SE332461B - - Google Patents

Info

Publication number
SE332461B
SE332461B SE873567A SE873567A SE332461B SE 332461 B SE332461 B SE 332461B SE 873567 A SE873567 A SE 873567A SE 873567 A SE873567 A SE 873567A SE 332461 B SE332461 B SE 332461B
Authority
SE
Sweden
Prior art keywords
target
ions
analyser
june
aperture
Prior art date
Application number
SE873567A
Other languages
English (en)
Inventor
H Werner
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of SE332461B publication Critical patent/SE332461B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
SE873567A 1966-06-23 1967-06-20 SE332461B (cg-RX-API-DMAC7.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6608703A NL6608703A (cg-RX-API-DMAC7.html) 1966-06-23 1966-06-23

Publications (1)

Publication Number Publication Date
SE332461B true SE332461B (cg-RX-API-DMAC7.html) 1971-02-08

Family

ID=19796959

Family Applications (1)

Application Number Title Priority Date Filing Date
SE873567A SE332461B (cg-RX-API-DMAC7.html) 1966-06-23 1967-06-20

Country Status (4)

Country Link
CH (1) CH463829A (cg-RX-API-DMAC7.html)
GB (1) GB1185203A (cg-RX-API-DMAC7.html)
NL (1) NL6608703A (cg-RX-API-DMAC7.html)
SE (1) SE332461B (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8703012D0 (en) * 1987-02-10 1987-03-18 Vg Instr Group Secondary ion mass spectrometer

Also Published As

Publication number Publication date
CH463829A (de) 1968-10-15
GB1185203A (en) 1970-03-25
NL6608703A (cg-RX-API-DMAC7.html) 1967-12-27

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