RU2010141753A - METHOD FOR SCANNING ON A SCANNING PROBE MICROSCOPE AND FORMING A SURFACE IMAGE - Google Patents
METHOD FOR SCANNING ON A SCANNING PROBE MICROSCOPE AND FORMING A SURFACE IMAGE Download PDFInfo
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- RU2010141753A RU2010141753A RU2010141753/28A RU2010141753A RU2010141753A RU 2010141753 A RU2010141753 A RU 2010141753A RU 2010141753/28 A RU2010141753/28 A RU 2010141753/28A RU 2010141753 A RU2010141753 A RU 2010141753A RU 2010141753 A RU2010141753 A RU 2010141753A
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- scanning
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- substrate
- probe microscope
- image
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Abstract
Способ сканирования на сканирующем зондовом микроскопе и формирования изображения поверхности, согласно которому при сканировании зонд или образец перемещают сканером, измеряют расстояние зонд-образец для различных точек поверхности образца, а формирование изображения поверхности производят путем определения и вычитания постоянного наклона и постоянной составляющей, корректировки и фильтрации данных, полученных с помощью сканирующего зондового микроскопа, отличающийся тем, что сканирование поверхности образца выполняют раздельно для двух участков - поверхности подложки и поверхности структурного элемента, находящегося на подложке, без переустановки образца, формируют изображение поверхности структурного элемента путем вычитания постоянного наклона, определенного по результатам сканирования поверхности подложки. A method of scanning with a scanning probe microscope and forming a surface image, according to which, when scanning, the probe or sample is moved by the scanner, the probe-sample distance is measured for various points on the surface of the sample, and the surface image is generated by determining and subtracting the constant slope and constant component, adjusting and filtering data obtained using a scanning probe microscope, characterized in that the scanning of the surface of the sample is performed separately о for two sections - the surface of the substrate and the surface of the structural element located on the substrate, without reinstalling the sample, form the image of the surface of the structural element by subtracting the constant slope determined by the results of scanning the surface of the substrate.
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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RU2010141753/28A RU2462726C2 (en) | 2010-10-11 | 2010-10-11 | Method of scanning on scanning probe microscope and forming image of surface |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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RU2010141753/28A RU2462726C2 (en) | 2010-10-11 | 2010-10-11 | Method of scanning on scanning probe microscope and forming image of surface |
Publications (2)
Publication Number | Publication Date |
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RU2010141753A true RU2010141753A (en) | 2012-04-20 |
RU2462726C2 RU2462726C2 (en) | 2012-09-27 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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RU2010141753/28A RU2462726C2 (en) | 2010-10-11 | 2010-10-11 | Method of scanning on scanning probe microscope and forming image of surface |
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RU (1) | RU2462726C2 (en) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2145055C1 (en) * | 1999-02-08 | 2000-01-27 | Ао "Автэкс" | Process of collection and processing of information about surfaces of sample |
US6810354B1 (en) * | 2002-05-06 | 2004-10-26 | Veeco Instruments Inc. | Image reconstruction method |
US7473887B2 (en) * | 2002-07-04 | 2009-01-06 | University Of Bristol Of Senate House | Resonant scanning probe microscope |
RU70373U1 (en) * | 2007-10-08 | 2008-01-20 | Институт прикладной механики УрО РАН | DEVICE FOR STUDYING A SURFACE OF A SOLID BODY BY A TUNNEL MICROSCOPE |
US20100017920A1 (en) * | 2008-07-21 | 2010-01-21 | Park San-Il | Scanning probe microscope with tilted sample stage |
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2010
- 2010-10-11 RU RU2010141753/28A patent/RU2462726C2/en not_active IP Right Cessation
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Publication number | Publication date |
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RU2462726C2 (en) | 2012-09-27 |
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Date | Code | Title | Description |
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MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20141012 |