RU2388999C1 - Micromechanical gyroscope (versions) and adjustment methods thereof, based on using amplitude-modulated quadrature testing effect - Google Patents

Abstract

FIELD: physics. ^ SUBSTANCE: invention relates to micromechanics, particularly to vibration-type micromechanical gyroscopes (MMG) in which position of the mobile mass (MM) on the axis of primary oscillations (t) varies according to the expression (t)=sin(ë1t). In order to adjust parameters of the oscillating circuit of the suspension and parametres of electronic components for monitoring correct operation, a test effect of the form B(t)sin(ë1t) is created on the mobile mass by varying voltage across electrodes lying over the lateral faces of the mobile mass, or by connecting the electrodes of the secondary oscillation channel of the micromechanical gyroscope to a signal source proportional to B(t)sin(ë1t), which can be formed using a modulator connected to the motion sensor of the mobile mass on the axis of primary oscillations and a voltage source B(t). The control signal for parametre automatic adjustment systems in the micromechanical gyroscope is extracted through successive demodulation of the signal from the motion sensor of the mobile mass on the axis of secondary oscillations using demodulators with reference signals sin(ë1t) and B(t). To adjust the resonance frequency of the suspension of the micromechanical gyroscope, the control signal is transmitted to electrodes of the secondary oscillation channel, and when adjusting phase shift of the signal of the secondary oscillation channel, this signal is transmitted to the control input of a phase-shifting circuit. In order to vary the slope of the micromechanical gyroscope in which there is automatic adjustment of resonant frequency with a series differentiating element, there is a device with a variable transfer constant. Continuous testing of correct operation of the micromechanical gyroscope is done by comparing signals generated in the micromechanical gyroscope due to the testing effect, with standard signals. ^ EFFECT: increased accuracy and faster operation of the micromechanical gyroscope, simplification of the design of the micromechanical gyroscope. ^ 16 cl, 11 dwg

Description

The invention relates to the field of micromechanics, in particular to micromechanical gyroscopes (MMGs) of vibration type with schemes for adjusting the parameters of the vibrational loops of the suspension, the parameters of electronic components in these gyroscopes and monitoring proper operation.

In MMG, the moving mass (PM) is attached to the base using at least a biaxial resonant suspension. The resonant frequency of the suspension along the axis of the primary vibrations is selected below the resonant frequency of the suspension along the axis of the secondary vibrations. MMG operating modes are possible both with coincidence of the resonant frequencies of the suspension, and work with a small shift of the resonant frequencies of these suspensions. In order for the MMG parameters to remain constant, it is necessary that the frequency difference and the parameters of the resonant suspensions remain constant. With a difference in resonance frequencies of 5% or more, the MMG parameters change to a much lesser extent than when MMGs work with reduced resonant frequencies of suspensions. A change in one of these frequencies leads to changes in the phase difference between the signals of the channels of primary and secondary oscillations and a significant (at times) change in the steepness or scale factor of the MMG. Therefore, to save the MMG parameters with a small difference between the resonant frequencies constant in them, automatic parameter adjustment systems are used. In these systems, adjustment is carried out after determining the response of certain components of MMG to the test effect. One of the most sensitive to changing working conditions is the PM resonant suspension. When the resonance frequency of the suspension changes, both the conversion coefficient of the micromechanical part (the ratio between the measured angular velocity and the amplitude of the secondary vibrations of the PM) and the conversion coefficient of the electronic part due to a change in the phase of the signal of the PM motion sensor along the axis of the secondary vibrations fed to the input of the synchronous detector with the reference signal from the PM displacement sensor along the axis of the primary vibrations. Therefore, MMGs use resonant frequency or / and phase adjustment systems.

In the system for adjusting the resonant frequency of the PM suspension along the axis of secondary vibrations (f ₂ ) to the frequency of primary vibrations (f ₁ ) f. Bocsh (US Pat. No. 6553833) uses a test signal consisting of two harmonic signals at frequencies (f ₁ ± Δf). In another patent of this company (US Pat. No. 6654424), in addition to this signal, it is proposed to additionally use a pair of signals of the same frequency, but orthogonal to them, i.e. shifted by 90 °.

A similar solution to the problem of tuning the resonant frequency in MMG was considered in Chinwuba DE "Redout Techniques for High-Q Micromachined Vibratory Rate Gyroscopes" PHD Dissertation, University of California, Berkeley, 2007, p. 19, fig. 3.4. To solve it, two signals are also used (f ₁ ± Δf), which are summed with the signal of the capacitive PM displacement sensor. In this work, on pages 17, 18 it is indicated that if you use a test signal at the frequency of the primary oscillations, it will not be possible to determine the mismatch of the resonant frequencies and this problem is overcome by the fact that two test signals are used, the frequency of one of which is higher and the other below the frequency primary oscillations, while the frequencies of these test signals are selected so that they do not appear in the desired band of the useful signal.

Thales proposed (US Pat. No. 7159461) to use a frequency-modulated signal with a center frequency of f ₁ and a frequency deviation of 0.1 f ₁ as a test signal.

The company Litef (US Pat. US No. 7278312) as a test signal proposed to use the noise voltage in the signal at the output of the PM displacement sensor along the axis of the secondary vibrations.

As a test signal, a quadrature interference can be used, as proposed in RF patent No. 2308682.

Test signals in micromechanical sensors are used not only in systems for stabilizing the parameters of individual nodes. They can be used in determining the operability of these sensors, which is especially relevant in the case of the use of such sensors in systems and devices that ensure, for example, the safety of passengers in the car. An example of such a construction of a continuous monitoring system of a micromechanical sensor is given in US Pat. US No. 7086270. In it, as a test signal, according to the reaction to which the micromechanical part of the sensor determines the serviceability of the latter, a signal is used whose frequency is higher than the actual impact.

The report of Link T. et al "A new self-test and self-calibration concept for micro-machined gyroscopes"Transducers'05 The 13 ^{th International Conference on Solid-State Sensors} Actuators and Microsystems, Seul, Korea, June 5-9, 2005, pp.401-404 described MMG, which is installed in an additional suspension with electrodes that provide not only the movement of the PM around the axis of secondary vibrations, as is the case in the above methods for generating test signals, but also the movement of the entire MMG around the axis of sensitivity. This allows you to set the calibration movements that simulate the movement of the object and to determine and adjust the characteristics of the MMG by the reaction to the signals supplied to the electrodes. Such a solution significantly complicates the micromechanical part of the MMG.

MMG testing can be performed before or during operation by supplying a logical signal that causes a shift in the sensor readings by a certain amount, as is done in Analog Devices MMG ADIS16130 (see ADIS16130.pdf, page 10). The disadvantage of this solution is that testing causes a change in the sensor readings, which must be compensated, which leads to an increase in the MMG error (since the bias of the readings during testing depends on external factors, for example, temperature (see Fig. 12) and the complexity of the circuit signal processing.

A common solution (see US Pat. No. 6553833, 6654424, 7159461, 7086270) for sensors with a high-frequency test signal is that these test signals are formed so that the test signal is outside the sensor bandwidth so that then in the output channel this test signal could be suppressed using filters, which ultimately degrades the performance of micromechanical sensors and complicates the sensors themselves. The disadvantage of the solution according to US Pat. US No. 7278312 is the difficulty of setting the minimum noise, and the solution according to US Pat. RF №2308682 is operable only in the absence of a sign-constant measured angular velocity.

Thus, the use of test signals of a known shape in micromechanical sensors leads to a deterioration in the speed of the sensors, their complexity or is inoperative under certain operating conditions.

As a prototype of the proposed method of forming a test effect on the moving mass of a micromechanical gyroscope, the method according to US Pat. US No. 6553833, which has the disadvantages described above.

The objective of the invention is to increase the speed of MMG, its simplification and increased accuracy.

The problem is solved in that when forming a test action on the moving mass of a micromechanical gyroscope, the movement of which along the axis of primary oscillations γ changes in time (t) in accordance with the expression:

где

- угловая частота,

Where

- angular frequency,

consisting in changing the voltages at the electrodes located along the axis of the secondary oscillations of the moving mass, the voltage U (t) at one or more electrodes is changed so that the harmonic component A (t) at a frequency ω _{1 of} magnitude

изменяется в соответствии с выражением:

changes according to the expression:

где амплитуда B(t)≠const., С(α,γ(t)-емкость между подвижной массой и электродом, на котором изменяют напряжение, α-перемещения ПМ по оси вторичных колебаний

where the amplitude B (t) ≠ const., C (α, γ (t) is the capacitance between the moving mass and the electrode on which the voltage is changed, α-displacements of the PM along the axis of secondary vibrations

In addition, the problem is solved in that in a micromechanical gyroscope with an electrode structure in which the overlap area between the moving mass and one or more electrodes changes with the oscillations of the moving mass along the axis of the primary vibrations, the voltage on these electrodes is changed with a frequency less than the frequency of the primary vibrations.

In addition, the problem is solved in that in a micromechanical gyroscope with an electrode structure in which the overlap area between the moving mass and one or more electrodes does not change with oscillations of the moving mass along the axis of the primary vibrations, the voltage on these electrodes is changed with a frequency equal to the frequency of the primary oscillations in phase with the primary oscillations of the moving mass, while changing the amplitude of these stresses.

The proposed method for generating a test signal provides the creation of an amplitude modulated quadrature moment or force. This moment (or force) is in phase with a quadrature noise, for the suppression of which MMG uses known means, in particular, synchronous detection. Therefore, to suppress the reaction to the test signal, it is not necessary to complicate the electronic part of the MMG and introduce additional filters. This provides the ability to maintain maximum speed MMG, tk. it is not necessary to reduce the passband of the sensor, leaving part of the spectrum of operating frequencies for the test signal. On the other hand, the amplitude modulation of the quadrature signal, as it were, marks the test signal and allows you to find the response of the MMG elements to the test signal, excluding the components due to other signals and reasons.

Known electrode structures that allow you to create a moment or force in-phase with quadrature interference. Such structures for RG-type MMG are described in US Pat. No. 6,067,858 (FIG. 20), RF No. 2320962, and for LL-type MMG are described in US Pat. No. 7,213,458 (FIG. 2).

The disadvantage of the electrode structure according to US Pat. US No. 6067858 is that its use significantly increases the area occupied by the micromechanical part on the silicon wafer, and the structure according to US Pat. RF No. 2320962 - due to the fact that the quadrature interference can be in phase or out of phase with PM oscillations, the electrodes are located above the PM tooth zones on both sides of the MMG sensitivity axis (electrodes 14, 16 and 15, 17 in FIG. 3 of the patent of the Russian Federation No. 2320962), although the suppression of the quadrature noise due to the formation of the quadrature moment of the desired magnitude and sign is achieved using only one pair of electrodes. The need to form excess electrodes and, accordingly, the conclusions from them complicates the design and increases the area occupied by the micromechanical part of the MMG. The prototype electrode structure for MMG RR-type selected structure according to US Pat. RF №2320962.

The disadvantages of the structure according to US Pat. USA No. 7213458 can be attributed to the fact that with a large level of quadrature interference, the area of the electrodes located above the tooth zone of the PM may not be enough and to suppress the interference it is necessary to use the main electrodes located under the PM. In this case, to reduce the dimensions of the MMG, it may be more appropriate to use the main part of the electrodes above the tooth zone to measure the displacements of the PM along the axis of the primary vibrations. This structure is selected as a prototype for the electrode structure for MM-LL-type.

The objective of the invention for both of the proposed structures is to reduce the dimensions of the MMG during the formation of the proposed test effects on the moving mass.

The problem for MMR RR-type is solved by the fact that in a gyroscope with an electrode structure containing a moving mass, having the form of sectors symmetrically located relative to the sensitivity axes of the micromechanical gyroscope and secondary vibrations of the moving mass, and electrodes located above or below the moving mass, for implementation of the proposed method for forming a test effect, part of these electrodes is located above the lateral boundaries of the sectors.

The problem for LL-type MMG is solved by the fact that in a gyroscope with an electrode structure containing a moving mass having the shape of a rectangle, the first pair of sides of which is perpendicular to the direction of the primary vibrations, and the second pair of sides parallel to them, and the electrodes located above or below the moving mass that part of these electrodes is located above the lateral boundaries of one or two of the first pair of sides.

In addition, the problem is solved by the fact that holes are made in the moving mass, and part of the electrodes are located above the edges of the holes oriented perpendicular to the direction of the primary vibrations.

In contrast to the known electrode structures that create moments or forces acting on the PM that are in phase with the primary vibrations, the proposed electrode structures do not require the formation of large-scale effects (at the level of the MMG measurement range and above), therefore, it is possible to perform electrodes to generate test effects significantly smaller area compared to the prototype and place them in the micromechanical part of the MMG with virtually no increase in size, using or modifying, for example, technological holes intended for etching silicon. Also, the formation of an excessive number of electrodes is not required, as is the case in the device according to US Pat. RF №2320962, because the test effect should be both in-phase and out-of-phase with quadrature interference.

As a prototype of the proposed method, adjusting the resonant frequency of the suspension of the moving mass along the axis of the secondary vibrations, the method according to US Pat. US No. 6553833, which has inherent disadvantages due to the method of forming a test effect in it.

Accordingly, the objective of the invention is to increase the speed of MMG, its simplification and increased accuracy.

The problem is solved in that when adjusting the resonant frequency of the suspension of the moving mass along the axis of the secondary oscillations, the voltages on the electrodes located along the axis of the secondary vibrations are changed depending on the signal component of the moving mass displacement sensor along the axis of the secondary vibrations proportional to B (t).

In addition, the problem is solved in that a component proportional to the amplitude B (t) is isolated by successive demodulation of the signal of the moving mass displacement sensor along the axis of the secondary oscillations, first with a reference signal, in-phase primary oscillations of the moving mass, and then with a reference signal proportional to B (t).

Essentially, due to double demodulation in the proposed method, it is performed sequentially: first, quadrature signals are extracted, and then the signal whose amplitude varies proportionally to B (t) is selected among the quadrature signals. And it is precisely depending on this selected signal that the voltages at the electrodes in the MMG are changed to adjust the resonance frequency of the suspension along the axis of the secondary vibrations to the frequency of the primary vibrations.

The prototype device for implementing the proposed method for adjusting the resonant frequency selected MMG according to US Pat. RF №2320962, the disadvantage of which is the low sensitivity due to operation in the mode with the detuning of the resonant frequencies of the suspensions at the level of 3%. For MMG to work with the combined resonant frequencies of the suspensions, it is necessary to introduce a frequency control loop into it, which implements the method proposed above.

Accordingly, an object of the invention is to improve the accuracy of MMG.

The problem is solved in that in the MMR of the RR type, implementing the proposed method for adjusting the resonant frequency and containing the moving mass, made in the form of sectors symmetrically located relative to the sensitivity axes of the micromechanical gyroscope and secondary oscillations of the moving mass, while the lateral surfaces of these sectors contain teeth, three pairs of electrodes located above the moving mass, which also have sectors, while the first pair of electrodes is located above the tooth zones of the moving mass, which are located on one side of the axis of sensitivity of the micromechanical gyroscope, the second pair of electrodes is located symmetrically about this axis, and the third pair of electrodes is located on this axis and the electrodes of each pair are symmetrical about the axis of the secondary vibrations, the stators located on the base and having teeth with teeth the movable mass form a comb electrode structure, a suspension in the form of torsion bars, with which the movable mass is suspended from a support mounted on the base, the device in excitation of primary oscillations, connected between the stators and containing a first moving mass displacement sensor and an electric signal conversion device, a second moving mass displacement sensor made in the form of a differential transresistive amplifier, the inputs of which are connected to the first pair of electrodes, a constant voltage source connected to the second pair of electrodes , the first demodulator, the input of which is connected to the output of the transresistive amplifier, and the input for the reference signal is connected to the output of the first a moving mass displacement sensor, an alternating voltage source is introduced, which is connected in series with a constant voltage source, a second demodulator, the input of which is connected to the output of the first demodulator, and the input for the reference signal is connected to the introduced alternating voltage source, and an integrator whose input is connected to the output of the second demodulator, and the output with a third pair of electrodes.

The prototype of another embodiment of the device for implementing the proposed method for adjusting the resonant frequency is MMG, described in [Peshekhonov et al. Results of the development of a micromechanical gyroscope. XII St. Petersburg International Conference on Integrated Navigation Systems May 23-25, 2005, pp. 268-274, Fig. 2, 3], the disadvantage of which is low sensitivity due to operation in the mode with detuning of resonant frequencies of suspensions at the level of 3% . For MMG to work with the combined resonant frequencies of the suspensions, it is necessary to introduce a frequency control loop into it, which implements the method proposed above.

Accordingly, an object of the invention is to improve the accuracy of MMG.

The problem is solved in that in the RR-type MMG that implements the proposed method for adjusting the resonant frequency and contains the moving mass, made in the form of sectors symmetrically located relative to the sensitivity axes of the micromechanical gyroscope and the secondary vibrations of the moving mass, two pairs of electrodes, each of which has electrodes are located symmetrically with respect to these axes above the moving mass, while the electrodes of the first pair are electrodes of a capacitive sensor for moving the moving mass along the secondary axis oscillations, and the electrodes of the second pair are electrodes of a capacitive moment sensor, stators located on the base and having teeth, which, with teeth of the moving mass, form a comb electrode structure, a suspension in the form of torsions, by which the moving mass is suspended from a support mounted on the base, a primary oscillation excitation device connected between the stators and comprising a first moving mass movement sensor and an electric signal conversion device, a second moving sensor of the first mass, made in the form of a differential amplifier, the inputs of which are connected to the electrodes of the first pair, the first demodulator, the input of which is connected to the output of the second moving mass displacement sensor, and the input for the reference signal is connected to the output of the first moving mass displacement sensor, amplifiers whose outputs are connected with the electrodes of the torque sensor, an alternating voltage source, second and third demodulators and a modulator are introduced, while the outputs of the second and third demodulators are connected respectively through the first and integrators with the input of the summing device and the inputs of the amplifiers of the same name, the source of alternating voltage through the summing device is connected to a modulator, the output of which is connected to the opposite inputs of the amplifiers, while the inputs for the reference signal of the second, third demodulators and the modulator are connected respectively to the output of the second moving mass displacement sensor through a 90 ° phase shift device, with an AC voltage source and an output of a second moving mass displacement sensor through the device phase driving.

An analogue of the proposed method for determining the phase shift of the signal in the channel of secondary vibrations relative to the signal of the moving mass displacement sensor in the channel of primary vibrations in MMG is the method that is used in the device according to US Pat. RF №2282152. The change in this phase shift in it is determined by the magnitude of the DC component of the voltage at the output of the demodulator, which should suppress quadrature interference. Those. in this device, the quadrature interference acts as a test signal. The disadvantage of this method is that it can be used only if the measured MMG angular velocity does not contain a constant component, otherwise the constant component of the signal due to the measured angular velocity cannot be distinguished from the constant component due to a phase change between the reference signal and the quadrature a hindrance. A possible solution to this problem, proposed in this patent, which consists in changing the operating mode during the circulation of the object, complicates the use of MMG.

As a prototype of the selected method of adjusting the phase difference between the signals in the channels of primary and secondary oscillations, which is used in US Pat. US No. 6553833. In it, according to the test signal, the resonance frequency of the PM suspension loop is tuned along the axis of secondary vibrations to the primary oscillation frequency, at which a constant 90 ° phase shift introduced by the secondary oscillation circuit is provided.

The disadvantage of this method is that in a number of MMG applications it can be advisable to work with resonance frequency detuning (for example, in the case when it is necessary to ensure the steepness or scale factor of MMG and / or a sufficiently wide passband), at which the phase shift is not equal to 90 ° , and the use of two test signals necessitates the introduction of filters to suppress these signals and, accordingly, reduce the speed of MMG.

Accordingly, the object of the invention is to increase the speed of MMG, its simplification and increased accuracy.

The problem is solved in that in order to determine the phase shift of the signal in the channel of the secondary oscillations relative to the signal of the moving mass displacement sensor in the primary oscillation channel in the MMG, containing at least one electrode located misaligned with the direction of the primary oscillations of the moving mass, and connected to this to the electrode, the voltage source B (t), consisting in the first synchronous detection of the signal of the moving mass displacement sensor in the secondary oscillation channel using the first reference signal, as which uses the signal of the moving mass displacement sensor in the primary oscillation channel, after the first synchronous detection, a second synchronous detection is additionally performed using the second reference signal, the voltage B (t) is used as it, and the phase of the first reference signal is changed until the average the signal value after the second synchronous detection does not become equal to zero.

As an analogue and prototype of the proposed device, in which the proposed method for determining the phase shift of the signal in the secondary vibration channel relative to the signal of the moving mass displacement sensor in the primary vibration channel is implemented, the above devices are selected (Pat. RF No. 2282152 and US Pat. No. 6553833, respectively ) Also an analogue of the proposed device is MMG compensation type with a channel for adjusting the resonant frequency of the suspension along the axis of the secondary oscillations according to US Pat. US No. 7278312.

The disadvantages of the prototype and analogues noted above.

The objective of the invention is to increase the speed of MMG, its simplification and increased accuracy.

The problem is solved in that in the MMG containing the moving mass, made in the form of sectors symmetrically located relative to the sensitivity axes of the micromechanical gyroscope and the secondary vibrations of the moving mass, the resonant suspension of the moving mass, made in the form of torsions, with which the moving mass is suspended from the support, mounted on the base, a comb electrode structure, a device for exciting primary oscillations, the inputs and outputs of which are connected to the corresponding electrodes of the comb structures, electrodes located on the axis of secondary vibrations, having the shape of sectors, while at least one of the electrodes is located above the lateral boundary of one of the sectors, the first capacitive sensor for moving the moving mass along the axis of the primary vibrations, the second sensor for moving the moving mass along the axis secondary vibrations, while the inputs of the first and second demodulators are connected to the output of the second moving mass displacement sensor, the outputs of which are connected through amplifying links to the inputs of the first and second modulators, inputs for the reference signals of the same modulators and demodulators are connected through the first and second phase-shifting circuits to the output of the first moving mass displacement sensor, the outputs of the modulators are connected through at least one of the electrodes located along the secondary axis, an alternating source is introduced voltage, the output of which is connected to an electrode located above the lateral boundary of one of the sectors, the third phase-shifting circuit, which is designed as a controlled, follower but the third demodulator and integrator are connected, while the inputs of the third demodulator are connected to the output of the first demodulator and the output of the introduced AC voltage source, the integrator output is connected to the control input of the third phase-shifting circuit, which is connected between the output of the first moving mass displacement sensor and the inputs of the first and second phase-shifting circuits .

Thanks to the introduced elements in the proposed MMG of compensation type, adjustment of the phase of the reference signal is achieved in such a way that the PM movement signal due to the test action, the method of formation of which is proposed in this application, is completely suppressed in the channel for measuring the measured angular velocity due to the exact adjustment of the phase of the reference signal of the demodulator .

The prototype of the proposed device, which implements the proposed method of forming a test effect, is the device according to US Pat. US No. 6553833. In it, due to the introduction of a damping coupling, a decrease in the Q factor in the channel of secondary oscillations is achieved (see Fig. 4). The disadvantage of the prototype is that the steepness of this MMG is set at the manufacturing stage. It is determined by the programmed coefficient for the damping term. When working in conditions where the range of measured MMG angular velocities varies, it is advisable to change the steepness of the MMG to increase its sensitivity by reducing the range of operation. In the prototype, such an extension of functionality is missing.

The objective of the invention is to expand the functionality of MMG and increase its accuracy

The problem is solved in that in an MMG with a frequency-locked loop and damping feedback in the secondary oscillation channel, which is implemented as a differentiating element connected between the output of the moving mass displacement sensor along the axis and electrodes located on this axis, a device is introduced in series with the differentiating element with variable gear ratio.

In addition, the problem is solved in that in an MMG with a frequency locked loop and damping feedback in the secondary oscillation channel, which is implemented in the form of series-connected differentiating element connected between the output of the moving mass displacement sensor along the axis and the electrodes located on this axis, and a device with a variable transmission coefficient, a device has been introduced for extracting the average value of the input quantity module, the output and input of which are connected respectively to the input for changing ffitsienta transmission and an input device with variable transmission ratio.

The introduced device with a variable transmission coefficient allows you to change the slope of the MMG signal from an external source of control signal. As such a signal, you can use the output signal of the MMG and automatically adjust the sensitivity of the MMG depending on the range of changes in the current values of the measured angular velocity.

The prototype of the proposed method of testing MMG is a method for continuous testing of the serviceability of the micromechanical sensor described in US Pat. US No. 7086270, criticism of which is given above.

The objective of the invention is to increase the speed of MMG, simplifying its design while providing continuous monitoring of the health of his work.

The problem is solved in that, in the MMG, a force modulated in amplitude (moment) is used as a test signal, in phase with the force causing quadrature noise, which is formed by changing the voltage on the electrodes located along the axis of the secondary oscillations of the moving mass, and the reaction to the test signal determined by the first demodulation of the output signal of the moving mass displacement sensor along the axis of the secondary oscillations using the reference signal at the frequency of the primary oscillations and the second demodulation using the reference signal proportional to B (t).

The inventive method is illustrated by drawings.

Figure 1 shows a block diagram of a channel of secondary vibrations

In figure 1, the following notation:

1 - channel primary oscillations MMG

2 - micromechanical part of the channel of secondary vibrations MMG

3 - link with a coefficient (K ₁ ), reflecting the relationship between the speed of movement of the PM along the axis of primary vibrations and the force or moment acting on the PM in the presence of an angular velocity Ω along the sensitivity axis MMG

4 - a link with a coefficient (K ₂ ) of transforming the displacements of the PM along the axis of the primary vibrations into the force or moment acting on the PM (the so-called quadrature interference)

5 - multiple link

6 - adder forces (moments) acting on the PM

7 - PM displacement sensor along the axis of secondary vibrations

8 - demodulator

9 - block conversion of the electrical signal

10 - electrostatic force or torque sensor

Figure 2 shows a view of the test effect on the PM and the impact due to Coriolis acceleration

In figure 2, the following notation:

11 - test impact on PM

12 - impact on PM due to Coriolis acceleration when turning MMG with angular velocity P

13 - change in the amplitude of the test effect on the PM

14 - change Ω

Figure 3 shows a variant of the known electrode structure (RF patent No. 2320962), with which the proposed test effect on the PM can be formed.

In figure 3, the following notation:

15 - PM

16 - electrode located above the PM

17, 17a - electrodes located above the tooth zone PM to the left of the Y axis

18, 18a - tooth zones PM under the electrodes 17, 17a, respectively

19 - tooth zone PM

20, 20a - electrodes located above the tooth zone PM to the right of the Y axis

21 - source of alternating voltage

22 - constant voltage source

23 - support

Figure 4 shows a block diagram of a variant of the MMG, which uses the proposed method of forming a test effect on the PM to form channels for adjusting the resonant frequency and suppressing quadrature interference.

In Fig. 4, the following designations are adopted: the support of PM 15 is designated in the same way as in Fig. 3, i.e., position 23,

24, 25 - stators of a capacitive PM position sensor along the axis of primary vibrations

24a, 25a - stators of a capacitive PM position sensor along the axis of primary oscillations, located symmetrically to the stators 24, 25 relative to the Y axis

26, 27 - stators of a capacitive moment sensor, creating a moment around the axis of primary oscillations

26a, 27a - stators of a capacitive moment sensor generating a moment around the axis of primary oscillations, located symmetrically to the stators 26, 27 relative to the Y axis

28, 29 - a pair of power electrodes located along the axis of the secondary vibrations

30, 31 - a pair of electrodes of a capacitive PM position sensor along the axis of secondary vibrations

32 - the first device phase shift of the electrical signal by 90 °

33 is the first AC voltage source

34, 35 - the first and second differential amplifiers

36-38, 41, 47, respectively, the first, second, third, fourth and fifth demodulators

39 - the second device phase shift of the electrical signal by 90 °

40 - device phase shift of the electrical signal

42, 48 - first and second integrators

43 - the second source of alternating voltage

44, 49 - the first and second summation devices

45 - modulator

46 - differentiating device

50, 51 - the first and second amplifiers

Figure 5 shows a view of the electrode structure of MM-LL-type for implementing the proposed method of forming a test effect.

In figure 5, the following notation:

52 - PM

53 - electrode located under the PM 52

54 - teeth located on the lateral surfaces of the PM 52

55 - stator comb capacitive sensor

56 - stator teeth

57 - supports

58 - torsion bars

59 - a group of electrodes located under the lateral surface of the PM

60 - a group of electrodes located under the lateral surface of the PM between the teeth 54

Figure 6 shows a block diagram of a variant of the MMG, in which the proposed method for determining the phase shift of the signal in the channel of the secondary oscillations relative to the signal of the moving mass displacement sensor in the channel of the primary oscillations in the MMG and adjusting the resonant frequency is used.

Figure 6 adopted the following notation:

elements 15-17a, 20-22 are indicated as in FIG. 3, and elements 15-17a, 20, 20a are presented in the form of their electrical equivalents, elements 32, 33 are shown in FIG. 4

61, 62 - the first and second differential amplifiers

63-66 - respectively, the first, second, third and fourth demodulators

67 - integrator

Figure 7 shows a block diagram of an MMG variant in which the proposed method for determining a phase shift of a signal in a secondary oscillation channel with respect to a signal of a moving mass displacement sensor in a primary oscillation channel in an MMG and adjusting this phase shift is used.

In Fig.7, the following notation:

68 - controlled phase shift device of the electrical signal

The remaining elements in FIG. 7 are denoted in the same manner as in FIG. 6.

On Fig shows a part of a block diagram of a variant MMG, which uses the proposed method for determining the phase shift of the signal in the channel of the secondary oscillations relative to the signal of the moving mass displacement sensor in the channel of the primary oscillations in the MMG and adjusting this phase shift. The signal thus formed is used in the MMG to form feedback on the force (moment).

In Fig.8, the following notation:

69, 70 - respectively, the first and second demodulators

71, 72 - respectively, the first and second modulators

73, 74 - respectively, the first and second amplifying links

75, 76 - respectively, the first and second phase-shifting circuit

77 - totalizer

78 - controlled phase-shifting circuit

79 - third demodulator

80 - integrator

Figure 9 shows a variant of the MMG flowchart, which uses the proposed method for adjusting the resonant frequency and changing the steepness of the micromechanical part of the MMG depending on the magnitude of the measured speed.

In Fig.9, the following notation:

elements 15-20a, 32, 33 are indicated as in FIG. 6, and elements 24, 25 as in FIG. 4, and are presented in the form of their electrical equivalents

81-86 - operational amplifiers (op amps)

87-92 - resistors

93-96 - demodulators

97, 98 - integrators

99 - phase shifting circuit

100 - AC voltage source

101 - differentiating link

102 - inverting link

103, 104 - DC voltage sources

105, 105a - differential amplifiers

106-113 - resistors

114 - low-pass filter (low-pass filter)

115 - element with variable gear ratio

Figure 10 shows an example of the implementation of the element with a variable gain 115

Figure 10 adopted the following notation:

element 101 is indicated as in FIG. 10

116, 117 - multipliers

118 - resistor

119 - capacitor

Figure 11 shows an example of the MMG, in which continuous testing of faulty operation and its indication is performed.

In Fig.11, the following notation:

elements 93-105 are indicated as in FIG. 9

120 - indicator

The proposed method is as follows.

In figure 1, the elements are connected as follows. The primary oscillation channel 1 has outputs γ and dγ / dt, which correspond to the movements of the PM, which in Fig. 3 is designated as PM 15, along the axis of the primary vibrations and the speed of these movements. These values are supplied to the inputs of links 3, 4 with coefficients K1 and K2, respectively. The third output of block 1 corresponds to the output of the capacitive displacement transducer PM, it is an electric signal proportional to γ, which is used as the reference signal of the demodulator 8. The output signal of block 3 in block 5 is multiplied with an angular velocity Ω, around the sensitivity axis MMG. The output signals of blocks 5 and 4 are the values of forces or moments (depending on the type of MMG LL- or RR-), respectively, due to Coriolis acceleration and quadrature interference. These moments are summed up by element 6, the output of which is connected to the input of the micromechanical part of the secondary oscillation channel MMG 2, which is presented as a second-order resonant link. The output of this link α through the PM displacement sensor along the axis of secondary vibrations 7 is connected to the inputs of the demodulator 8 and controller 9. The latter is connected via the electrostatic force (or torque) sensor 10 to the input of the adder 6 of the forces (moments) acting on the PM. At the input of element 10, the voltage Ut is applied to create a test effect on the PM along the axis of secondary vibrations.

The channel of secondary vibrations MMG works as follows.

Force F, acting on PM 15, contains four components:

where K3, K4 are the proportionality coefficients.

Wherein

where γ0 is the amplitude of the primary oscillations.

Note that with the help of the Uoc signal, it is possible to ensure a decrease in the Q factor in the channel of secondary oscillations, to suppress quadrature interference (see US Pat. No. 6553833). The test signal Ut can not be applied directly to the torque sensor, but to the input of block 10.

As noted above in the prototype of the present invention, to determine the difference in the resonant frequencies of the suspensions, which are indicated on the resonance curve of block 2 by Δf, form two test actions that are equally spaced in frequency from ω1.

Unlike the prototype and analogues, in accordance with the proposed method, the voltage U (t) at one or more electrodes is changed so that the harmonic component A (t) at a frequency ω _{1 of} magnitude

(т.е. производная накопленной энергии в конденсаторах, образованных проводящей ПМ и электродами, расположенными на оси вторичных колебаний, по перемещению α ) изменяется в соответствии с выражением:

(i.e., the derivative of the stored energy in capacitors formed by a conducting PM and electrodes located on the axis of the secondary oscillations with respect to the displacement α) changes in accordance with the expression:

A (t) ≡ B (t) sin (ω ₁ t), where the amplitude B (t) ≠ 0.

Figure 2 shows that the test effect 11 has the form of a harmonic, which is modulated in amplitude (in figure 2, the modulation function is the harmonic signal 13). This harmonic is shifted 90 ° with respect to the effect due to Coriolis acceleration 12, i.e. it is in phase with quadrature interference. However, unlike quadrature interference, which has a constant or slowly changing (due to environmental change or MMG aging) amplitude, the change in the amplitude of the test effect can be made quite high-frequency (the necessary frequency of change is determined by the speed of the tuning loops) and of complex shape. For example, this amplitude can be changed randomly, for which you can use well-known schemes and programs of generators of random variables or numbers.

An example of the formation of the proposed test effects is shown in figure 3.

Here, PM 15, consisting of disk sectors, under the electrodes 16, 17 and 20. Symmetrically to these electrodes are the other three electrodes (16a, 17a and 20a). The lateral surfaces of the disk sectors have teeth 18, 19, which, with the teeth of the stators (not shown in FIG. 3), form comb sensors of movement along the primary axis and torque sensors. The teeth 18, 18a are located under the electrodes 17, 17a. The disk is suspended using torsion bars on a support 23, to which a constant and / or alternating voltage can be supplied. Torsion bars, support 23 and PM 15 are made of doped silicon and therefore can be considered conductors. Sources of AC and DC voltage 21 and 22, respectively, are connected in series and connected to the electrode 17 (or to two electrodes located above the tooth zones PM on one side of the Y axis, for example, 17 and 17a). This electrode structure is described in more detail in US Pat. RF №2320962, where it is shown that the primary vibrations of the PM 15 cause a change in the overlap area between the electrodes 17, 17a, 20, 20a and PM 15, which in turn, when the voltage across these pairs of electrodes (17, 17a and 20, 20a) is different to the occurrence of a moment in phase (or out of phase) with quadrature interference.

If the PM receives voltage U ₂₃ to excite the displacement sensors, and the voltage of the sources 21, 22 are respectively equal to U ₂₁ , U ₂₂ , while

then, taking into account the change in the overlap area between the electrodes above the tooth zones of PM 15 with a change in the position of the PM along the axis of primary vibrations in accordance with expression (2), we obtain that the moment M formed around these axes around the X axis at a frequency of ω _{1 is} proportional

After substituting expressions (4), (5) into expression (6) we get that

Assuming that the values of A ₂₃ , A _{21 are} constant, we find that by changing the constant component A ₂₂ it is possible to generate a moment in the MMG that compensates for the quadrature noise, and at the same time create a phase in-phase with the quadrature noise, the amplitude of which varies with frequencies ω ₂₁ and 2ω ₂₁ . The reaction of unit 2 to at least one of these components can be used to diagnose the micromechanical part of MMG.

The RR-type MMG electrodes in Fig. 4 include stators 24, 25 of a capacitive PM position sensor along the axis of primary vibrations, which have teeth on the side surfaces and together with the PM teeth form a comb electrode structure, a pair of power electrodes 28, 29 and a pair of electrodes 30, 31 of the capacitive PM position sensor located along the axis of the secondary vibrations. This MMG design is described in more detail in the work (Peshekhonov V.G. et al. Results of the development of a micromechanical gyroscope. - Gyroscopy and navigation. - 2005. - No. 3. - P.44-51).

To the support 23 are connected in series with the first device for phase shift 32 of the electrical signal by 90 ° and the first AC voltage source 33.

The inputs of the first (34) are connected to the stators 24, 25, and the second (35) differential amplifiers, which can be made as transresistive amplifiers, are connected to the electrodes 30, 31.

The inputs for the reference signal of the demodulators 36, 37 are connected to the first AC voltage source 33, and the signal inputs of these demodulators are connected respectively to the outputs of the amplifiers 34, 35.

The inputs of the third demodulator 38 are connected to the outputs of the demodulators 36, 37.

The inputs of the fourth demodulator 41 are connected to the output of the demodulator 36 and through the second device phase shift of the electrical signal by 90 ° (39) with the output of the demodulator 37.

The inputs of the fifth demodulator 47 are connected to the second AC voltage source 43 and the output of the third demodulator 38.

The output of the fourth demodulator 41 through the integrator 42 and the first summing device 44 is connected to one input of the modulator 45. In this case, the other input of the summing device 44 is connected to the second AC voltage source 43. The other input of the modulator 45 is connected to the output of the demodulator 36 through the phase shifter 40 .

The output of the fifth demodulator 47 through the second integrator 48 is connected to the inputs of the first and second amplifiers 50, 51 of the same name. The outputs of the modulator and differentiating device 46, the input of which is connected to the output of the demodulator 37, are connected to the bipolar inputs of these amplifiers 49.

The formation of the test effect is as follows.

The displacements of the PM along the axis of primary oscillations γ have a harmonic character and are described by expression (2). Using a capacitive sensor, which includes the stators 24, 25 of the capacitor-voltage converter, these elements are converted into an electric signal on elements 34, 36

which, due to a delay in the low-pass filter of the demodulator 36, may lag by an angle Δφ with respect to the oscillations γ (t). By means of element 40, this lag can be compensated, and in this case, a signal in phase γ (t) will be input to the modulator 45. At the other input of the modulator 45 receives the output signal of the element 44, which may contain a constant component (A ₄₂ ) from the output of the integrator 42 and the signal

Considering the fact that the output of the integrator 48 receives a constant voltage U ₄₈ to the inputs of the amplifiers 50, 51, which have the same sign, and the opposite input of these amplifiers receives a signal from the output of the element 45, then ω ₄₃ = ω ₂₁ after the transformations described above upon receipt of the expression for moment M, one can arrive at an expression that contains the component sin (ω ₂₁ t) sin (ω ₁ t), as in expression (9).

Thus, in MMG with an electrode structure with a constant overlap area between the PM and the electrodes along the axis of the secondary vibrations, the desired test effect on the PM can be formed.

Figure 5 shows the construction of MM-LL-type. Here, the PM 52 is suspended using torsions 58, which are attached to the supports 57 located on the base. On the base under the PM 52 is an electrode 53, which with the PM 52 forms a capacitive PM displacement sensor along the axis of the secondary vibrations. On the base there is also a stator 55 with teeth 56. The lateral surfaces of the PM 52 also have teeth 54, which with teeth 56 form a comb electrode structure used in the MMG to form capacitive displacement and moment sensors. Figure 5 shows the possible placement of auxiliary electrodes intended for the formation of the proposed test effects. In addition to the above-described arrangement of electrodes above or below the PM teeth, these electrodes can be located outside the tooth zone, as shown for the group of electrodes 59 located on the periphery of the side surface, or between the teeth, as shown for the group of electrodes 60.

The principle of the formation of the test effect is similar to that described with respect to the electrodes above the tooth zone. In both cases, when the PM moves, the overlap area changes between the PM and the corresponding electrodes, on which a time-varying voltage is formed. As a result, a force or moment is formed, acting on the PM in the same phase as the moment causing the quadrature noise, with the amplitude changing according to the well-known law in time. The main difference between the electrode structure in FIG. 5 and FIG. 3 is the magnitude of the test effect, which is proportional to the overlap area. The size of the overlap area is important for suppressing quadrature interference, however, the test effect necessary for the normal operation of the tuning and diagnostic systems can be several orders of magnitude lower than the value of the quadrature interference, which must be suppressed in the MMG.

6, the elements are connected as follows.

The inputs of the differential amplifier 61 are connected to the stators 24, 25 of the capacitive PM displacement sensor along the axis of the primary oscillations. The inputs of the differential amplifier 62 are connected to the electrodes 20, 20a.

The inputs for the reference signal of the demodulators 63, 64 are connected to the first AC voltage source 33, and the signal inputs of these demodulators are connected respectively to the outputs of the amplifiers 61, 62.

The outputs of the demodulators 63, 64 are connected to the inputs of the demodulator 65. The inputs of the demodulator 66 are connected to the output of the demodulator 65 and the source 21. The output of the demodulator 66 through the integrator 67 is connected to the electrode 16.

The formation of the test effect in MMG with such an electrode structure is described above.

Along with the moment due to the action of Coriolis acceleration, the formed test effect acts on the PM.

Taking into account only the term with the component sin (ω ₂₁ t), we obtain that the total moment M _Σ

where k ₁ , k ₂ are the coefficients.

Under the action of this moment, the movement of the PM along the axis of the secondary oscillations can be described by the expression

where Δω = ω ₂ -ω ₁ , ak (Δω) and ψ (Δω) are the scale factor and the phase shift introduced by the resonant suspension, which depend on the detuning of the resonant circuits or the difference in their resonant frequencies ω ₁ , ω ₂ .

The high-frequency voltage of the source 33 causes currents to flow through the electrodes of the capacitive sensors, which depend on the capacitances between these electrodes and the PM. These currents are amplified by amplifiers 61, 62 and demodulators 63, 64 are converted into electrical signals proportional to the movements of the PM (γ, α) along the corresponding axes.

The low-frequency component of the product of electrical signals, which are proportional to the displacements γ, α, will contain terms proportional to the quantities Ω (t) sin (ψ (Δω)) and sin (ω ₂₁ t) cos (ψ (Δω)). This component is allocated by the demodulator 65.

When combining resonant frequencies (Δω = 0), the angle ψ = 90 ° and the signal component at a frequency of ω ₂₁ , i.e. due to the test action is equal to zero, and the component proportional to Ω (t) takes the maximum value.

To adjust the resonant frequency ω ₂ in the demodulator 66, the voltage of the source 21 is used as a reference signal.

The low-frequency component of the product of the signal representing the sum of the signals (Ω (t) sin (ψ (Δω)) + sin (ω ₂₁ t) cos (ψ (Δω))), and a reference signal of the form sin (ω ₂₁ t) is extracted by the demodulator 66. This component is proportional to cos (ψ (Δω). Therefore, if this component is fed through an integrator to electrodes located along the axis of secondary vibrations, then due to a known change in negative stiffness, the resonant frequency ω ₂ will change until the input signal is equal to zero, which has place at ψ = 90 °.

Thus, the proposed method of forming a test effect and adjusting the frequency provides the required tuning of the resonant frequency of the PM suspension. It can be noted that the amplifiers 61, 62 can be made according to the transresistive differential amplifier scheme, to form the PM 15 displacement sensor, the electrodes 24a, 25a, PM 15 can be additionally used electrically connected to the support 23, therefore, the common electrode of all capacitive sensors can be designated as PM 15 and as a support 23.

In MMG in figure 4, the formation of a test effect is carried out using elements 43-45 and 49-51, as described above. The moment formed using these elements creates those components of the PM oscillations with a frequency of ω ₁ that are orthogonal to the oscillations caused by the Coriolis acceleration. The amplitude of these oscillations varies with the frequency ω _{43 of the} voltage source 43. When the frequencies ω ₁ and ω ₂ coincide, the signal at the output of the demodulator 38 is in phase with the oscillations caused by the Coriolis acceleration and is orthogonal to the oscillations whose amplitude varies with the frequency ω ₄₃ . Therefore, at the output of the demodulator 38, when the frequencies ω ₁ and ω ₂ coincide, there is only a signal proportional to the angular velocity Ω.

If in the spectrum of the signal at the output of the demodulator 38 there are no components with a frequency of ω ₄₃ , then the output signal of the demodulator 47 is equal to 0.

на выходе демодулятора 38 появляется постоянная составляющая, обусловленная квадратурной помехой, и составляющая на частоте ω₄₃. Последняя демодулятором 47 преобразуется в постоянное напряжение, которое приводит к тому, что выходное напряжение интегратора становится нарастающим или уменьшающимся. Соответственно изменяются напряжения на электродах 28, 29, и это из-за изменения отрицательной жесткости приводит к изменению частоты ω₂ до тех пор, пока она не станет равной ω₁.In the case when

at the output of the demodulator 38, a constant component appears due to quadrature interference, and a component at a frequency of ω ₄₃ . The latter by the demodulator 47 is converted to a constant voltage, which leads to the fact that the output voltage of the integrator becomes increasing or decreasing. Correspondingly, the voltages at the electrodes 28, 29 change, and this, due to a change in the negative stiffness, leads to a change in the frequency ω ₂ until it becomes equal to ω ₁ .

When tuned to resonance (ω ₁ = ω ₂ ), the demodulator 41 emits a constant voltage proportional to the quadrature noise, which is supplied through an integrator 42 to a modulator 45, which generates a voltage at a frequency with a phase that coincides with the primary PM oscillations. This voltage, acting in antiphase to the electrodes 30, 31 in the presence of a constant voltage between the PM and these electrodes, creates a moment that suppresses the quadrature noise.

Due to the differentiation of the output signal of the demodulator 37 by the element 46 and the formation of the output signal of the element 46 of the out-of-phase voltages at the electrodes 28, 29 in the MMG, a decrease in the Q-factor of the suspension along the axis of the secondary vibrations is provided. It can be noted here that with a large value of the Q-factor of the suspension in the secondary oscillation channel when tuning into resonance, the transmission coefficient of element 46 (more precisely, the path from the capacitive sensor along the axis of the secondary oscillations, demodulators 35, 37, amplifiers 50, 51 and the torque sensor on the electrodes 28 29) determines the scale factor of MMG.

Thus, it is shown that the proposed methods for generating a test action and adjusting the frequency provide the required tuning of the resonance frequency of the PM suspension in MMG with an electrode structure in which there are no electrodes along the axis of secondary vibrations with a change in the overlap area.

In Fig. 7, in contrast to Fig. 6, a controlled phase shifter of the electric signal 68 is connected between the output of the demodulator 63 and the input of the demodulator 65, and the output of the integrator is connected to the input for controlling the element 68.

The proposed method for determining the phase shift of the signal is based on the analysis of the PM response to the test effect, which is created using the voltage source 21 and the electrodes with which it is connected. The PM vibrations thus created along the axis of the secondary vibrations, as noted above, are amplitude modulated oscillations at a frequency of ω ₁ , which coincide in phase with the quadrature noise. A signal proportional to the amplitude of these oscillations can be extracted using sequential demodulation of the capacitive sensor signal along the secondary oscillation axis using demodulators, the reference signals of which are the MMG capacitive position sensor signal along the primary oscillation axis and source 21. This signal takes a zero value only when phase shift between signals of the demodulator equal to 90 °. At a difference from 90 °, the input signal of the integrator 67 will change and accordingly change the phase shift introduced by the element 68, until this shift is achieved. The voltage at the input of element 68 (output of the integrator 67) determines the amount of phase shift necessary to compensate for the difference in phase shift between the signals of capacitive sensors from 90 °.

Thus, from the measured value of the voltage at the output of the element 67 and the known functional relationship between the phase and voltage of the element 68, the desired phase shift can be determined.

Note that it is possible to reduce the output voltage range of element 67 if, in series with element 68, an element with a constant phase shift desired for the selected MMG operating mode is connected in series.

For example, when MMG operates with a detuning of 3-5% of the resonant frequency, this constant phase shift is close to 90 °. The advantage of MMG, which implements this method of determining and stabilizing the phase shift between the signals of capacitive sensors, will be the complete suppression of quadrature interference by the demodulator 65.

Note that the inputs of the element 62 can be connected to the electrodes 16, 16a without changing the operation of the phase adjustment loop.

On Fig shows a part of a block diagram of a variant MMG, which uses the proposed method for determining the phase shift of the signal in the channel of the secondary oscillations relative to the signal of the moving mass displacement sensor in the channel of the primary oscillations in the MMG and adjusting this phase shift. The signal thus formed is used in the MMG to form feedback on the force (moment).

In Fig. 8, the elements are connected as follows.

The inputs of the first (element 69) and second (element 70) demodulators are combined and connected to the output of the capacitive PM displacement sensor along the axis of the secondary vibrations. The outputs of these demodulators through the first and second amplifying links (elements 71, 72, respectively) are connected to the inputs of the first and second modulators (elements 73, 74, respectively), the outputs of which are connected to the inputs of the adder 77. The inputs for the reference signal of the same demodulators and modulators are connected to outputs of the same phase-shifting circuits (respectively, the first 75 and second 76). The inputs of these phase-shifting circuits through a controlled phase-shifting circuit 78 are connected to the output of the capacitive PM displacement sensor along the axis of the primary vibrations. The control input of the phase-shifting circuit 78 is connected through an integrator 80 and a third demodulator 79 to a voltage source B (t) and the output of the second demodulator 70.

The block diagram shown in Fig. 8 can be used in MMG in Fig. 6 when it replaces elements 65-67. In this case, MMG is of the compensation type. It compensates for quadrature interference and moments due to Coriolis acceleration by channels with demodulators 69 and 70, respectively, provided that the phase-shifting circuit gives a shift of 90 °, the circuit 76 - 0 °. The adjustment of the phase shift in the device of Fig. 8 occurs in a similar way. as it happens in the device of Fig.7.

In Fig.9, the elements are connected as follows.

For the convenience of presenting electrical connections, the common electrode of all capacitive displacement and moment sensors (PM 15) is shown divided.

Resistors 87-92 are connected between the output and the inverting input, respectively, of the op-amp 81-86. The input of the OS 81 is connected to the electrode 16, the input of the OS 82 with a diametrically located electrode. The outputs of the op-amp 81, 82 through a differential amplifier 105 are connected to the input of the demodulator 93, the other input of which is connected to a voltage source 33. The output of the demodulator 93 is connected to the inputs of the demodulators 94, 95. The inputs of the differential amplifier 105a are connected to the stators of the comb motor. The outputs of the OS 84, 85 are connected to the electrodes located above the tooth zone of the PM on one side of the axis of sensitivity of the MMG, OS 86 - with a pair of others located on the other side of the axis of sensitivity of the MMG. The DC voltage source 103 through the resistors 108, 109 is connected respectively to the inputs of the op amp 84, 85. The DC voltage source 104 through the resistor 111 is connected to the input of the op-amp 86. The output of the differential amplifier 105a is connected to the input of the demodulator 94 and the input of the phase-shifting circuit 99, which is connected to the input element 95. An AC voltage source 100 is connected to the input of the element 96 and through the resistor 113 to the input of the op-amp 86. Resistors 106, 107, 110, 112 are connected to the inputs of the op-amp 83-86, respectively. The outputs of the demodulators 94-96 are connected respectively to the input of the low-pass filter 114 and the input of the element 96, with the input of the integrator 98, with the input of the integrator 97. The outputs of the integrators 97, 98 are connected to the resistors 106, 112, respectively. The output of the element 95 through a series-connected element with a variable gear ratio 115, the differentiating link 101 and the inverting link 102 are connected to the resistor 107. In the MMG in Fig. 9, a suspension resonance self-tuning loop is formed on the elements 81, 82, 105, 93, 94, 96 , 97, 83. These elements work as follows. Amplifiers 81, 82, 105 and demodulator 93 form a capacitance-voltage converter, which, with electrodes connected to the inputs of OA 81, 82, form a PM displacement sensor along the axis of secondary vibrations. Demodulators 94, 96 emit a signal at the frequency of the source 100, which creates a test effect on the PM, if the resonant frequencies of the suspensions do not match. In this case, the output voltage of the integrator changes, and the voltages at the common-mode inputs of the op-amps 81, 82 change. The voltage at the inverting inputs of these op-amps and the electrodes connected to them also changes, which leads to a change in the resonant frequency. The differential amplifier 105a can be formed similarly to the circuit on the elements 81, 82, 105 and 93; together with the stators connected to it, it forms a PM displacement sensor along the axis of the primary oscillations. Due to the automatic tuning of the resonant frequency, the signal at the output of the demodulator 95 is proportional to the amplitude of the PM oscillations with the quadrature noise phase. The average component of these oscillations is suppressed by the output signal of the integrator 98, which is supplied to the electrodes located above the tooth zone of the PM. Negative feedback through links 101 and 115 allows you to change the transmission coefficient of the converter Coriolis acceleration - the voltage at the output of the element 94, which is MMG by changing the transmission coefficient of the element in the negative feedback circuit. Note that a stable transmission coefficient is maintained only under the action of the automatic frequency control system in the case of MMG operation in a mode with closely reduced frequencies.

The elements of FIG. 10 are connected as follows.

The inputs of the multiplier 116 are combined and connected to one input of the multiplier 117, the output of the element 116 through the resistor 118 is connected to the capacitor 119 and the second input of the element 117, the output of which is connected to the input of the element 101.

Elements 118, 119 form a low-pass filter that smooths the output signal of element 116, which is proportional to the square of the output signal MMG. The transmission coefficient of the feedback link in MMG in Fig. 9 with such an implementation of element 115 depends on the level of the measured angular velocity Ω. The lower the level, the weaker the feedback signal. Due to this, at low levels of Ω, the MMG operates at a higher figure of merit, which improves the resolution of the MMG. The change in the MMG scale factor can be taken into account when measuring the signal at the output of element 116.

It should be noted that the link with a variable transmission coefficient can be implemented by other means. In particular, on threshold elements or using elements in which the transmission coefficient varies depending on the input in accordance with the table of values.

11, the indicator 120 is connected to the output of the element 94 and the source 100.

If all the loops in MMG are operational, the voltage at the output of demodulator 94 has a component that is proportional to the test voltage. Their comparison allows us to assess the health of MMG.

To monitor the health of MMG, you can use the signals from the outputs of the integrators 97, 98, the output signal of which is determined by the initial detuning of the resonant frequencies and the level of quadrature interference. For each sample of a micromechanical sensitive element, these values can be certified. Comparison of the current values of the signals from the output of the integrators with the certified values should not go beyond a certain area with the MMG working properly.

Claims (16)

1. The method of generating a test effect on the moving mass of a micromechanical gyroscope, which consists in changing the voltages at the electrodes located along the axis of the secondary vibrations of the moving mass, the movement of which along the axis of the primary vibrations γ varies in time (t) in accordance with the expression: γ (t) = sin (ω ₁ t), where ω ₁ is the angular frequency, characterized in that the voltage at one or more electrodes is changed so that the harmonic component A (t) at a frequency ω _{1 of} magnitude

varies in accordance with the expression: A (t) = B (t) sin (ω ₁ t), the amplitude B (t) ≠ const, respectively C (α, γ (t)) is the capacitance between the moving mass and the electrode on which change the voltage, α - movement of the PM along the axis of secondary vibrations. 2. The method according to claim 1, characterized in that in a micromechanical gyroscope with an electrode structure in which the overlap area between the moving mass and one or more electrodes changes with oscillations of the moving mass along the axis of the primary vibrations, the voltage on these electrodes is changed with a frequency less than the frequency primary fluctuations. 3. The method according to claim 1, characterized in that in a micromechanical gyroscope with an electrode structure in which the overlap area between the moving mass and one or more electrodes does not change when the moving mass oscillates along the axis of the primary vibrations, the voltage on these electrodes changes with frequency, equal to the frequency of the primary oscillations in phase with the primary oscillations of the moving mass, while changing the amplitude of these stresses. 4. The electrode structure of an RR-type micromechanical gyroscope for implementing the method of generating a test action according to claim 1, containing a moving mass having the form of sectors symmetrically located relative to the sensitivity axes of the micromechanical gyroscope and secondary vibrations of the moving mass, and electrodes located above or below the moving mass characterized in that a part of these electrodes is located above the lateral boundaries of the sectors. 5. The electrode structure of the micromechanical gyroscope according to claim 4, characterized in that the holes are made in the moving mass, and part of the electrodes are located above the edges of the holes oriented perpendicular to the direction of the primary vibrations. 6. The electrode structure of an LL-type micromechanical gyroscope for implementing the method of generating a test action according to claim 1, containing a moving mass having the shape of a rectangle, the first pair of sides of which is perpendicular to the direction of the primary vibrations, and the second pair of sides parallel to them, and electrodes located above or under a moving mass, characterized in that a part of these electrodes is located above the lateral boundaries of one or two of the first pair of sides. 7. The electrode structure of the micromechanical gyroscope according to claim 6, characterized in that the holes are made in the moving mass, and part of the electrodes are located above the edges of the holes oriented perpendicular to the direction of the primary vibrations. 8. A method for adjusting the resonant frequency of the suspension of the moving mass along the axis of the secondary vibrations, which consists in changing the voltage at the electrodes located along the axis of the secondary vibrations, depending on the extracted signal component of the moving mass displacement sensor along the axis of the secondary vibrations, characterized in that a component proportional to B (t), where B (t) is the amplitude of the harmonic component A (t) formed by the method of generating a test action on the moving mass of the micromechanical gyroscope according to claim 1. 9. The method according to claim 8, characterized in that the component proportional to the amplitude B (t) is isolated by sequentially demodulating the signal of the moving mass displacement sensor along the axis of the secondary oscillations, first with a reference signal, in-phase primary oscillations of the moving mass, and then with a reference signal proportional to B (t). 10. An RR-type micromechanical gyroscope that implements the resonance frequency adjustment method according to claim 8, comprising a moving mass made in the form of sectors symmetrically located relative to the sensitivity axes of the micromechanical gyroscope and secondary moving mass oscillations, while the lateral surfaces of these sectors contain teeth, three pairs of electrodes located above the moving mass, which also have the form of sectors, while the first pair of electrodes is located above the tooth zones of the moving mass, which are located one at a time well, the side from the sensitivity axis of the micromechanical gyroscope, the second pair of electrodes is located symmetrically relative to this axis, and the third pair of electrodes is located on this axis, and the electrodes of each pair are located symmetrically with respect to the axis of secondary vibrations, the stators located on the base and having teeth that have teeth the masses form a comb electrode structure, a suspension in the form of torsion bars, by means of which the moving mass is suspended from a support mounted on the base, the primary excitation device oscillations included between the stators and containing the first moving mass displacement sensor and an electric signal conversion device, the second moving mass displacement sensor made in the form of a differential transresistive amplifier, the inputs of which are connected to the first pair of electrodes, a constant voltage source connected to the second pair of electrodes, the first demodulator, the input of which is connected to the output of the transresistive amplifier, and the input for the reference signal is connected to the output of the first displacement sensor moving mass, characterized in that an alternating voltage source is introduced into it, which is connected in series with a constant voltage source, a second demodulator, the input of which is connected to the output of the first demodulator, and the input for the reference signal is connected to the introduced alternating voltage source, and an integrator, input which is connected to the output of the second demodulator, and the output to the third pair of electrodes. 11. An RR-type micromechanical gyroscope that implements a resonance frequency adjustment method according to claim 8 and containing a moving mass made in the form of sectors symmetrically located relative to the sensitivity axes of the micromechanical gyroscope and secondary moving mass oscillations, two pairs of electrodes, in each of which the electrodes are located symmetrically relative to these axes above the moving mass, the electrodes of the first pair being the electrodes of the capacitive sensor for moving the moving mass along the axis of the secondary vibrations, and the electron the odes of the second pair are electrodes of a capacitive moment sensor, stators located on the base and having teeth, which with the teeth of the moving mass form a comb-like electrode structure, a suspension in the form of torsion bars, by means of which the moving mass is suspended from a support mounted on the base, the primary oscillation excitation device included between the stators and containing a first moving mass displacement sensor and an electric signal conversion device, a second moving mass displacement sensor, made in in the form of a differential amplifier, the inputs of which are connected to the electrodes of the first pair, the first demodulator, the input of which is connected to the output of the second moving mass displacement sensor, and the input for the reference signal is connected to the output of the first moving mass displacement sensor, amplifiers whose outputs are connected to the moment sensor electrodes, characterized in that an alternating voltage source, second and third demodulators and a modulator are introduced into it, while the outputs of the second and third demodulators are connected respectively through the second and second integrators with the input of the summing device and the inputs of the amplifiers of the same name, the source of alternating voltage through the summing device is connected to a modulator, the output of which is connected to the opposite inputs of the amplifiers, while the inputs for the reference signal of the second, third demodulators and the modulator are connected respectively to the output of the second displacement sensor moving mass through a 90 ° phase-shift device, with an alternating voltage source and the output of a second moving mass displacement sensor through a device phase shift. 12. The method of determining the phase shift of the signal in the secondary oscillation channel relative to the signal of the moving mass displacement sensor in the primary oscillation channel in the MMG, containing at least one electrode located misaligned with the direction of the primary oscillations of the moving mass, and a voltage source B connected to this electrode (t) consisting in the first synchronous detection of the signal of the moving mass displacement sensor in the secondary channel using the first reference signal, which is used as the signal yes a moving mass displacement sensor in the primary oscillation channel, characterized in that, after the first synchronous detection, a second synchronous detection is additionally performed using a second reference signal, the voltage B (t) being used, where B (t) is the amplitude of the harmonic component A (t ) formed by the method of generating a test effect on the moving mass of the micromechanical gyroscope according to claim 1, and the phase of the first reference signal is changed until the average signal value after the second sync detection will not be equal to zero. 13. A micromechanical gyroscope containing a moving mass made in the form of sectors symmetrically located relative to the sensitivity axes of a micromechanical gyroscope and secondary oscillations of the moving mass, a resonant suspension of the moving mass made in the form of torsions, by means of which the moving mass is suspended from a support mounted on the base, comb electrode structure, a device for exciting primary oscillations, the inputs and outputs of which are connected to the corresponding electrodes of the comb structure, elec trodes located along the axis of secondary vibrations, having the shape of sectors, with at least one of the electrodes located above the lateral boundary of one of the sectors, the first capacitive sensor for moving the moving mass along the axis of the primary vibrations, the second sensor for moving the moving mass along the axis of the secondary vibrations , while the inputs of the first and second demodulators are connected to the output of the second moving mass displacement sensor, the outputs of which are connected through amplifying links to the inputs of the first and second modulators, the strokes for the reference signals of the same modulators and demodulators are connected through the first and second phase-shifting circuits with the output of the first moving mass displacement sensor, the outputs of the modulators are connected through at least one of the electrodes located along the axis of the secondary vibrations, characterized in that it introduced an AC voltage source, the output of which is connected to an electrode located above the lateral boundary of one of the sectors, the third phase-shifting circuit, which is designed as controlled connected in series to the third demodulator and integrator, while the inputs of the third demodulator are connected to the output of the first demodulator and the output of the input AC voltage source, the integrator output is connected to the control input of the third phase-shifting circuit, which is connected between the output of the first moving mass displacement sensor and the inputs of the first and second phase-shifting chains. 14. A micromechanical gyroscope with a frequency-locked loop and damping feedback in the secondary oscillation channel, which is implemented as a differentiating element connected between the output of the moving mass displacement sensor along the secondary oscillation axis and electrodes located on this axis, characterized in that it is in series with the differentiating element introduced a device with a variable transmission coefficient. 15. The micromechanical gyroscope according to claim 14, characterized in that a device for extracting the average value of the input quantity module is inserted into it, the output and input of which are connected respectively to the input for changing the transmission coefficient and the input of the device with a variable transmission coefficient. 16. A method of continuous testing of the functioning of a micromechanical gyroscope, which consists in comparing the response of a micromechanical gyroscope to a test signal with a reference one, characterized in that the test signal is a force modulated in amplitude (moment), in phase with the force, causing quadrature interference, which is generated by voltage changes on the electrodes located along the axis of the secondary oscillations of the moving mass, and the response to the test signal is determined by first demodulating the output signal a moving mass displacement sensor along the axis of secondary vibrations using a reference signal at the frequency of primary vibrations and a second demodulation using a reference signal proportional to B (t), where B (t) is the amplitude of the harmonic component A (t) formed by the method of generating the test action on the moving mass of the micromechanical gyroscope according to claim 1.

Images