
SE (1) SE372427B (cg-RX-API-DMAC10.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3890530A (en) * 1973-01-22 1975-06-17 Gen Electric Precoat for fluorescent lamp
JPS5231995U (cg-RX-API-DMAC10.html) * 1975-08-27 1977-03-05
US4522849A (en) * 1981-07-10 1985-06-11 General Electric Company Method for coating quartz with boron nitride
GB2183501A (en) * 1985-11-15 1987-06-10 Kollmorgen Tech Corp Horizontal bridgman crystal growth
GB2188854A (en) * 1986-04-09 1987-10-14 Philips Electronic Associated Apparatus and a method for growing a crystal using a low-pressure Czochralski method and a crucible holder for use in such apparatus and method
US5584929A (en) * 1994-03-11 1996-12-17 Sumitomo Electric Industries, Ltd. Method for preparing compound semiconductor crystal
DE69609568T2 (de) * 1995-05-26 2001-02-01 Sumitomo Electric Industries, Ltd. Verfahren zur Herstellung von einem II-VI oder III-V Halbleitereinkristall
JP2003124235A (ja) * 2001-10-17 2003-04-25 Sumitomo Electric Ind Ltd Ｉｉ−ｖｉ族化合物半導体、その熱処理方法およびその熱処理装置
CN115537921A (zh) * 2022-10-24 2022-12-30 广东先导微电子科技有限公司 一种磷化铟的合成方法

Also Published As

Publication number Publication date
FR2082986A5 (cg-RX-API-DMAC10.html) 1971-12-10
BE759405A (fr) 1971-05-25
JPS4942419B1 (cg-RX-API-DMAC10.html) 1974-11-14
US3734817A (en) 1973-05-22
CA932246A (en) 1973-08-21
NL7017167A (cg-RX-API-DMAC10.html) 1971-05-28
DE1959392B2 (de) 1973-09-13
GB1338243A (en) 1973-11-21
DE1959392A1 (de) 1971-06-03

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