SE0000167D0 - Apparatus for plasma treatment of surface - Google Patents

Apparatus for plasma treatment of surface

Info

Publication number
SE0000167D0
SE0000167D0 SE0000167A SE0000167A SE0000167D0 SE 0000167 D0 SE0000167 D0 SE 0000167D0 SE 0000167 A SE0000167 A SE 0000167A SE 0000167 A SE0000167 A SE 0000167A SE 0000167 D0 SE0000167 D0 SE 0000167D0
Authority
SE
Sweden
Prior art keywords
gas
hollow cathode
plasma
treated
inner walls
Prior art date
Application number
SE0000167A
Other languages
English (en)
Other versions
SE516336C2 (sv
SE0000167L (sv
Inventor
Hana Barankova
Ladislav Bardos
Original Assignee
Hana Barankova
Ladislav Bardos
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from SE9901527A external-priority patent/SE516722C2/sv
Application filed by Hana Barankova, Ladislav Bardos filed Critical Hana Barankova
Priority to SE0000167A priority Critical patent/SE516336C2/sv
Publication of SE0000167D0 publication Critical patent/SE0000167D0/sv
Priority to AU44464/00A priority patent/AU4446400A/en
Priority to EP00925836A priority patent/EP1177714B1/en
Priority to JP2000614707A priority patent/JP4699614B2/ja
Priority to PCT/SE2000/000791 priority patent/WO2000065887A1/en
Publication of SE0000167L publication Critical patent/SE0000167L/sv
Publication of SE516336C2 publication Critical patent/SE516336C2/sv

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/88—Handling or mounting catalysts
    • B01D53/885—Devices in general for catalytic purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/063—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating electric heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F23J15/022—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material for removing solid particulate material from the gasflow
    • F23J15/025—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material for removing solid particulate material from the gasflow using filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0801—Controlling the process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0809—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes employing two or more electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0816—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes involving moving electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0824—Details relating to the shape of the electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0824—Details relating to the shape of the electrodes
    • B01J2219/0826—Details relating to the shape of the electrodes essentially linear
    • B01J2219/083—Details relating to the shape of the electrodes essentially linear cylindrical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/085—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy creating magnetic fields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0871—Heating or cooling of the reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0875—Gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0892—Materials to be treated involving catalytically active material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2204/00—Supplementary heating arrangements
    • F23G2204/20—Supplementary heating arrangements using electric energy
    • F23G2204/201—Plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/10—Treatment of gases
    • H05H2245/17—Exhaust gases

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Organic Chemistry (AREA)
  • Toxicology (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treating Waste Gases (AREA)
  • Exhaust Gas After Treatment (AREA)
SE0000167A 1999-04-28 2000-01-20 Apparat för plasmabehandling av ytor SE516336C2 (sv)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SE0000167A SE516336C2 (sv) 1999-04-28 2000-01-20 Apparat för plasmabehandling av ytor
AU44464/00A AU4446400A (en) 1999-04-28 2000-04-27 Method and apparatuses for plasma treatment
EP00925836A EP1177714B1 (en) 1999-04-28 2000-04-27 Method and apparatuses for plasma treatment
JP2000614707A JP4699614B2 (ja) 1999-04-28 2000-04-27 プラズマ処置理方法及び装置
PCT/SE2000/000791 WO2000065887A1 (en) 1999-04-28 2000-04-27 Method and apparatuses for plasma treatment

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9901527A SE516722C2 (sv) 1999-04-28 1999-04-28 Förfarande och apparat för plasmabehandling av gas
SE0000167A SE516336C2 (sv) 1999-04-28 2000-01-20 Apparat för plasmabehandling av ytor

Publications (3)

Publication Number Publication Date
SE0000167D0 true SE0000167D0 (sv) 2000-01-20
SE0000167L SE0000167L (sv) 2000-10-29
SE516336C2 SE516336C2 (sv) 2001-12-17

Family

ID=26654956

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0000167A SE516336C2 (sv) 1999-04-28 2000-01-20 Apparat för plasmabehandling av ytor

Country Status (5)

Country Link
EP (1) EP1177714B1 (sv)
JP (1) JP4699614B2 (sv)
AU (1) AU4446400A (sv)
SE (1) SE516336C2 (sv)
WO (1) WO2000065887A1 (sv)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
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US6624583B1 (en) * 2002-06-28 2003-09-23 Motorola, Inc. Method and apparatus for plasma treating a chemical species
US7079370B2 (en) 2003-04-28 2006-07-18 Air Products And Chemicals, Inc. Apparatus and method for removal of surface oxides via fluxless technique electron attachment and remote ion generation
TWI274622B (en) * 2003-04-28 2007-03-01 Air Prod & Chem Apparatus and method for removal of surface oxides via fluxless technique involving electron attachment and remote ion generation
US8361340B2 (en) 2003-04-28 2013-01-29 Air Products And Chemicals, Inc. Removal of surface oxides by electron attachment
US7897029B2 (en) 2008-03-04 2011-03-01 Air Products And Chemicals, Inc. Removal of surface oxides by electron attachment
US7387738B2 (en) 2003-04-28 2008-06-17 Air Products And Chemicals, Inc. Removal of surface oxides by electron attachment for wafer bumping applications
FR2864795B1 (fr) * 2004-01-06 2008-04-18 Air Liquide Procede de traitement des gaz par des decharges hautes frequence
US7288469B2 (en) 2004-12-03 2007-10-30 Eastman Kodak Company Methods and apparatuses for forming an article
DE102005002142A1 (de) * 2005-01-12 2006-07-20 Forschungsverbund Berlin E.V. Mikroplasmaarray
EP1705965A1 (en) * 2005-03-21 2006-09-27 Universiteit Gent Method and system for plasma treatment under high pressure
NO326571B1 (no) * 2005-06-16 2009-01-12 Sinvent As Fremgangsmate og reaktor for fremstilling av karbon nanoror
JP5531240B2 (ja) * 2005-09-20 2014-06-25 イマジニアリング株式会社 点火装置、内燃機関、点火プラグ、及びプラズマ装置
US7434719B2 (en) 2005-12-09 2008-10-14 Air Products And Chemicals, Inc. Addition of D2 to H2 to detect and calibrate atomic hydrogen formed by dissociative electron attachment
JP4619969B2 (ja) * 2006-03-22 2011-01-26 日本碍子株式会社 プラズマ反応装置
CN100446849C (zh) * 2006-11-01 2008-12-31 浙江大学 一种高压直流/脉冲放电同步净化气液的方法及装置
FR2912864B1 (fr) * 2007-02-15 2009-07-31 H E F Soc Par Actions Simplifi Dispositif pour generer un plasma froid dans une enceinte sous vide et utilisation du dispositif pour des traitements thermochimiques
JP4955027B2 (ja) * 2009-04-02 2012-06-20 クリーン・テクノロジー株式会社 排ガス処理装置における磁場によるプラズマの制御方法
KR101713804B1 (ko) * 2011-02-18 2017-03-10 조선대학교산학협력단 바이오매스 연소 배기가스 및 폐기물의 열분해/가스화 생성가스 중 타르저감 외부가진 플라즈마 장치
CN102215626B (zh) * 2011-05-23 2012-12-12 中国科学院物理研究所 一种可在较低电压条件下产生放电等离子体的装置
CN102291923A (zh) * 2011-08-10 2011-12-21 苏州工业职业技术学院 一种等离子体喷枪
JP6242059B2 (ja) * 2013-02-18 2017-12-06 株式会社 セテック 放電プラズマリアクタ
US9240308B2 (en) * 2014-03-06 2016-01-19 Applied Materials, Inc. Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system
JP2016093762A (ja) * 2014-11-12 2016-05-26 愛知電機株式会社 マイクロ波非平衡プラズマを用いたアンモニアの処理装置及びアンモニアの処理方法
DE102015215051A1 (de) * 2015-08-06 2017-02-09 Terraplasma Gmbh Vorrichtung und Verfahren zum Erzeugen eines Plasmas, sowie Verwendung einer solchen Vorrichtung
TWI674041B (zh) * 2017-12-21 2019-10-01 雷立強光電科技股份有限公司 一種大氣電漿產生裝置
EP3849283A1 (en) * 2020-01-09 2021-07-14 terraplasma emission control GmbH Exhaust plasma apparatus
CN111773427B (zh) * 2020-07-10 2021-07-23 深圳先进技术研究院 一种等离子体空气消杀处理装置
DE102021111097B4 (de) * 2021-04-29 2023-04-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Hohlkathodensystem zum Erzeugen eines Plasmas und Verfahren zum Betreiben eines solchen Hohlkathodensystems

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JP3206095B2 (ja) * 1991-04-12 2001-09-04 株式会社ブリヂストン 表面処理方法及びその装置
DE4235953C2 (de) * 1992-10-23 1998-07-02 Fraunhofer Ges Forschung Sputterquelle mit einer linearen Hohlkathode zum reaktiven Beschichten von Substraten
EP0659465B1 (de) * 1993-12-23 1999-04-07 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Verfahren und Vorrichtung zur Abgasreinigung
SE9403988L (sv) * 1994-11-18 1996-04-01 Ladislav Bardos Apparat för alstring av linjär ljusbågsurladdning för plasmabearbetning
DE19581551B4 (de) * 1995-01-04 2006-08-17 Fujitsu Ltd. Gasreaktor
JP3395507B2 (ja) * 1996-02-08 2003-04-14 株式会社ブリヂストン 加硫ゴムの表面処理方法及びゴム系複合材料の製造方法
DE19717889C2 (de) * 1997-04-28 2003-02-13 Inst Niedertemperatur Plasmaph Vorrichtung und Verfahren zur Zersetzung von giftigen Schadstoffen in Abgasen von Verbrennungsprozessen
DE59809089D1 (de) * 1997-04-28 2003-08-28 Inst Niedertemperatur Plasmaph Vorrichtung und verfahren zur zersetzung von schadstoffen in abgasen von verbrennungsprozessen
DE19717890C5 (de) * 1997-04-28 2004-05-27 Institut für Niedertemperatur-Plasmaphysik e.V. an der Ernst-Moritz-Arndt-Universität Greifswald Verfahren und Vorrichtung zur plasmagestützten Zersetzung von Ruß in Verbrennungsabgasen
DE19722624C2 (de) * 1997-05-30 2001-08-09 Je Plasmaconsult Gmbh Vorrichtung zur Erzeugung einer Vielzahl von Niedertemperatur-Plasmajets

Also Published As

Publication number Publication date
JP2003528707A (ja) 2003-09-30
AU4446400A (en) 2000-11-10
SE516336C2 (sv) 2001-12-17
EP1177714A1 (en) 2002-02-06
JP4699614B2 (ja) 2011-06-15
EP1177714B1 (en) 2012-11-21
SE0000167L (sv) 2000-10-29
WO2000065887A1 (en) 2000-11-02

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