SE0602119L - Uppvärmningsenhet med ett motståndselement format som ett ledningsmönster - Google Patents

Uppvärmningsenhet med ett motståndselement format som ett ledningsmönster

Info

Publication number
SE0602119L
SE0602119L SE0602119A SE0602119A SE0602119L SE 0602119 L SE0602119 L SE 0602119L SE 0602119 A SE0602119 A SE 0602119A SE 0602119 A SE0602119 A SE 0602119A SE 0602119 L SE0602119 L SE 0602119L
Authority
SE
Sweden
Prior art keywords
resistive element
heating unit
wiring pattern
resistance element
element shaped
Prior art date
Application number
SE0602119A
Other languages
English (en)
Other versions
SE530400C2 (sv
Inventor
Mats Sundberg
Original Assignee
Sandvik Intellectual Property
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sandvik Intellectual Property filed Critical Sandvik Intellectual Property
Priority to SE0602119A priority Critical patent/SE530400C2/sv
Priority to PCT/SE2007/050629 priority patent/WO2008044987A1/en
Priority to US12/311,549 priority patent/US8835817B2/en
Priority to KR1020097007271A priority patent/KR101419563B1/ko
Priority to EP07808866.3A priority patent/EP2082617B1/en
Publication of SE0602119L publication Critical patent/SE0602119L/sv
Publication of SE530400C2 publication Critical patent/SE530400C2/sv

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
    • H05B3/265—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/16—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor the conductor being mounted on an insulating base
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • H05B3/143—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/003—Heaters using a particular layout for the resistive material or resistive elements using serpentine layout
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/011—Heaters using laterally extending conductive material as connecting means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/013—Heaters using resistive films or coatings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/037—Heaters with zones of different power density

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Resistance Heating (AREA)
  • Non-Adjustable Resistors (AREA)
SE0602119A 2006-10-09 2006-10-09 Uppvärmningsenhet med ett motståndselement format som ett ledningsmönster SE530400C2 (sv)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SE0602119A SE530400C2 (sv) 2006-10-09 2006-10-09 Uppvärmningsenhet med ett motståndselement format som ett ledningsmönster
PCT/SE2007/050629 WO2008044987A1 (en) 2006-10-09 2007-09-06 Heating unit comprising a heat resistance element shaped as a conductive pattern.
US12/311,549 US8835817B2 (en) 2006-10-09 2007-09-06 Heating unit comprising a heat resistance element shaped as a conductive pattern
KR1020097007271A KR101419563B1 (ko) 2006-10-09 2007-09-06 전도성 패턴으로서 성형된 열 저항 요소를 포함하는 가열 유닛
EP07808866.3A EP2082617B1 (en) 2006-10-09 2007-09-06 Heating unit comprising a heat resistance element shaped as a conductive pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0602119A SE530400C2 (sv) 2006-10-09 2006-10-09 Uppvärmningsenhet med ett motståndselement format som ett ledningsmönster

Publications (2)

Publication Number Publication Date
SE0602119L true SE0602119L (sv) 2008-04-10
SE530400C2 SE530400C2 (sv) 2008-05-20

Family

ID=39283106

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0602119A SE530400C2 (sv) 2006-10-09 2006-10-09 Uppvärmningsenhet med ett motståndselement format som ett ledningsmönster

Country Status (5)

Country Link
US (1) US8835817B2 (sv)
EP (1) EP2082617B1 (sv)
KR (1) KR101419563B1 (sv)
SE (1) SE530400C2 (sv)
WO (1) WO2008044987A1 (sv)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012000977A1 (de) * 2011-04-06 2012-10-11 W.E.T. Automotive Systems Ag Heizeinrichtung für komplex geformte Oberflächen
PL3108760T3 (pl) 2012-12-28 2018-06-29 Philip Morris Products S.A. Zespół grzejny do układu wytwarzania aerozolu
DE102016120536A1 (de) * 2016-10-27 2018-05-03 Heraeus Noblelight Gmbh Infrarotstrahler

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11157953A (ja) 1997-12-02 1999-06-15 Nhk Spring Co Ltd セラミックスと金属との構造体及びそれを用いた静電チャック装置
JP2001307947A (ja) * 2000-04-25 2001-11-02 Tdk Corp 積層チップ部品及びその製造方法
WO2002009171A1 (fr) * 2000-07-25 2002-01-31 Ibiden Co., Ltd. Substrat ceramique pour appareil de fabrication/inspection de semi-conducteurs, element chauffant en ceramique, dispositif de retenue electrostatique sans attache et substrat pour testeur de tranches
US7211153B2 (en) * 2001-04-13 2007-05-01 Sumitomo Electric Industries, Ltd. Ceramic joined body, substrate holding structure and substrate processing apparatus
SE527199C2 (sv) * 2003-02-07 2006-01-17 Sandvik Intellectual Property Användning av ett material i oxiderande miljö vid hög temperatur
JP4476701B2 (ja) * 2004-06-02 2010-06-09 日本碍子株式会社 電極内蔵焼結体の製造方法
JP4542485B2 (ja) * 2004-12-14 2010-09-15 日本碍子株式会社 アルミナ部材及びその製造方法

Also Published As

Publication number Publication date
EP2082617B1 (en) 2015-11-11
KR101419563B1 (ko) 2014-07-14
KR20090064441A (ko) 2009-06-18
US8835817B2 (en) 2014-09-16
US20090302028A1 (en) 2009-12-10
EP2082617A1 (en) 2009-07-29
EP2082617A4 (en) 2014-05-07
SE530400C2 (sv) 2008-05-20
WO2008044987A1 (en) 2008-04-17

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